公开(公告)号：US20110287586A1

公开(公告)日：2011-11-24

申请号：US13117608

申请日：2011-05-27

申请人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/50

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。

公开(公告)号：US07968364B2

公开(公告)日：2011-06-28

申请号：US12544470

申请日：2009-08-20

申请人： Mark Schirmer ,  John Dixon ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  John Dixon ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/00

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。

公开(公告)号：US06707593B2

公开(公告)日：2004-03-16

申请号：US09850720

申请日：2001-05-08

申请人： Minh Van Le ,  Jo-Ey Wong

发明人： Minh Van Le ,  Jo-Ey Wong

IPC分类号： G02B2600

CPC分类号： G02B26/02 ,  G02B26/001

摘要： An electrostatically operated microelectromechanical system comprises a movable and a stationary structure, with a discharge system that is activated upon pull-in of the movable structure to discharge the voltage across an electrostatic cavity to thereby prevent stiction adhesion of the movable structure to the stationary structure. Specifically, a membrane release structure comprises a mirror optical element. The membrane is separated from a stationary support by an electrostatic cavity. The discharge switch comprises a membrane conductor pad on the membrane and a support conductor pad on the support that conducts a current upon activation of the discharge switch to discharge the electrostatic voltage. Preferably, these pads are metal.

摘要翻译： 静电操作的微机电系统包括可移动和静止结构，其中放电系统在可移动结构的拉入时被激活，以将静电空腔上的电压放电，从而防止可移动结构到固定结构的粘结。 具体地，膜释放结构包括镜面光学元件。 膜通过静电腔与固定支架分离。 放电开关包括膜上的膜导体焊盘和支撑体上的支撑导体焊盘，其在激活放电开关时传导电流以释放静电电压。 优选地，这些垫是金属的。

公开(公告)号：US06420206B1

公开(公告)日：2002-07-16

申请号：US09774216

申请日：2001-01-30

申请人： Minh Van Le ,  Jo-Ey Wong

发明人： Minh Van Le ,  Jo-Ey Wong

IPC分类号： H01L2100

CPC分类号： H01L21/67132 ,  B81C1/00896 ,  G02B26/0841 ,  H01L21/67092

摘要： A process for singulating MOEMS optical devices from a precursor structure, in which the precursor structure comprises device material, having movable optical structures, and handle material, through which optical ports are formed to provide for optical access to the movable optical structures. The process comprises coating a frontside and a backside of the precursor structure with protection material. The precursor structure is then attached to a substrate such as dicing tape and the precursor structure separated into individual optical devices by a process, including die sawing. Thereafter, the optical devices are removed from the tape and the protection material removed from the optical devices.

摘要翻译： 一种用于从前体结构中分离MOEMS光学器件的方法，其中前体结构包括具有可移动光学结构的器件材料和手柄材料，通过该器件材料形成光学端口以提供对可移动光学结构的光学访问。 该方法包括用保护材料涂覆前体和前体结构的背面。 然后将前体结构连接到诸如切割带的基底上，并且前体结构通过包括模切法的方法分离成各个光学装置。 此后，将光学装置从胶带上取出，并将保护材料从光学装置中取出。

公开(公告)号：US20100155202A1

公开(公告)日：2010-06-24

申请号：US12338767

申请日：2008-12-18

申请人： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

发明人： Denis ELLIS ,  Padraig FITZGERALD ,  Jo-ey WONG ,  Raymond GOGGIN ,  Richard Tarik Gereon ECKL

IPC分类号： H01H59/00 ,  H01H11/00

CPC分类号： H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US08294539B2

公开(公告)日：2012-10-23

申请号：US12338767

申请日：2008-12-18

申请人： Denis Ellis ,  Padraig Fitzgerald ,  Jo-ey Wong ,  Raymond Goggin ,  Richard Tarik Eckl

发明人： Denis Ellis ,  Padraig Fitzgerald ,  Jo-ey Wong ,  Raymond Goggin ,  Richard Tarik Eckl

IPC分类号： H01H51/22

CPC分类号： H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

摘要： Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

摘要翻译： 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：US08124436B2

公开(公告)日：2012-02-28

申请号：US13117608

申请日：2011-05-27

申请人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/00

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。

公开(公告)号：US20100068854A1

公开(公告)日：2010-03-18

申请号：US12544470

申请日：2009-08-20

申请人： Mark Schirmer ,  John Dixon ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

发明人： Mark Schirmer ,  John Dixon ,  Raymond Goggin ,  Padraig Fitzgerald ,  David Rohan ,  Jo-ey Wong

IPC分类号： H01L21/58

CPC分类号： H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

摘要： A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

摘要翻译： 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。