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公开(公告)号：US07443169B2
公开(公告)日：2008-10-28
申请号：US11602797
申请日：2006-11-21
IPC分类号： G01L21/30
CPC分类号： C23C16/45557 , C23C14/54 , G01L9/0072 , G01L19/0007 , G01L19/0609 , G01L21/00
摘要： A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.
摘要翻译： 用于真空测量单元的屏蔽装置具有管状屏蔽壳体，其包围屏蔽件和用于连接到真空测量单元的出口端口和用于待测量的对象空间的连接开口。 屏蔽在两个开口之间，并被实施为具有螺旋卷积的螺丝屏蔽，其外径的螺纹凸缘在屏蔽壳体的内壁上接触，使得在螺纹法兰的外径和 内壁被阻止并且基本上被迫进入螺旋螺纹螺纹，并且出口在管状部分的一侧上，并且连接开口在另一侧，并且螺纹屏蔽件被实施为使得在轴线 视觉上两个开口之间的屏蔽布置是光学紧密的。
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公开(公告)号：US07500300B2
公开(公告)日：2009-03-10
申请号：US11873043
申请日：2007-10-16
申请人： Urs Wälchli , Per Björkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wüest
发明人： Urs Wälchli , Per Björkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wüest
CPC分类号： G01L9/0079 , Y10T29/49769 , Y10T29/49776
摘要： A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.
摘要翻译： 用于真空测量池的制造方法在与其相对的外围边缘处密封到主体的Al 2 O 3陶瓷或蓝宝石膜的相对侧上提供第一和第二Al 2 O 3陶瓷或蓝宝石外壳主体。 参考真空室和测量真空室位于膜的相对侧。 光学透明窗设置在第一壳体中，并且光学反射材料设置在膜的中心区域上。 透镜在光学透明窗口上方，用于光学连接到膜上的光反射材料，并且在参考真空室外部并且在距离光学透明窗口一定距离处的光纤馈送光通过透镜和窗口并进出到 膜上的光学反射材料，使得法布里 - 珀罗干涉仪检测膜偏转的水平。
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公开(公告)号：US07305888B2
公开(公告)日：2007-12-11
申请号：US11497226
申请日：2006-08-01
申请人： Urs Wälchli , Per Björkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wüest
发明人： Urs Wälchli , Per Björkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wüest
IPC分类号： G01L9/12
CPC分类号： G01L9/0079 , Y10T29/49769 , Y10T29/49776
摘要： A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.
摘要翻译： 真空测量单元具有第一壳体和膜，Al 2 N 3 O 3陶瓷或蓝宝石两者。 膜是平面的，具有通过第一密封件连接到第一壳体的外围边缘以形成参考真空室。 与膜相对的Al 2 O 3 O 3陶瓷或蓝宝石的第二壳体通过第二密封件连接到膜的周边边缘，以形成测量真空室。 端口将真空测量单元连接到要测量的介质。 至少在第一壳体的中心区域中，形成光学透明窗口，并且至少膜的中心区域具有光学反射表面。 在参考真空室之外，与窗口相对并且距离窗口一定距离，布置光纤以将光输入和输出到膜的表面上。
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公开(公告)号：US07946178B2
公开(公告)日：2011-05-24
申请号：US12665125
申请日：2008-06-09
CPC分类号： G01L9/0075 , G01L19/04 , G01L19/0636 , G01L21/00
摘要： The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof. The thermal container (20) is substantially entirely enclosed by an insulating shell (22).
摘要翻译： 本发明涉及一种真空测量单元装置，其包括真空膜测量单元（8），该真空膜测量单元（8）具有布置在其上的连接装置（5,6），用于与待测介质的连通连接;电子系统（34） 连接到真空膜测量池（8），并且还包括用于将真空膜测量单元（8）加热到预定温度值的加热装置（20,21），其中加热装置（20,21）基本上包围 整个真空膜测量单元（8），使得所述单元形成热容器（20）。 所述容器在连接装置（5,6）的区域中构成热体（20a），并且连接装置（6）被引导通过它，所述连接装置至少在一些区域被热体热接触。 热容器（20a）包括用于加热的加热源（21）。 热容器（20）基本上完全由绝缘壳（22）包围。
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公开(公告)号：US20070120568A1
公开(公告)日：2007-05-31
申请号：US11602797
申请日：2006-11-21
IPC分类号： G01L21/30
CPC分类号： C23C16/45557 , C23C14/54 , G01L9/0072 , G01L19/0007 , G01L19/0609 , G01L21/00
摘要： A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.
