专利检索 ap:("Qorvo US, Inc.") AND inv:"Yenhao Chen" 第 1 页

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发明公开
INTEGRATED PIEZORESITIVE (PZR) AND PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) DEVICE AND RELATED HIGH-VOLTAGE (HV) / BIPOLAR-CMOS-DMOS (BCD) PROCESSING METHODS 审中-公开

公开(公告)号：US20230266183A1

公开(公告)日：2023-08-24

申请号：US18107642

申请日：2023-02-09

申请人： Qorvo US, Inc.

发明人： Julius Minglin Tsai , Daniel Krstyen Benjamin , Yenhao Chen , Tom Kwa

IPC分类号： G01L1/16 , H10N30/071 , H10N30/20 , H10N30/87

CPC分类号： G01L1/162 , H10N30/071 , H10N30/2047 , H10N30/875

摘要： A hybrid sensor includes a piezoresistive element for sensing an applied force, a piezoelectric micromachined ultrasonic transducer (PMUT) for sensing the presence of an object within a threshold distance of the hybrid sensor, and a substrate onto which both the piezoresistive element and the PMUT are disposed.