公开(公告)号：US06881264B2

公开(公告)日：2005-04-19

申请号：US10643820

申请日：2003-08-19

申请人： Mark Hiatt ,  Karl Mautz ,  Ralf Schuster

发明人： Mark Hiatt ,  Karl Mautz ,  Ralf Schuster

IPC分类号： H05K3/46 ,  H01L21/00 ,  B05C11/06 ,  B05C11/02

CPC分类号： H01L21/6704

摘要： A process tool, preferably a spin coater, includes a set of at least three arms and an adjustable rinse nozzle. The arms lift a substrate, e.g. a semiconductor wafer, from a chuck inside the process chamber after having performed the corresponding manufacturing step, e.g. coating. The contact area between the arms and the substrate is as small as possible. The rinse nozzle dispenses a solvent liquid onto the backside of the substrate, thereby removing contaminating particles located at the area of contact between the vacuum channels of the chuck and the substrate. The set of arms rotates for a homogeneous cleaning. A gas flowing out of vacuum ports of the chuck prevents the vacuum ports from being obstructed with particles. While the substrate is being lifted, the chuck can also be cleaned by dispensing the solvent liquid onto the chuck.

摘要翻译： 工艺工具，优选旋转涂布机，包括一组至少三个臂和可调整的冲洗喷嘴。 臂提起基底，例如 在执行相应的制造步骤之后，来自处理室内的卡盘的半导体晶片，例如， 涂层。 臂和基板之间的接触面积尽可能小。 冲洗喷嘴将溶剂液体分配到基板的背面，从而去除位于卡盘的真空通道与基板之间的接触区域的污染颗粒。 该组臂旋转以进行均匀清洁。 从卡盘的真空端口流出的气体防止真空口被颗粒堵塞。 当基板被提起时，也可以通过将溶剂液体分配到卡盘上来清洁卡盘。

公开(公告)号：US06895294B2

公开(公告)日：2005-05-17

申请号：US09729636

申请日：2000-12-04

申请人： Karl Emerson Mautz ,  Alain Bernhard Charles ,  John George Maltabes ,  Ralf Schuster

发明人： Karl Emerson Mautz ,  Alain Bernhard Charles ,  John George Maltabes ,  Ralf Schuster

IPC分类号： B65G49/06 ,  G03F7/20 ,  H01L21/027 ,  H01L21/677 ,  G06F19/00

CPC分类号： G03F1/66 ,  G03F7/70541 ,  G03F7/70741

摘要： The present invention relates to a system for the manufacture of semiconductor devices by lithography, and in particular to an assembly of mask containers for use in such a system. The system comprises: a plurality of mask containers adapted to engage with one another such that two or more containers can be carried together as a stack; a plurality of lithography bays; a transport rail system for carrying the containers between different lithography bays. Each lithography bay has a transmitter/receiver unit for communicating lithography data with a tracking device located in each container, allowing for more efficient mask management. The transportation of the containers in stacks results in an improvement in efficiency.

摘要翻译： 本发明涉及一种用于通过光刻制造半导体器件的系统，特别涉及一种用于这种系统中的掩模容器的组件。 该系统包括：适于彼此接合的多个掩模容器，使得两个或更多个容器可以一起作为堆叠携带; 多个光刻托架; 用于在不同的光刻托架之间承载容器的运输轨道系统。 每个光刻托架具有用于将光刻数据与位于每个容器中的跟踪装置通信的发射器/接收器单元，从而允许更有效的掩模管理。 堆叠中的容器的运输导致效率的提高。

公开(公告)号：US20140005596A1

公开(公告)日：2014-01-02

申请号：US14005878

申请日：2012-03-28

申请人： Ralf Schuster

发明人： Ralf Schuster

IPC分类号： A61M5/50 ,  A61M5/20

CPC分类号： A61M5/5086 ,  A61B5/14532 ,  A61M5/2033 ,  A61M2005/208

摘要： The invention relates to an injection device for delivering a drug, comprising a housing arranged to receive a drug container and an electrical energy source, wherein a driver is arranged to displace a dose of the drug from the container under load of a drive spring upon release, wherein an electric motor powered by the electrical energy source is arranged for tensioning the drive spring, wherein control means are arranged for controlling the electric motor so as to tension the drive spring when an injection has been performed.

摘要翻译： 本发明涉及一种用于输送药物的注射装置，包括布置成容纳药物容器和电能源的壳体，其中驱动器布置成在释放时在驱动弹簧的负载下从容器中移动一定剂量的药物 其中，由所述电能源供电的电动机被布置成用于张紧所述驱动弹簧，其中控制装置被布置成用于控制所述电动机，以便在已经执行喷射时张紧所述驱动弹簧。

公开(公告)号：US08844109B2

公开(公告)日：2014-09-30

申请号：US12411910

申请日：2009-03-26

申请人： Christian Meyer ,  Ralf Schuster ,  Lutz Muller ,  Pascal Kauffelin

发明人： Christian Meyer ,  Ralf Schuster ,  Lutz Muller ,  Pascal Kauffelin

IPC分类号： B23P11/00 ,  B23P21/00 ,  G05B19/418 ,  G06Q10/06 ,  B62D65/00

CPC分类号： B62D65/00 ,  G05B19/41805 ,  G05B19/41865 ,  G05B2219/31384 ,  G06Q10/06 ,  Y02P90/04 ,  Y02P90/20 ,  Y02P90/28 ,  Y10T29/49828 ,  Y10T29/49829 ,  Y10T29/49904 ,  Y10T29/53409 ,  Y10T29/53413 ,  Y10T29/53539

摘要： A method for manufacturing motor vehicles at a manufacturing location (S), from which ready-assembled motor vehicles are built in a planned number and order of output. First modules (MA) are delivered in a specific assembly stage discontinuously from a first production shop (PA) to the manufacturing location (S) and are fed continuously into a manufacturing line (F) in which the modules (MA) are manufactured into motor vehicles (A). Second modules (MB) be fed in a specific assembly stage from a second production shop (PB) into the joint manufacturing line (F) at a sequencing station (5) alternately with the modules (MA). Thus, vehicles of first and second model series can be manufactured on one and the same manufacturing line.

