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公开(公告)号:US20230041600A1
公开(公告)日:2023-02-09
申请号:US17780469
申请日:2020-11-25
Applicant: RHODIA OPERATIONS
Inventor: Marie Plissonneau , Réka Toth , Thierry Le Mercier , Valérie Buissette , Manabu Yuasa , Eisaku Suda
Abstract: The disclosure relates to cerium based particles having a rough surface and their use as a component of a polishing composition, especially for chemical mechanical polishing. The cerium based particles have substantially the shape of polyhedrons which have one or more faces with protrusions thereon, said protrusions being integrally formed with said cerium based particles. The present disclosure also relates to the method of preparation of the cerium based particles.
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公开(公告)号:US11028288B2
公开(公告)日:2021-06-08
申请号:US16424031
申请日:2019-05-28
Applicant: RHODIA OPERATIONS
Inventor: Eisaku Suda , Manabu Yuasa , Takao Sekimoto
IPC: C09G1/02 , C09K3/14 , C01F17/206 , B82Y30/00 , B82Y40/00
Abstract: The present invention relates to a suspension of cerium oxide particles in a liquid phase, in which said particles comprise secondary particles comprising primary particles, and a process for preparing said liquid suspension in which the cerium IV/total cerium molar ratio before precipitation is comprised between 1/10000 and 1/500000 and that the thermal treatment is being carried out under an inert atmosphere.
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公开(公告)号:US11578235B2
公开(公告)日:2023-02-14
申请号:US16621404
申请日:2018-06-11
Applicant: RHODIA OPERATIONS
Inventor: Eisaku Suda , Manabu Yuasa , Réka Toth
IPC: C09G1/02 , C01F17/235
Abstract: The present invention relates to cerium-based particles and their use as a component of a composition for polishing. The present invention also relates to the method of preparation of the cerium-based particles.
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公开(公告)号:US10344183B2
公开(公告)日:2019-07-09
申请号:US15104449
申请日:2014-12-16
Applicant: RHODIA OPERATIONS
Inventor: Eisaku Suda , Manabu Yuasa , Takao Sekimoto
Abstract: The present invention relates to a suspension of cerium oxide particles in a liquid phase, in which said particles comprise secondary particles comprising primary particles, and a process for preparing said liquid suspension in which the cerium IV/total cerium molar ratio before precipitation is comprised between 1/10000 and 1/500000 and that the thermal treatment is being carried out under an inert atmosphere.
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