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公开(公告)号：US20100239819A1
公开(公告)日：2010-09-23
申请号：US12795318
申请日：2010-06-07
申请人： Peng-Wei Chuang , Caroline A. Ross
发明人： Peng-Wei Chuang , Caroline A. Ross
CPC分类号： B81C1/00031 , B81C2201/0149 , Y10S977/888 , Y10S977/895 , Y10S977/90 , Y10T428/2457 , Y10T428/2462
摘要： The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped grooves promote the formation of a face-centered cubic system (fcc) sphere array that is well ordered. In one embodiment, the (111) planes of the fcc sphere array are parallel to the angled side walls of the V-shaped groove. The (100) plane of the fcc sphere array is parallel to the top surface of the substrate, and may show a square symmetry among adjacent spheres. This square symmetry is unlike the hexagonal symmetry seen in monolayers of spherical domains and is a useful geometry for lithography applications, especially those used in semiconductor applications.
摘要翻译： 本发明涉及将球形形态嵌段共聚物自身组装成基材的V形槽。 虽然球形形态嵌段共聚物通常以体积形成体心立方体系（bcc）球阵列，但是V形槽促进形成良好排列的面心立方体（fcc）球阵列。 在一个实施例中，fcc球阵列的（111）面平行于V形槽的成角度的侧壁。 fcc球阵列的（100）平面平行于衬底的顶表面，并且可以在相邻球体之间显示正方形对称。 该方形对称性与在球形畴的单层中看到的六边形对称不同，并且是用于光刻应用的有用几何形状，特别是在半导体应用中使用的那些。
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公开(公告)号：US07790045B1
公开(公告)日：2010-09-07
申请号：US11854872
申请日：2007-09-13
申请人： Peng-Wei Chuang , Caroline A. Ross
发明人： Peng-Wei Chuang , Caroline A. Ross
CPC分类号： B81C1/00031 , B81C2201/0149 , Y10S977/888 , Y10S977/895 , Y10S977/90 , Y10T428/2457 , Y10T428/2462
摘要： The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped grooves promote the formation of a face-centered cubic system (fcc) sphere array that is well ordered. In one embodiment, the (111) planes of the fcc sphere array are parallel to the angled side walls of the V-shaped groove. The (100) plane of the fcc sphere array is parallel to the top surface of the substrate, and may show a square symmetry among adjacent spheres. This square symmetry is unlike the hexagonal symmetry seen in monolayers of spherical domains and is a useful geometry for lithography applications, especially those used in semiconductor applications.
摘要翻译： 本发明涉及将球形形态嵌段共聚物自身组装成基材的V形槽。 虽然球形形态嵌段共聚物通常以体积形成体心立方体系（bcc）球阵列，但是V形槽促进形成良好排列的面心立方体（fcc）球阵列。 在一个实施例中，fcc球阵列的（111）面平行于V形槽的成角度的侧壁。 fcc球阵列的（100）平面平行于衬底的顶表面，并且可以在相邻球体之间显示正方形对称。 该方形对称性与在球形畴的单层中看到的六边形对称不同，并且是用于光刻应用的有用几何形状，特别是在半导体应用中使用的那些。
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公开(公告)号：US08163374B2
公开(公告)日：2012-04-24
申请号：US12795318
申请日：2010-06-07
申请人： Peng-Wei Chuang , Caroline A. Ross
发明人： Peng-Wei Chuang , Caroline A. Ross
CPC分类号： B81C1/00031 , B81C2201/0149 , Y10S977/888 , Y10S977/895 , Y10S977/90 , Y10T428/2457 , Y10T428/2462
摘要： The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped grooves promote the formation of a face-centered cubic system (fcc) sphere array that is well ordered. In one embodiment, the (111) planes of the fcc sphere array are parallel to the angled side walls of the V-shaped groove. The (100) plane of the fcc sphere array is parallel to the top surface of the substrate, and may show a square symmetry among adjacent spheres. This square symmetry is unlike the hexagonal symmetry seen in monolayers of spherical domains and is a useful geometry for lithography applications, especially those used in semiconductor applications.
摘要翻译： 本发明涉及将球形形态嵌段共聚物自身组装成基材的V形槽。 虽然球形形态嵌段共聚物通常以体积形成体心立方体系（bcc）球阵列，但是V形槽促进形成良好排列的面心立方体（fcc）球阵列。 在一个实施例中，fcc球阵列的（111）面平行于V形槽的成角度的侧壁。 fcc球阵列的（100）平面平行于衬底的顶表面，并且可以在相邻球体之间显示正方形对称。 该方形对称性与在球形畴的单层中看到的六边形对称不同，并且是用于光刻应用的有用几何形状，特别是在半导体应用中使用的那些。
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4.发明申请公开(公告)号：US20120070627A1
公开(公告)日：2012-03-22
申请号：US12884600
申请日：2010-09-17
CPC分类号： B82Y30/00 , G03F7/165 , G03F7/40 , Y10T428/24802
摘要： Nanolithography and nanoscale device features based on a self-assembled film comprising an ABC triblock terpolymer disposed on a substrate surface are provided. The self-assembled film has a controlled pattern of features over the entire film. Each feature comprises block A, block B, or block C of the ABC triblock terpolymer. One or more blocks (A, B, or C) of the self-assembled film can be transformed by, for example, being removed, to provide a particular pattern geometry for nanolithography.
摘要翻译： 提供了基于设置在基板表面上的包含ABC三嵌段三元共聚物的自组装膜的纳米光刻和纳米级器件特征。 自组装膜在整个膜上具有受控的特征图案。 每个特征包括ABC三嵌段三元共聚物的嵌段A，嵌段B或嵌段C。 自组装膜的一个或多个嵌段（A，B或C）可以通过例如被去除来转化，以提供用于纳米光刻的特定图案几何形状。
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