System and method for autonomous scanning probe microscopy with in-situ tip conditioning

    公开(公告)号:US11320455B2

    公开(公告)日:2022-05-03

    申请号:US16981512

    申请日:2019-03-19

    IPC分类号: G01Q30/06 G01Q80/00 G06N3/08

    摘要: A method for assessing the quality of a tip of a scanning probe microscope (SPM) includes recording an SPM image, extracting a plurality of images of dangling bonds from the SPM image, feeding the extracted images of dangling bonds into a convolution neural network one image at a time, analyzing each of the plurality of images of dangling bonds using the convolution neural network, assigning each of the plurality of images of dangling bonds one of a sharp tip status or a double tip status, and determining whether the number of the plurality of images of dangling bonds of the SPM image assigned the double tip status exceeds a predetermined threshold. A method of automatically conditioning a tip of a scanning probe microscope (SPM) during imaging of a sample and a method of mass-producing atomistic quantum dots, qubits, or particular atom orbital occupation are also provided.

    SYSTEM AND METHOD FOR AUTONOMOUS SCANNING PROBE MICROSCOPY WITH IN-SITU TIP CONDITIONING

    公开(公告)号:US20220155339A1

    公开(公告)日:2022-05-19

    申请号:US17581888

    申请日:2022-01-22

    IPC分类号: G01Q30/06 G01Q80/00 G06N3/08

    摘要: A method for assessing the quality of a tip of a scanning probe microscope (SPM) includes recording an SPM image, extracting a plurality of images of dangling bonds from the SPM image, feeding the extracted images of dangling bonds into a convolution neural network one image at a time, analyzing each of the plurality of images of dangling bonds using the convolution neural network, assigning each of the plurality of images of dangling bonds one of a sharp tip status or a double tip status, and determining whether the number of the plurality of images of dangling bonds of the SPM image assigned the double tip status exceeds a predetermined threshold. A method of automatically conditioning a tip of a scanning probe microscope (SPM) during imaging of a sample and a method of mass-producing atomistic quantum dots, qubits, or particular atom orbital occupation are also provided.

    AUTOMATED ATOMIC SCALE FABRICATION

    公开(公告)号:US20220130033A1

    公开(公告)日:2022-04-28

    申请号:US17429443

    申请日:2020-02-14

    IPC分类号: G06T7/00 G01Q30/04

    摘要: A method for autonomously applying a dangling bond pattern to a substrate for atom scale device fabrication includes inputting the pattern, initiating a patterning process, scanning the substrate using a scanning probe microscope (SPM) to generate an SPM image of the substrate, feeding the SPM image into a trained convolution neural network (CNN), analyzing the SPM image using the CNN to identify substrate defects, determining a defect free substrate area for pattern application; and applying the pattern to the substrate in that area. An atom scale electronic component includes functional patches on a substrate and wires electrically connecting the functional patches. Training a CNN includes recording a Scanning Tunneling Microscope (STM) image of the substrate, extracting images of defects from the STM image, labeling pixel-wise the defect images, and feeding the extracted and labeled images of defects into a CNN to train the CNN for semantic segmentation.

    SYSTEM AND METHOD FOR AUTONOMOUS SCANNING PROBE MICROSCOPY WITH IN-SITU TIP CONDITIONING

    公开(公告)号:US20210373045A1

    公开(公告)日:2021-12-02

    申请号:US16981512

    申请日:2019-03-19

    IPC分类号: G01Q30/06 G01Q80/00 G06N3/08

    摘要: A method for assessing the quality of a tip of a scanning probe microscope (SPM) includes recording an SPM image, extracting a plurality of images of dangling bonds from the SPM image, feeding the extracted images of dangling bonds into a convolution neural network one image at a time, analyzing each of the plurality of images of dangling bonds using the convolution neural network, assigning each of the plurality of images of dangling bonds one of a sharp tip status or a double tip status, and determining whether the number of the plurality of images of dangling bonds of the SPM image assigned the double tip status exceeds a predetermined threshold. A method of automatically conditioning a tip of a scanning probe microscope (SPM) during imaging of a sample and a method of mass-producing atomistic quantum dots, qubits, or particular atom orbital occupation are also provided.