Pressure sensor and method for its manufacture
    1.
    发明授权
    Pressure sensor and method for its manufacture 有权
    压力传感器及其制造方法

    公开(公告)号:US09459169B2

    公开(公告)日:2016-10-04

    申请号:US13993111

    申请日:2011-11-23

    摘要: A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.

    摘要翻译: 一种制造压力传感器的方法,包括:提供陶瓷平台,陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。 第一表面是平台表面,其将通过活性硬焊料或钎焊或中间环的表面与中间环连接,该表面将通过活性硬的 焊接或钎焊。 第二表面是测量膜表面,其将通过活性硬焊料或钎焊或中间环的表面与中间环连接,所述中间环将与测量膜连接,借助于 活性硬焊料或钎焊。 中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热,其中中间环在焊接或钎焊过程中保持基本上固体。

    Pressure Sensor and Method for its Manufacture
    2.
    发明申请
    Pressure Sensor and Method for its Manufacture 有权
    压力传感器及其制造方法

    公开(公告)号:US20130263670A1

    公开(公告)日:2013-10-10

    申请号:US13993111

    申请日:2011-11-23

    IPC分类号: G01L7/00 B23K31/02

    摘要: A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.

    摘要翻译: 一种制造压力传感器的方法,包括:提供陶瓷平台,陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。 第一表面是平台表面,其将通过活性硬焊料或钎焊或中间环的表面与中间环连接,该表面将通过活性硬的 焊接或钎焊。 第二表面是测量膜表面,其将通过活性硬焊料或钎焊或中间环的表面与中间环连接,所述中间环将与测量膜连接,借助于 活性硬焊料或钎焊。 中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热,其中中间环在焊接或钎焊过程中保持基本上固体。