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    Mems device having simplified drive
    1.
    发明申请
    Mems device having simplified drive 有权
    Mems设备具有简化的驱动

    公开(公告)号：US20080042052A1

    公开(公告)日：2008-02-21

    申请号：US11975543

    申请日：2007-10-19

    申请人： Randall Sprague ,  Jun Yan ,  Jason Tauscher ,  Wyatt Davis ,  John Lewis ,  Dean Brown ,  Thomas Montague ,  Chancellor Brown

    发明人： Randall Sprague ,  Jun Yan ,  Jason Tauscher ,  Wyatt Davis ,  John Lewis ,  Dean Brown ,  Thomas Montague ,  Chancellor Brown

    IPC分类号： H01J3/14

    CPC分类号： G02B26/0858 ,  G02B26/085 ,  G02B26/101

    摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

    摘要翻译： 诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。 驱动脉冲可以通过支撑臂通过扭矩传递到振动体。 对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。 振荡器根据其在该轴上的共振频率在每个轴上进行响应。 振荡器可以在一些或所有轴上共振地驱动。 改进的载荷分布导致变形减少。 简化的结构使用单个移动体提供多轴振动。 另一种结构直接驱动多个移动体。 另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

    MEMS device having simplified drive
    2.
    发明申请
    MEMS device having simplified drive 有权
    具有简化驱动的MEMS器件

    公开(公告)号：US20050253055A1

    公开(公告)日：2005-11-17

    申请号：US10984327

    申请日：2004-11-09

    申请人： Randall Sprague ,  Jun Yan ,  Jason Tauscher ,  Wyatt Davis ,  John Lewis ,  Dean Brown ,  Thomas Montague ,  Chancellor Brown

    发明人： Randall Sprague ,  Jun Yan ,  Jason Tauscher ,  Wyatt Davis ,  John Lewis ,  Dean Brown ,  Thomas Montague ,  Chancellor Brown

    IPC分类号： G02B26/08 ,  H01J3/14

    CPC分类号： G02B26/0858 ,  G02B26/085 ,  G02B26/101

    摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

    摘要翻译： 诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。 驱动脉冲可以通过支撑臂通过扭矩传递到振动体。 对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。 振荡器根据其在该轴上的共振频率在每个轴上进行响应。 振荡器可以在一些或所有轴上共振地驱动。 改进的载荷分布导致变形减少。 简化的结构使用单个移动体提供多轴振动。 另一结构直接驱动多个移动体。 另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

    High performance MEMS scanner
    3.
    发明申请
    High performance MEMS scanner 有权
    高性能MEMS扫描仪

    公开(公告)号：US20050179976A1

    公开(公告)日：2005-08-18

    申请号：US10986640

    申请日：2004-11-12

    申请人： Wyatt Davis ,  Dean Brown ,  Thomas Montague ,  Randall Sprague

    发明人： Wyatt Davis ,  Dean Brown ,  Thomas Montague ,  Randall Sprague

    IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  H01L21/78 ,  H04N1/04

    CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

    摘要： A high performance MEMS scanner is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions couple the scan mirror to torsion arms, reducing dynamic mirror deformation by spreading the torque load. “leverage members” at the distal ends of the torsion arms help reduce stress concentrations. Elimination of a mounting frame increases device yield. Heater leads allow for precise trimming of the scanner resonant frequency. A compressive mount holds mounting pads against mounting structures.

    摘要翻译： 公开了一种高性能MEMS扫描仪。 在一些实施例中，扫描仪反射镜具有类似于旋转多边形面的宽而短的纵横比。 长扭力臂允许大的旋转角度，包括20°零到机械和更大的角度。 悬架将扫描镜耦合到扭转臂，通过扩展转矩负载来减少动态镜面变形。 扭力臂末端的“杠杆部件”有助于减轻应力集中。 消除安装框架会增加设备的产量。 加热器引线允许精确调整扫描器谐振频率。 压缩安装座将安装垫保持在安装结构上。

    Method and apparatus for scanning a beam of light
    6.
    发明申请
    Method and apparatus for scanning a beam of light 审中-公开
    用于扫描光束的方法和装置

    公开(公告)号：US20050280879A1

    公开(公告)日：2005-12-22

    申请号：US10988155

    申请日：2004-11-12

    申请人： Gregory Gibson ,  Wyatt Davis ,  Dean Brown ,  Randall Sprague

    发明人： Gregory Gibson ,  Wyatt Davis ,  Dean Brown ,  Randall Sprague

    IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  G02B26/10 ,  H01L21/78 ,  H04N1/04

    CPC分类号： G02B26/0858 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866 ,  G02B26/105

    摘要： A resonant MEMS scanning system operates a MEMS scanner at its resonant frequency to maximize scan angle and minimize power consumption. A controller includes a phase locked loop, an amplitude servo control loop, and a resonant frequency servo control loop. A microprocessor controls the loops and provides override during conditions such as start-up. Resonant frequency is dynamically thermally trimmed, allowing the device to be operated at higher Q. The phase lock loop operates in a pre-lock condition to allow faster start-up. Resonant frequency is controlled open loop during idle and start-up. Drive voltage is set high during start-up to achieve a rapid rise in scan angle.

