PIEZOELECTRIC DEVICE AND PIEZOELECTRIC MODULE

    公开(公告)号:US20240349614A1

    公开(公告)日:2024-10-17

    申请号:US18683185

    申请日:2022-09-08

    IPC分类号: H10N30/87 H10N30/20

    摘要: A piezoelectric device including: a substrate having a cavity; a piezoelectric film covering the cavity and laminated and supported on the substrate; and a first electrode and a second electrode being provided to be spaced apart from each other so as to sandwich a part of the piezoelectric film. The first electrode and the second electrode pass through the piezoelectric film in the thickness direction of the piezoelectric film and are disposed above the cavity, an input signal is converted to an output signal based on displacement in a direction of application of a voltage to the piezoelectric film polarized in the direction of application of the voltage by applying the voltage between the first electrode and the second electrode, and a miniature piezoelectric device with high sensitivity is provided that utilizes the longitudinal effect of the piezoelectric effect.

    Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof

    公开(公告)号:US12117605B2

    公开(公告)日:2024-10-15

    申请号:US17355861

    申请日:2021-06-23

    摘要: A MEMS actuator includes a main body having a central portion, couplable to a substrate, and a peripheral portion suspended over the substrate when the central portion is coupled to the substrate. The peripheral portion has a deformable structure extending around the central portion, and forming successively arranged membranes. The MEMS actuator includes bearing structures and corresponding piezoelectric actuators. The bearing structures are fixed at their top to the deformable structure and laterally delimit corresponding cavities, each having a lateral opening facing the central portion of the main body and closed at the top by a membrane. A fixed part of the membrane is fixed to the underlying bearing structure and a suspended part is laterally offset with respect to the underlying bearing structure. The piezoelectric actuators are controllable to cause deformation of the corresponding membrane and rotation of the bearing structures around the central portion of the main body.

    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS

    公开(公告)号:US20240294011A1

    公开(公告)日:2024-09-05

    申请号:US18591995

    申请日:2024-02-29

    IPC分类号: B41J2/14 H10N30/20 H10N30/50

    摘要: A liquid ejecting head includes: a piezoelectric element including a piezoelectric layer; a pressure compartment substrate in which a pressure compartment is provided; and a diaphragm that applies pressure to liquid in the pressure compartment by vibrating by being driven by the piezoelectric element. The pressure compartment substrate, the diaphragm, and the piezoelectric element are stacked in this order in a stacking direction. A neutral plane of a stacked body made up of the piezoelectric element and the diaphragm is located inside the piezoelectric layer. Of two regions obtained by dividing the piezoelectric layer with respect to the neutral plane, a region located closer to the diaphragm is defined as a lower region, and a region located farther from the diaphragm is defined as an upper region. A piezoelectric constant of the lower region is less than a piezoelectric constant of the upper region.

    Head Unit And Liquid Ejecting Apparatus
    8.
    发明公开

    公开(公告)号:US20240149584A1

    公开(公告)日:2024-05-09

    申请号:US18503383

    申请日:2023-11-07

    摘要: A head unit to be mounted in a liquid ejecting apparatus includes: a liquid ejecting section; a first flexible substrate that transmits the electrical signal to a joining terminal of the piezoelectric element; and a second flexible substrate that transmits the electrical signal to the first flexible substrate. The second flexible substrate includes: a first region having a stack of the cover member, the conductive member, and the base member; and a second region having a stack of the conductive member and the base member. The second flexible substrate has a surface on which a terminal is disposed within the second region, the terminal being joined to the first flexible substrate with solder.

    PIEZOELECTRIC DEVICE AND METHOD OF FORMING THE SAME

    公开(公告)号:US20240032429A1

    公开(公告)日:2024-01-25

    申请号:US18044493

    申请日:2021-09-23

    摘要: Various embodiments may relate to a piezoelectric device. The piezoelectric device may include a substrate, and a layered stacked arrangement anchored to the substrate. The layered stacked arrangement may include a piezoelectric layer. The stacked arrangement may also include a first electrode on a first side of the piezoelectric layer. The stacked arrangement may further include a second electrode on a second side of the piezoelectric layer opposite the first side. The piezoelectric layer may include a first region including one or more dipole domains of a first type, and one or more dipole domains of a second type. The first electrode may be at least partially in contact with the first region and at least partially in contact with the second region.