摘要翻译： 用于真空测量单元的屏蔽装置具有管状屏蔽壳体，其包围屏蔽件和用于连接到真空测量单元的出口端口和用于待测量的对象空间的连接开口。 屏蔽在两个开口之间，并被实施为具有螺旋卷积的螺丝屏蔽，其外径的螺纹凸缘在屏蔽壳体的内壁上接触，使得在螺纹法兰的外径和 内壁被阻止并且基本上被迫进入螺旋螺纹螺纹，并且出口在管状部分的一侧上，并且连接开口在另一侧，并且螺纹屏蔽件被实施为使得在轴线 视觉上两个开口之间的屏蔽布置是光学紧密的。
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公开(公告)号：US20100186516A1
公开(公告)日：2010-07-29
申请号：US12665125
申请日：2008-06-09
CPC分类号： G01L9/0075 , G01L19/04 , G01L19/0636 , G01L21/00
摘要： The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof. The thermal container (20) is substantially entirely enclosed by an insulating shell (22).
摘要翻译： 本发明涉及一种真空测量单元装置，其包括真空膜测量单元（8），该真空膜测量单元（8）具有布置在其上的连接装置（5,6），用于与待测介质的连通连接;电子系统（34） 连接到真空膜测量池（8），并且还包括用于将真空膜测量单元（8）加热到预定温度值的加热装置（20,21），其中加热装置（20,21）基本上包围 整个真空膜测量单元（8），使得所述单元形成热容器（20）。 所述容器在连接装置（5,6）的区域中构成热体（20a），并且连接装置（6）被引导通过它，所述连接装置至少在一些区域被热体热接触。 热容器（20a）包括用于加热的加热源（21）。 热容器（20）基本上完全由绝缘壳（22）包围。
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公开(公告)号：US20080110008A1
公开(公告)日：2008-05-15
申请号：US11873043
申请日：2007-10-16
申请人： Urs Walchli , Per Bjorkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wuest
发明人： Urs Walchli , Per Bjorkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wuest
CPC分类号： G01L9/0079 , Y10T29/49769 , Y10T29/49776
摘要： A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fibre outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.
摘要翻译： 用于真空测量池的制造方法在Al 2 O 2的相对侧上提供第一和第二Al 2 O 3 O 3陶瓷或蓝宝石壳体 陶瓷或蓝宝石膜在其相对的外围边缘处密封到主体。 参考真空室和测量真空室位于膜的相对侧。 光学透明窗设置在第一壳体中，并且光学反射材料设置在膜的中心区域上。 透镜在光学透明窗口上方，用于光学连接到膜上的光反射材料，并且在参考真空室外部并且在与光学透明窗口相距一定距离处的光纤馈送光通过透镜和窗口并进出到 膜上的光学反射材料，使得法布里 - 珀罗干涉仪检测膜偏转的水平。
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公开(公告)号：US20070089524A1
公开(公告)日：2007-04-26
申请号：US11497226
申请日：2006-08-01
申请人： Urs Walchli , Per Bjorkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wuest
发明人： Urs Walchli , Per Bjorkman , Heikki Saari , Jarkko Antila , Hansjakob Hanselmann , Martin Wuest
IPC分类号： G01L9/12
CPC分类号： G01L9/0079 , Y10T29/49769 , Y10T29/49776
摘要： A capacitive vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.
摘要翻译： 电容式真空测量单元具有第一壳体和膜，Al 2 O 3 O 3陶瓷或蓝宝石两者。 膜是平面的，具有通过第一密封件连接到第一壳体的外围边缘以形成参考真空室。 与膜相对的Al 2 O 3 O 3陶瓷或蓝宝石的第二壳体通过第二密封件连接到膜的周边边缘，以形成测量真空室。 端口将真空测量单元连接到要测量的介质。 至少在第一壳体的中心区域中，形成光学透明窗口，并且至少膜的中心区域具有光学反射表面。 在参考真空室之外，与窗口相对并且距离窗口一定距离，布置光纤以将光输入和输出到膜的表面上。
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