Electric Field Concentration Minimization for MEMS
    1.
    发明申请
    Electric Field Concentration Minimization for MEMS 有权
    MEMS的电场浓度最小化

    公开(公告)号:US20090065881A1

    公开(公告)日:2009-03-12

    申请号:US11853469

    申请日:2007-09-11

    IPC分类号: H01L29/82 H01L21/00

    CPC分类号: B81B3/0086

    摘要: A method and resulting device for reducing an electrical field at an isolation gap in a capacitive actuator includes providing a bottom electrode layer and forming a pattern in the bottom electrode layer having an isolation gap between center and outer electrode components of the patterned electrode. A spacing material is deposited in the isolation gap, the spacing material having a greater height than a remainder of the patterned electrode, and a sacrificial material is deposited conformably on a surface of the patterned electrode and spacing material. The method also includes applying a deformable electrode to a surface of the sacrificial material, whereby removal of the sacrificial and spacing materials results in a greater spacing between the deformable electrode and the electrode layer at a region of the isolation gap than over a remainder of the spacing between the patterned electrode layer and deformable surface.

    摘要翻译: 用于减小电容式致动器中的隔离间隙处的电场的方法和所得装置包括提供底部电极层并在底部电极层中形成图案,该图案在图案化电极的中心和外部电极组件之间具有隔离间隙。 间隔材料沉积在隔离间隙中,间隔材料具有比图案化电极的其余部分更大的高度,并且将牺牲材料顺应地沉积在图案化电极和间隔材料的表面上。 该方法还包括将可变形电极施加到牺牲材料的表面,由此去除牺牲和间隔材料导致在隔离间隙的区域处的可变形电极和电极层之间的间隔比在其余部分 图案化电极层和可变形表面之间的间距。

    ON-CHIP HEATER AND THERMISTORS FOR INKJET
    3.
    发明申请
    ON-CHIP HEATER AND THERMISTORS FOR INKJET 有权
    片内加热器和热敏电阻器

    公开(公告)号:US20120038700A1

    公开(公告)日:2012-02-16

    申请号:US13278356

    申请日:2011-10-21

    IPC分类号: B41J29/38 B41J2/05

    摘要: A chip used for dispensing a fluid such as ink provides ink-dispensing ejectors having an ink cavity over a supporting substrate, and further provides a heater for heating the ink in the cavity. The heater can be interposed between the substrate and the ink cavity to provide direct heating of ink as it is being dispensed. Various embodiments further comprise the use of the heater structure as a temperature probe to measure the temperature of the ink in the ink cavity. Other embodiments provides a chip having both a temperature probe and a heater as separate structures interposed between the ink cavity and the substrate. Further described is a temperature probe and/or heater which traverses a majority of a width of a substrate, and surrounds each drop ejector on at least two sides.

    摘要翻译: 用于分配诸如油墨的流体的芯片提供在支撑基底上具有油墨腔的油墨分配喷射器,并且还提供用于加热空腔中的油墨的加热器。 加热器可以介于基板和油墨腔之间,以便在油墨被分配时直接加热油墨。 各种实施例还包括使用加热器结构作为温度探针来测量墨腔中的墨的温度。 其它实施例提供了具有温度探针和加热器两者的芯片,其作为插入在墨腔和基底之间的分离结构。 进一步描述的是温度探测器和/或加热器,其遍及衬底的宽度的大部分,并且在至少两侧围绕每个液滴喷射器。

    INK JET PRINT HEAD PLATE
    4.
    发明申请
    INK JET PRINT HEAD PLATE 有权
    喷墨打印头板

    公开(公告)号:US20110228005A1

    公开(公告)日:2011-09-22

    申请号:US12727445

    申请日:2010-03-19

    IPC分类号: B41J2/14

    摘要: A nozzle plate for an inkjet printhead, the nozzle plate including a nozzle through which ink is ejected, the nozzle optimally positioned in the nozzle plate. The nozzle plate further including at least one priming hole, the priming hole distinct from and of a smaller diameter than the nozzle, the priming holes positioned at selected locations of the nozzle plate to purge air from the ink jet print head.

