公开(公告)号：US20240241441A1

公开(公告)日：2024-07-18

申请号：US18090638

申请日：2022-12-29

Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC

Inventor： Tomas Marangoni ,  Huan He ,  Joshua Kaitz ,  Li Cui ,  Yinjie Cen ,  Emad Aqad ,  Mingqi Li

IPC: G03F7/039 ,  G03F7/028

CPC classification number: G03F7/039 ,  G03F7/028

Abstract: A polymer including a first repeating unit comprising an acid labile group; an anionic endgroup selected from a carboxylate group or a sulfamate group; and an organic cation.