公开(公告)号：US06474162B1

公开(公告)日：2002-11-05

申请号：US09011233

申请日：1998-02-09

申请人： Ralf Voss ,  Karin Bauer ,  Matthias Rose ,  Erwin Stenzel ,  Josef Schalk ,  Winfried Kupke ,  Helmut Seidel

发明人： Ralf Voss ,  Karin Bauer ,  Matthias Rose ,  Erwin Stenzel ,  Josef Schalk ,  Winfried Kupke ,  Helmut Seidel

IPC分类号： G01P904

CPC分类号： G01C19/5614 ,  G01C19/5621

摘要： A rate of rotation sensor is suggested which is structured out of silicon (silicon compounds or silicon/glass compounds) or other semiconductor materials by means of micromechanical techniques. The rate of rotation sensor has the form of a tuning fork whose prongs are situated in planes in parallel to the surface of the semiconductor wafer. These prongs are exited to carry out vibrations in a plane perpendicular to the wafer plane. By means of a sensor element which registers the torsion of the tuning fork suspension, the angular velocity of a rotation of the sensor about an axis in parallel to the tuning fork suspension is measured.

摘要翻译： 建议通过微机械技术由硅（硅化合物或硅/玻璃化合物）或其他半导体材料构成的旋转传感器速率。 旋转传感器的速度具有音叉的形式，其叉头位于平行于半导体晶片的表面的平面中。 退出这些插脚以在与晶片平面垂直的平面中进行振动。 通过记录音叉悬架的扭矩的传感器元件，测量传感器绕与音叉悬架平行的轴线的旋转角速度。

公开(公告)号：US06564637B1

公开(公告)日：2003-05-20

申请号：US09806404

申请日：2001-05-15

申请人： Josef Schalk ,  Erwin Stenzel ,  Karin Bauer ,  Rainer Freitag ,  Roland Hilser ,  Ralf Voss ,  Matthias Aikele ,  Helmut Seidel ,  Ulrich Prechtel

发明人： Josef Schalk ,  Erwin Stenzel ,  Karin Bauer ,  Rainer Freitag ,  Roland Hilser ,  Ralf Voss ,  Matthias Aikele ,  Helmut Seidel ,  Ulrich Prechtel

IPC分类号： G01P904

CPC分类号： G01C19/5621 ,  G01C19/5614 ,  G01P21/00

摘要： A self-testing sensor (especially to measure an angular rate or acceleration) includes a resonant structure, an actor unit configured to excite the structure to a first periodic vibration, a piezoresistive element configured to generate an output signal that depends on the measured quantity, and an isolator configured to isolate a test signal component from the output signal, whereby the test signal component is generated by a second periodic vibration of the structure superposed on the first vibration. A device for self-testing a sensor includes an isolator configured to isolate a test signal component superposed on a useful signal component from the periodic output signal of the sensor, and it includes a comparator configured to compare the test signal component with a predefined value or a test signal fed to the sensor. For the self-test, a second periodic vibration is superposed on a first vibration of the structure, and an output signal containing information on the measured quantity is determined. A test signal component contained in the output signal is monitored.

摘要翻译： 自检传感器（特别是用于测量角速率或加速度）包括谐振结构，被配置为将结构激发到第一周期性振动的动作单元，配置成产生取决于测量量的输出信号的压阻元件， 以及隔离器，被配置为将测试信号分量与输出信号隔离，由此通过叠加在第一振动上的结构的第二周期性振动来产生测试信号分量。 用于对传感器进行自检的装置包括：隔离器，被配置为将叠加在有用信号分量上的测试信号分量与传感器的周期性输出信号隔离，并且其包括比较器，其被配置为将测试信号分量与预定义的值进行比较， 测试信号馈送到传感器。 对于自检，第二周期振动叠加在结构的第一振动上，并且确定包含关于测量量的信息的输出信号。 监视输出信号中包含的测试信号分量。

公开(公告)号：US06898972B2

公开(公告)日：2005-05-31

申请号：US10344925

申请日：2001-08-06

申请人： Karin Bauer ,  Tanjo Gleissner ,  Konrad Lentner ,  Stefan Sassen ,  Josef Schalk ,  Ralf Voss

发明人： Karin Bauer ,  Tanjo Gleissner ,  Konrad Lentner ,  Stefan Sassen ,  Josef Schalk ,  Ralf Voss

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5712 ,  Y10T29/49007

摘要： A micromechanical rotation speed sensor with a gimbals-mounted structure capable of vibration includes two vibration elements (4, 5) which are swivelled about two axes (A, B) oriented perpendicular toward each other. An excitation unit in the form of an electrode (7) sets the first vibration element (4) into a vibration about the first axis of rotation (A). A read out unit in the form of a read out electrode (8) records a tipping or vibration of the second vibration element (5) about the second axis of rotation (B) as a measure for the rotation speed of the sensor. Additional mass elements (6a, 6b) which are symmetrically aligned are situated on the upper side (2a) and the underside (2b) of the first vibration element (4) which form a rocker. The sensor is manufactured of at least three individually processed wafers which are finally joined together and form a top part (1), a midsection (2) and a bottom part (3).

摘要翻译： 具有能够振动的万向台安装结构的微机械转速传感器包括两个相对于彼此垂直定向的两个轴线（A，B）旋转的振动元件（4,5）。 电极（7）形式的激励单元将第一振动元件（4）设置成围绕第一旋转轴线（A）的振动。 读出电极（8）形式的读出单元记录第二振动元件（5）围绕第二旋转轴线（B）的倾斜或振动，作为传感器旋转速度的量度。 对称配置的附加质量元件（6a，6b）位于形成摇杆的第一振动元件（4）的上侧（2a）和下侧（2b）上。 传感器由至少三个单独处理的晶片制成，其最终接合在一起并形成顶部（1），中部（2）和底部（3）。