    摘要翻译： 谐振MEMS扫描系统以其谐振频率操作MEMS扫描器，以最大化扫描角度并最小化功耗。 控制器包括锁相环，振幅伺服控制环和谐振频率伺服控制环。 微处理器控制环路，并在诸如启动的条件下提供覆盖。 谐振频率被动态热修剪，允许器件以较高的Q运行。锁相环工作在预锁定状态以允许更快的启动。 在空闲和启动期间，谐振频率被控制为开环。 启动期间的驱动电压设置为高，以实现扫描角度的快速上升。

    MEMS scanner adapted to a laser printer
    7.
    发明申请
    MEMS scanner adapted to a laser printer 有权
    适用于激光打印机的MEMS扫描仪

    公开(公告)号：US20070109560A1

    公开(公告)日：2007-05-17

    申请号：US11502131

    申请日：2006-08-09

    申请人： Randall Sprague ,  Wyatt Davis ,  Dean Brown ,  Yoshiro Koga ,  Nobumasa Abe ,  Yujiro Nomura

    发明人： Randall Sprague ,  Wyatt Davis ,  Dean Brown ,  Yoshiro Koga ,  Nobumasa Abe ,  Yujiro Nomura

    IPC分类号： G06F3/12

    CPC分类号： G02B26/0858 ,  B41J2/471 ,  G02B26/0841

    摘要： An electrophotographic printer includes an exposure unit having a MEMS scanner operable to scan a beam of light across a photoconductor. The MEMS scanner includes a mirror having an aspect ratio similar to the shape of the facets of a conventional rotating polygon scanner. In a preferred embodiment, the scan mirror has a length of about 750 microns in a dimension parallel to its axis of rotation and a length of about 8 millimeters in a dimension perpendicular to its axis of rotation. The MEMS scanner is operable to scan at a frequency of about 5 KHz and an angular displacement of about 20 degrees zero-to-peak mechanical scan angle.

    摘要翻译： 电子照相打印机包括具有MEMS扫描器的曝光单元，其可操作以扫描光束穿过光电导体。 MEMS扫描器包括具有类似于常规旋转多边形扫描仪的面的形状的纵横比的反射镜。 在优选实施例中，扫描反射镜具有与其旋转轴线平行的尺寸约750微米的长度，并且垂直于其旋转轴线的尺寸为约8毫米的长度。 MEMS扫描器可操作以在约5KHz的频率和大约20度的零位到峰值机械扫描角度的角位移中扫描。

    Scanned light display system using array of collimating elements in conjunction with large numerical aperture light emitter array
    10.
    发明申请
    Scanned light display system using array of collimating elements in conjunction with large numerical aperture light emitter array 审中-公开
    扫描光显示系统使用准直元件阵列与大数值孔径光发射器阵列相结合

    公开(公告)号：US20060061846A1

    公开(公告)日：2006-03-23

    申请号：US11200484

    申请日：2005-08-08

    申请人： Randall Sprague ,  Mathew Watson ,  Thomas Montague ,  Christopher Wiklof

    发明人： Randall Sprague ,  Mathew Watson ,  Thomas Montague ,  Christopher Wiklof

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0875 ,  G02B26/0816

    摘要： A scanned light display system includes a light emitter array having a plurality of light sources operable to emit diverging light and an array of collimating elements positioned so that each of the collimating elements receive at least a portion of the light emitted from a corresponding one of the light sources. Each of collimating elements is configured to substantially collimate the received light from at least one corresponding light source into respective beams. The scanned beam display is operable to scan the respective beams to provide an image to a viewer. The displayed image appears substantially fixed to a viewer as the viewer's eye moves relative to the array of collimating elements. In one embodiment, each of the collimating elements is a curved mirror. In other embodiments, each of the collimating elements includes at least one lens or a curved mirror/lens pair.

    摘要翻译： 扫描光显示系统包括光发射器阵列，其具有可操作以发射发散光的多个光源和准直元件阵列，其被定位成使得每个准直元件接收从相应的一个光源发出的光的至少一部分 光源。 准直元件中的每一个被构造成将从至少一个对应的光源的接收的光基本准直到相应的光束。 扫描的光束显示器可操作以扫描相应的光束以向观看者提供图像。 当观看者的眼睛相对于准直元件阵列移动时，所显示的图像基本上固定在观看者身上。 在一个实施例中，每个准直元件是曲面镜。 在其他实施例中，每个准直元件包括至少一个透镜或曲面镜/透镜对。