公开(公告)号：US20060114610A1

公开(公告)日：2006-06-01

申请号：US11325897

申请日：2006-01-04

申请人： Rainer Krause ,  Jan Marien ,  Johannes Paul ,  Gunther Sandmann ,  Gerhard Scherb ,  Hubert Schuy ,  Stefan Seifried

发明人： Rainer Krause ,  Jan Marien ,  Johannes Paul ,  Gunther Sandmann ,  Gerhard Scherb ,  Hubert Schuy ,  Stefan Seifried

IPC分类号： G11B5/60

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/10 ,  G11B5/102 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3903 ,  G11B5/4853 ,  G11B2005/3996 ,  Y10S29/016 ,  Y10T29/49032 ,  Y10T29/49155

摘要： A magnetic recording device makes use of an “anchored” conductive stud which is securely attached within its surrounding insulator materials. The conductive stud is formed over a conductive layer which is coupled to or part of a read or a write head element of the magnetic recording device. The conductive stud has a top stud portion and a bottom undercut portion formed over the conductive layer. In one illustrated embodiment, the bottom undercut portion has a width that is greater than the width of the top stud portion. Since an insulator is formed around the conductive stud and over its bottom undercut portion, a secure coupling between the conductive stud and the conductive layer is provided. Preferably, the conductive layer is made of copper (Cu), the conductive stud is made of gold (Au), and the insulator is alumina (Al2O3). A seed layer may be formed between the conductive stud and the conductive layer. A method of making the conductive stud using a photolithography process is also disclosed.

摘要翻译： 磁记录装置利用被固定在其周围的绝缘体材料中的“锚定”导电柱。 导电柱形成在导电层上，该导电层耦合到磁记录装置的读取头或写头元件的一部分。 导电柱具有形成在导电层上的顶部螺柱部分和底部底切部分。 在一个示出的实施例中，底部底切部分的宽度大于顶部螺柱部分的宽度。 由于绝缘子形成在导电柱体周围并且在其底部底切部分周围，所以提供了导电柱和导电层之间的牢固耦合。 优选地，导电层由铜（Cu）制成，导电柱由金（Au）制成，绝缘体是氧化铝（Al 2 O 3 O 3）。 种子层可以形成在导电柱和导电层之间。 还公开了使用光刻工艺制造导电柱的方法。