公开(公告)号：US20230264474A1

公开(公告)日：2023-08-24

申请号：US18003713

申请日：2021-07-06

Applicant: ROHM CO., LTD.

Inventor： Eitaro KUROKAWA ,  Osamu MATSUSHIMA ,  Noriyuki SHIMOJI ,  Tatsuya SUZUKI ,  Daisuke NOTSU

IPC: B41J2/14 ,  H10N30/20 ,  H10N30/87 ,  H10N30/88 ,  H10N30/082 ,  B41J2/16

CPC classification number: B41J2/14233 ,  H10N30/2047 ,  H10N30/87 ,  H10N30/88 ,  H10N30/082 ,  B41J2/1607 ,  B41J2/164

Abstract: An inkjet printing head includes a piezoelectric element that includes a lower electrode disposed on a movable film, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, a hydrogen barrier film that covers, in a front surface of the piezoelectric element, at least, entireties of side surfaces of the upper electrode, the piezoelectric film, and the lower electrode, at least a part of an upper surface of the upper electrode, and an upper surface of the lower electrode, a first interlayer insulating film formed on a front surface other than an end surface of the hydrogen barrier film, a second interlayer insulating film formed so as to cover the end surface of the hydrogen barrier film and the first interlayer insulating film, and a wiring that is formed on the second interlayer insulating film and that is connected to the piezoelectric element.