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6 条记录 (耗时 0.026 秒)

    Vapor drying system and method
    5.
    发明授权
    Vapor drying system and method 有权

    公开(公告)号：US06328809B1

    公开(公告)日：2001-12-11

    申请号：US09227637

    申请日：1999-01-08

    申请人： Tamer Elsawy ,  R. Mark Hall ,  Josh Butler

    发明人： Tamer Elsawy ,  R. Mark Hall ,  Josh Butler

    IPC分类号： B08B312

    CPC分类号： H01L21/67028 ,  Y10S134/902

    摘要： The present apparatus is a method and system for treating and drying the surface of an object. According to the described method, with a wet object positioned in a vessel, a drying vapor is introduced into the vessel. The drying vapor condenses on the surface of the object and reduces the surface tension of the residual process fluid, causing the residual process fluid to flow off of the surface. In one embodiment, wet processing of the object and a subsequent evacuation of process fluid is carried out in the vessel prior to introduction of the drying vapor.

    Chemical Dispensing system and method
    6.
    发明授权
    Chemical Dispensing system and method 失效
    化学分配系统和方法

    公开(公告)号：US06170703B2

    公开(公告)日：2001-01-09

    申请号：US09227226

    申请日：1999-01-08

    申请人： Josh Butler ,  Tamer Elsawy ,  R. Mark Hall ,  Wyland Atkins ,  Eric Hansen

    发明人： Josh Butler ,  Tamer Elsawy ,  R. Mark Hall ,  Wyland Atkins ,  Eric Hansen

    IPC分类号： G01F1100

    CPC分类号： B67D7/0272 ,  B67D1/0045 ,  B67D7/74 ,  G01F13/006

    摘要： Described herein is a chemical injection system and method utilizing a chemical storage vessel coupled to a bulk source of chemical and proportioned to contain a volume of chemical useful for multiple applications for which the chemical is to be utilized. A dispense vessel proportioned to contain a volume of chemical useful for a single application is fluidly coupled to the chemical storage vessel. A controller controls operation of a system of valves and sensors, which operate to fill the chemical storage vessel, and to precisely dispense the volume required for a single application from the storage vessel into the dispense vessel and then ultimately into the vessel in which the chemical is needed.

    摘要翻译： 本文描述了一种化学注入系统和方法，该化学注入系统和方法利用耦合到大量化学物质并且成比例的化学存储容器来容纳可用于要使用该化学物质的多种应用的一定量的化学物质。 成比例地分配用于单一应用的化学物质的分配容器流体地联接到化学品储存容器。 控制器控制阀和传感器系统的操作，其操作以填充化学品储存容器，并且将单个应用所需的体积从储存容器精确地分配到分配容器中，然后最终进入容器中，其中化学品 是需要的