摘要翻译： 一种在制造场所（S）制造机动车辆的方法，其中准备组装的机动车辆按计划的数量和顺序排列。 第一模块（MA）在特定的组装阶段从第一生产车间（PA）到制造位置（S）不连续地输送，并且被连续地进给到其中模块（MA）被制造成电动机的生产线（F） 车辆（A）。 第二模块（MB）在与模块（MA）交替的排序站（5）处的特定组装阶段从第二生产车间（PB）进给到联合生产线（F）。 因此，可以在同一条生产线上制造第一和第二模型系列的车辆。

公开(公告)号：US20110152156A1

公开(公告)日：2011-06-23

申请号：US12739451

申请日：2007-11-05

申请人： Joachim Sauter ,  Anna Burczek ,  Ludger Grunwald ,  Karl Helminger ,  Hubert De Roquefeuil ,  Ralf Schuster

发明人： Joachim Sauter ,  Anna Burczek ,  Ludger Grunwald ,  Karl Helminger ,  Hubert De Roquefeuil ,  Ralf Schuster

IPC分类号： C11D3/60

CPC分类号： C11D3/042 ,  C11D1/66 ,  C11D3/2082 ,  C11D3/2086 ,  C11D3/323 ,  C11D11/0041 ,  C11D17/0043 ,  C11D17/0047 ,  C11D17/044

摘要： The invention relates to solid block acid containing cleaning compositions comprising based on the composition A) 10-75 wt-% of at least one liquid mineral acid selected from the group consisting of phosphoric acid, sulphuric acid, sulphurous acid, and nitric acid, B) 1-60 wt-% of at least one solid organic acid with pKa at 20° C. between 1.0 and 1.1, C) 15-80 wt-% of at least one carboxylic acid selected from the group consisting of citric acid monohydrate, hydroxyacetic acid, maleic acid, succinic acid, glutaric acid and adipinic acid, D) 5-40 wt-% urea, E) 0.1-10 wt-% of at least one non-ionic surfactant, and the rest up to 100 wt-% is water, wherein the composition contains less than 1 wt-% nonylphenol ethoxylates and halogen compounds.

摘要翻译： 本发明涉及含固体块酸的清洁组合物，其包含基于组合物A）10-75重量％的至少一种选自磷酸，硫酸，亚硫酸和硝酸的液体无机酸，B ）1-60重量％的至少一种固体有机酸，其中pKa在20℃下在1.0和1.1之间，C）15-80重量％的至少一种选自柠檬酸一水合物， 羟基乙酸，马来酸，琥珀酸，戊二酸和己二酸，D）5-40重量％的脲，E）0.1-10重量％的至少一种非离子表面活性剂，其余至多100重量％ ％是水，其中组合物含有小于1重量％的壬基酚乙氧基化物和卤素化合物。

公开(公告)号：US20090260215A1

公开(公告)日：2009-10-22

申请号：US12411910

申请日：2009-03-26

申请人： Christian Meyer ,  Ralf Schuster ,  Lutz Muller ,  Pascal Kauffelin

发明人： Christian Meyer ,  Ralf Schuster ,  Lutz Muller ,  Pascal Kauffelin

IPC分类号： B23P21/00

CPC分类号： B62D65/00 ,  G05B19/41805 ,  G05B19/41865 ,  G05B2219/31384 ,  G06Q10/06 ,  Y02P90/04 ,  Y02P90/20 ,  Y02P90/28 ,  Y10T29/49828 ,  Y10T29/49829 ,  Y10T29/49904 ,  Y10T29/53409 ,  Y10T29/53413 ,  Y10T29/53539

摘要： A method for manufacturing motor vehicles at a manufacturing location (S), from which ready-assembled motor vehicles are built in a planned number and order of output. First modules (MA) are delivered in a specific assembly stage discontinuously from a first production shop (PA) to the manufacturing location (S) and are fed continuously into a manufacturing line (F) in which the modules (MA) are manufactured into motor vehicles (A). Second modules (MB) be fed in a specific assembly stage from a second production shop (PB) into the joint manufacturing line (F) at a sequencing station (5) alternately with the modules (MA). Thus, vehicles of first and second model series can be manufactured on one and the same manufacturing line.

摘要翻译： 一种在制造场所（S）制造机动车辆的方法，其中准备组装的机动车辆按计划的数量和顺序排列。 第一模块（MA）在特定的组装阶段从第一生产车间（PA）到制造位置（S）不连续地输送，并且被连续地进给到其中模块（MA）被制造成电动机的生产线（F） 车辆（A）。 第二模块（MB）在与模块（MA）交替的排序站（5）处的特定组装阶段从第二生产车间（PB）进给到联合生产线（F）。 因此，可以在同一条生产线上制造第一和第二模型系列的车辆。