公开(公告)号：US20100187076A1

公开(公告)日：2010-07-29

申请号：US12755285

申请日：2010-04-06

申请人： Raymond GOGGIN ,  Padraig FITZGERALD

发明人： Raymond GOGGIN ,  Padraig FITZGERALD

IPC分类号： H01H1/26

CPC分类号： H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应的位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US20130126317A1

公开(公告)日：2013-05-23

申请号：US13741609

申请日：2013-01-15

申请人： Raymond GOGGIN ,  Padraig FITZGERALD

发明人： Raymond GOGGIN ,  Padraig FITZGERALD

IPC分类号： H01H57/00

CPC分类号： H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US20100155202A1

公开(公告)日：2010-06-24

申请号：US12338767

申请日：2008-12-18

申请人： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

发明人： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

IPC分类号： H01H59/00 ,  H01H11/00

CPC分类号： H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US20110019330A1

公开(公告)日：2011-01-27

申请号：US12507361

申请日：2009-07-22

申请人： William HUNT ,  Denis ELLIS ,  Padraig FITZGERALD ,  Colin LYDEN

发明人： William HUNT ,  Denis ELLIS ,  Padraig FITZGERALD ,  Colin LYDEN

IPC分类号： H01H47/00

CPC分类号： H01H59/0009 ,  H01H47/14

摘要： Disclosed are a method, device, and system for a microelectromechanical (MEM) device control system that can control the operation of a MEM device. The system can include a microelectromechanical device and a control circuit. The micromechanical device can include a moveable member coupled to an electrical terminal, a sensor, responsive to a movement of the moveable member, can output a sensor signal based on the movement of the moveable member, and an actuating electrode for receiving a control signal. The control circuit can be responsive to the signals output by the sensor and outputs the control signal to the actuating electrode.

摘要翻译： 公开了可以控制MEM装置的操作的用于微机电（MEM）装置控制系统的方法，装置和系统。 该系统可以包括微机电装置和控制电路。 微机械装置可以包括耦合到电端子的可移动构件，响应于可移动构件的运动的传感器可以基于可移动构件的运动输出传感器信号，以及用于接收控制信号的致动电极。 控制电路可以响应由传感器输出的信号，并将控制信号输出到致动电极。