STACKING TOOL FIXTURE FOR FORCED FLOW CHEMICAL VAPOR INFILTRATION

    公开(公告)号:US20240110281A1

    公开(公告)日:2024-04-04

    申请号:US17957610

    申请日:2022-09-30

    CPC classification number: C23C16/458 C23C16/045

    Abstract: A tooling assembly suitable for use in chemical vapor infiltration (CVI) comprises a plurality of tooling fixtures arranged as a tower, with a central channel extending therethrough along a channel axis, and a lid atop the tower and covering the central channel. Each tooling fixture of the plurality of tooling fixtures comprises a plurality of walls defining an internal volume, and a plurality of holes through at least one wall of the plurality of walls, the plurality of holes placing the internal volume in flow communication with an external environment. Each tooling fixture of the plurality of tooling fixtures is in physical contact with an adjacent tooling fixture.

    IN-SITU SOLID CHEMICAL VAPOR DEPOSITION PRECURSOR DELIVERY

    公开(公告)号:US20240060178A1

    公开(公告)日:2024-02-22

    申请号:US17888757

    申请日:2022-08-16

    CPC classification number: C23C16/448 C23C16/34

    Abstract: A chemical vapor deposition system comprises a reactor including at least one wall extending between an inlet end and an outlet end, and an internal volume defined by the at least one wall, the inlet end, and the outlet end. The reactor further comprises a heat source in thermal communication with the internal volume, and a solid precursor container removably placed within the internal volume. The solid precursor container includes at least one internal cavity for holding an amount of the solid precursor, and an opening fluidly connecting the at least one internal cavity to the internal volume of the reactor. The solid precursor comprises at least one of aluminum, zirconium, hafnium, and a rare earth metallic element.

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