公开(公告)号：US20100300899A1

公开(公告)日：2010-12-02

申请号：US12819720

申请日：2010-06-21

申请人： Peter M. Levine ,  Kenneth L. Shepard ,  Ping Gong ,  Levicky Rastislav

发明人： Peter M. Levine ,  Kenneth L. Shepard ,  Ping Gong ,  Levicky Rastislav

IPC分类号： G01N27/26 ,  G01N27/28 ,  H01L21/30

CPC分类号： G01N27/3277 ,  C12Q1/6825 ,  G01N27/48 ,  H01L23/5226 ,  H01L23/5283 ,  H01L23/53261

摘要： Electrochemical sensing of biomolecules eliminates the need for bulky optical instruments required in traditional fluorescence-based sensing assays. Integration of the sensor interface electrodes and active electrochemical detection circuitry on CMOS substrates miniaturizes the sensing platform, enhancing portability for point-of-care applications, while enabling high-throughput, highly-parallel analysis. One embodiment includes a four-by-four active sensor array for multiplexed electrochemical biomolecular detection in a standard 0.25-μm CMOS process. Integrated potentiostats, including control amplifiers and dual-slope ADCs, stimulate the electrochemical cell and detect the current flowing through on-chip gold electrodes at each sensor site resulting from biomolecular reactions occurring on the chip surface. Post-processing techniques for fabricating biologically-compatible surface-electrode arrays in CMOS that can withstand operation in harsh electrochemical environments are described. Demonstrations showing example operation of the active CMOS array for biomolecular detection include cyclic voltammetry of a reversible redox species, DNA probe density characterization, and quantitative and specific DNA hybridization detection in real time.

摘要翻译： 生物分子的电化学感测消除了对传统基于荧光的感测测定中所需的庞大的光学仪器的需要。 传感器接口电极和主动电化学检测电路在CMOS基板上的集成使传感平台小型化，增强了点对点应用的便携性，同时实现了高吞吐量，高度平行的分析。 一个实施例包括用于在标准0.25μmCMOS工艺中多路复用电化学生物分子检测的四乘四活性传感器阵列。 集成的恒电位仪，包括控制放大器和双斜率ADC，可激发电化学电池，并检测流经芯片表面上生物分子反应的每个传感器位置的片上金电极的电流。 描述了用于在CMOS中制造可承受恶劣电化学环境中的操作的生物相容的表面电极阵列的后处理技术。 显示用于生物分子检测的有源CMOS阵列的示例操作的演示包括可逆氧化还原物质的循环伏安法，DNA探针密度表征和实时定量和特异性DNA杂交检测。