    摘要翻译: 一种用于喷墨打印头的喷嘴板,所述喷嘴板包括喷嘴,所述喷嘴通过所述喷嘴喷射,所述喷嘴优选地位于所述喷嘴板中。 所述喷嘴板还包括至少一个起动孔,所述起动孔不同于所述喷嘴的直径小于所述喷射孔直径,所述起动孔位于所述喷嘴板的选定位置以从所述喷墨打印头吹扫空气。

    ON-CHIP HEATER AND THERMISTORS FOR INKJET
    5.
    发明申请
    ON-CHIP HEATER AND THERMISTORS FOR INKJET 有权
    片内加热器和热敏电阻器

    公开(公告)号:US20100079533A1

    公开(公告)日:2010-04-01

    申请号:US12240322

    申请日:2008-09-29

    IPC分类号: B41J29/38

    摘要: A chip used for dispensing a fluid such as ink provides ink-dispensing ejectors having an ink cavity over a supporting substrate, and further provides a heater for heating the ink in the cavity. The heater can be interposed between the substrate and the ink cavity to provide direct heating of ink as it is being dispensed Various embodiments further comprise the use of the heater structure as a temperature probe to measure the temperature of the ink in the ink cavity. Other embodiments provides a chip having both a temperature probe and a heater as separate structures interposed between the ink cavity and the substrate. Further described is a temperature probe and/or heater which traverses a majority of a width of a substrate, and surrounds each drop ejector on at least two sides.

    摘要翻译: 用于分配诸如油墨的流体的芯片提供在支撑基底上具有油墨腔的油墨分配喷射器,并且还提供用于加热空腔中的油墨的加热器。 加热器可以介于基板和油墨腔之间,以便在分配油墨时直接加热油墨。各种实施例还包括使用加热器结构作为温度探针来测量油墨腔中的油墨的温度。 其它实施例提供了具有温度探针和加热器两者的芯片,其作为插入在墨腔和基底之间的分离结构。 进一步描述的是温度探测器和/或加热器,其遍及衬底的宽度的大部分,并且在至少两侧围绕每个液滴喷射器。

    BURIED TRACES FOR SEALED ELECTROSTATIC MEMBRANE ACTUATORS OR SENSORS
    6.
    发明申请
    BURIED TRACES FOR SEALED ELECTROSTATIC MEMBRANE ACTUATORS OR SENSORS 有权
    用于密封静电膜驱动器或传感器的浸入轨迹

    公开(公告)号:US20100077609A1

    公开(公告)日:2010-04-01

    申请号:US12240251

    申请日:2008-09-29

    IPC分类号: H05K3/10

    摘要: In accordance with the invention, there are micro-electromechanical devices and methods of fabricating them. An exemplary micro-electromechanical device can include a first dielectric layer; a buried conductive trace disposed over the first dielectric layer, such that the buried conductor trace is electrically connected to an outside power source; a second dielectric layer disposed over the buried conductive trace; at least one conductive electrode disposed over the second dielectric layer and electrically connected to the buried conductive trace; and at least one conductive membrane including membrane anchors disposed over the second dielectric layer, such that the at least one conductive membrane is electrically isolated from the at least one conductive electrode and the buried conductor trace, wherein the at least one conductive electrode is electrically connected to the power source through the buried conductive trace.

    摘要翻译: 根据本发明,存在微机电装置及其制造方法。 示例性的微机电装置可以包括第一电介质层; 设置在所述第一介电层上的掩埋导电迹线,使得所述掩埋导体迹线电连接到外部电源; 设置在所述掩埋导电迹线上的第二电介质层; 至少一个导电电极设置在所述第二电介质层上并电连接到所述掩埋的导电迹线; 以及至少一个导电膜,包括设置在所述第二介电层上的膜锚,使得所述至少一个导电膜与所述至少一个导电电极和所述掩埋导体迹线电隔离,其中所述至少一个导电电极电连接 通过埋地导电迹线到电源。