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1.发明授权Modified czochralski grown spinel substrate by solid state diffusion 失效通过固体状态扩散改性CZOCHRALSKI GROWN螺旋柱基体
公开(公告)号：US3740261A
公开(公告)日：1973-06-19
申请号：US3740261D
申请日：1971-02-09
Applicant: RCA CORP
Inventor： BOLIN S
CPC classification number: B01J21/005 , C30B29/26 , C30B31/00 , C30B31/02 , H01L21/0242 , H01L21/02488 , H01L21/02532 , Y10S117/913 , Y10S148/154 , Y10S438/967
Abstract: A MODIFIED SINGLE-CRYSTAL, MAGNESIUM ALUMINATE SPINEL WAFER IS FORMED FROM COMMERCIALLY AVAILABLE SPINEL BY A SOLID STATE DIFFUSION OF ALUMINA FROM SUBMICRON ALUMINA PARTICLES. THE RESULTANT WAFTER IS PARTICULARLY SUITED FOR USE AS AN EPITAXIAL SILICON UBSTRATE. A METHOD IS GIVEN FOR PRODUCING THESE MODIFIED SPINEL WAFTERS BY SOLID STATE DIFFUSION.
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