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公开(公告)号：US07443169B2
公开(公告)日：2008-10-28
申请号：US11602797
申请日：2006-11-21
IPC分类号： G01L21/30
CPC分类号： C23C16/45557 , C23C14/54 , G01L9/0072 , G01L19/0007 , G01L19/0609 , G01L21/00
摘要： A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.
摘要翻译： 用于真空测量单元的屏蔽装置具有管状屏蔽壳体，其包围屏蔽件和用于连接到真空测量单元的出口端口和用于待测量的对象空间的连接开口。 屏蔽在两个开口之间，并被实施为具有螺旋卷积的螺丝屏蔽，其外径的螺纹凸缘在屏蔽壳体的内壁上接触，使得在螺纹法兰的外径和 内壁被阻止并且基本上被迫进入螺旋螺纹螺纹，并且出口在管状部分的一侧上，并且连接开口在另一侧，并且螺纹屏蔽件被实施为使得在轴线 视觉上两个开口之间的屏蔽布置是光学紧密的。
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公开(公告)号：US20070120568A1
公开(公告)日：2007-05-31
申请号：US11602797
申请日：2006-11-21
IPC分类号： G01L21/30
CPC分类号： C23C16/45557 , C23C14/54 , G01L9/0072 , G01L19/0007 , G01L19/0609 , G01L21/00
摘要： A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.
摘要翻译： 用于真空测量单元的屏蔽装置具有管状屏蔽壳体，其包围屏蔽件和用于连接到真空测量单元的出口端口和用于待测量的对象空间的连接开口。 屏蔽在两个开口之间，并被实施为具有螺旋卷积的螺丝屏蔽，其外径的螺纹凸缘在屏蔽壳体的内壁上接触，使得在螺纹法兰的外径和 内壁被阻止并且基本上被迫进入螺旋螺纹螺纹，并且出口在管状部分的一侧上，并且连接开口在另一侧，并且螺纹屏蔽件被实施为使得在轴线 视觉上两个开口之间的屏蔽布置是光学紧密的。
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公开(公告)号：US07946178B2
公开(公告)日：2011-05-24
申请号：US12665125
申请日：2008-06-09
CPC分类号： G01L9/0075 , G01L19/04 , G01L19/0636 , G01L21/00
摘要： The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof. The thermal container (20) is substantially entirely enclosed by an insulating shell (22).
摘要翻译： 本发明涉及一种真空测量单元装置，其包括真空膜测量单元（8），该真空膜测量单元（8）具有布置在其上的连接装置（5,6），用于与待测介质的连通连接;电子系统（34） 连接到真空膜测量池（8），并且还包括用于将真空膜测量单元（8）加热到预定温度值的加热装置（20,21），其中加热装置（20,21）基本上包围 整个真空膜测量单元（8），使得所述单元形成热容器（20）。 所述容器在连接装置（5,6）的区域中构成热体（20a），并且连接装置（6）被引导通过它，所述连接装置至少在一些区域被热体热接触。 热容器（20a）包括用于加热的加热源（21）。 热容器（20）基本上完全由绝缘壳（22）包围。
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公开(公告)号：US20100186516A1
公开(公告)日：2010-07-29
申请号：US12665125
申请日：2008-06-09
CPC分类号： G01L9/0075 , G01L19/04 , G01L19/0636 , G01L21/00
摘要： The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof. The thermal container (20) is substantially entirely enclosed by an insulating shell (22).
摘要翻译： 本发明涉及一种真空测量单元装置，其包括真空膜测量单元（8），该真空膜测量单元（8）具有布置在其上的连接装置（5,6），用于与待测介质的连通连接;电子系统（34） 连接到真空膜测量池（8），并且还包括用于将真空膜测量单元（8）加热到预定温度值的加热装置（20,21），其中加热装置（20,21）基本上包围 整个真空膜测量单元（8），使得所述单元形成热容器（20）。 所述容器在连接装置（5,6）的区域中构成热体（20a），并且连接装置（6）被引导通过它，所述连接装置至少在一些区域被热体热接触。 热容器（20a）包括用于加热的加热源（21）。 热容器（20）基本上完全由绝缘壳（22）包围。
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