公开(公告)号：US12098107B2

公开(公告)日：2024-09-24

申请号：US18140372

申请日：2023-04-27

Applicant: Applied Materials, Inc.

Inventor： Guodong Zhan ,  Xiaowei Wu ,  Xiao Ming He ,  Jennifer Y. Sun

IPC: C04B35/505 ,  C01F17/218 ,  C01F17/265 ,  C04B35/486 ,  C04B35/622 ,  C04B35/628 ,  C04B35/632 ,  C04B35/64 ,  C04B35/645 ,  C23C4/10 ,  C23C4/134 ,  C23C14/34 ,  C23C16/30 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455

CPC classification number: C04B35/505 ,  C01F17/218 ,  C01F17/265 ,  C04B35/486 ,  C04B35/62222 ,  C04B35/62813 ,  C04B35/62815 ,  C04B35/62823 ,  C04B35/62828 ,  C04B35/62884 ,  C04B35/62889 ,  C04B35/62897 ,  C04B35/6325 ,  C04B35/64 ,  C04B35/645 ,  C23C4/10 ,  C23C4/134 ,  C23C14/3414 ,  C23C16/30 ,  C23C16/405 ,  C23C16/4417 ,  C23C16/45525 ,  C23C16/45555 ,  C01P2004/64 ,  C01P2004/84 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/3244 ,  C04B2235/441 ,  C04B2235/445 ,  C04B2235/52 ,  C04B2235/528 ,  C04B2235/5454 ,  C04B2235/666 ,  C04B2235/77 ,  C04B2235/96 ,  C04B2235/9607

Abstract: Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

公开(公告)号：US20240018056A1

公开(公告)日：2024-01-18

申请号：US17866016

申请日：2022-07-15

Applicant: Raytheon Technologies Corporation

Inventor： Kenneth Petroski ,  Mary Colby ,  Andrew Joseph Lazur

IPC: C04B35/628 ,  C04B35/80

CPC classification number: C04B35/62894 ,  C04B35/80 ,  C04B35/62897 ,  C04B35/6286 ,  C04B35/62865 ,  C04B35/62868 ,  C04B35/62884 ,  C04B2235/614

Abstract: A ceramic matrix composite includes a fiber, a first interface coating layer disposed adjacent to an outer surface of the fiber, and a first protective layer disposed outward of the first interface coating layer and the fiber. The first protective layer comprises a high entropy ceramic. A method of protecting a fiber of a ceramic matrix composite includes depositing, by chemical vapor deposition or chemical vapor infiltration, a first interface coating layer on the fiber; and depositing, by chemical vapor deposition or chemical vapor infiltration, a first protective layer outward of the first interface coating layer. The first protective layer comprises a high entropy ceramic.

公开(公告)号：US20230322628A1

公开(公告)日：2023-10-12

申请号：US18140372

申请日：2023-04-27

Applicant: Applied Materials, Inc.

Inventor： Guodong Zhan ,  Xiaowei Wu ,  Xiao Ming He ,  Jennifer Y. Sun

IPC: C04B35/505 ,  C01F17/265 ,  C04B35/486 ,  C04B35/622 ,  C04B35/628 ,  C04B35/632 ,  C04B35/64 ,  C04B35/645 ,  C23C4/10 ,  C23C4/134 ,  C23C14/34 ,  C23C16/30 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  C01F17/218

CPC classification number: C04B35/505 ,  C01F17/218 ,  C01F17/265 ,  C04B35/486 ,  C04B35/62222 ,  C04B35/62813 ,  C04B35/62815 ,  C04B35/62823 ,  C04B35/62828 ,  C04B35/62884 ,  C04B35/62889 ,  C04B35/62897 ,  C04B35/6325 ,  C04B35/64 ,  C04B35/645 ,  C23C4/10 ,  C23C4/134 ,  C23C14/3414 ,  C23C16/30 ,  C23C16/405 ,  C23C16/4417 ,  C23C16/45525 ,  C23C16/45555 ,  C01P2004/64 ,  C01P2004/84 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/3244 ,  C04B2235/441 ,  C04B2235/445 ,  C04B2235/52 ,  C04B2235/528 ,  C04B2235/5454 ,  C04B2235/666 ,  C04B2235/77 ,  C04B2235/96 ,  C04B2235/9607

Abstract: Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

公开(公告)号：US20230304194A1

公开(公告)日：2023-09-28

申请号：US18083817

申请日：2022-12-19

Applicant: Raytheon Technologies Corporation

Inventor： Paul Sheedy ,  Neal Magdefrau ,  Wayde R. Schmidt

IPC: D01F11/00 ,  C03C14/00 ,  C04B35/628 ,  C04B35/80 ,  C08K3/04 ,  C08K3/20 ,  C08K3/34 ,  C08K7/06 ,  C08K7/08 ,  C08K7/10 ,  C08K9/02 ,  C23C16/455 ,  C23C16/56

CPC classification number: D01F11/00 ,  C03C14/002 ,  C04B35/62863 ,  C04B35/62865 ,  C04B35/62868 ,  C04B35/62884 ,  C04B35/62894 ,  C04B35/62897 ,  C04B35/80 ,  C08K3/04 ,  C08K3/20 ,  C08K3/34 ,  C08K7/06 ,  C08K7/08 ,  C08K7/10 ,  C08K9/02 ,  C23C16/45525 ,  C23C16/56 ,  C03C2214/03

Abstract: Disclosed is a method of coating a high temperature fiber including depositing a base material on the high temperature fiber using atomic layer deposition, depositing an intermediate material precursor on the base material using molecular layer deposition, depositing a top material on the intermediate material precursor or the intermediate layer using atomic layer deposition, and heat treating the intermediate precursor. The intermediate material in the final coating includes a structural defect, has lower density than the top material or a combination thereof. Also disclosed are the coated high temperature fiber and a composite including the high temperature fiber.

公开(公告)号：US11731910B1

公开(公告)日：2023-08-22

申请号：US17514744

申请日：2021-10-29

Applicant: Rolls-Royce High Temperature Composites Inc.

Inventor： Richard Kidd

IPC: C04B35/80 ,  C04B35/628 ,  C04B35/626 ,  C04B35/657 ,  C04B35/65

CPC classification number: C04B35/80 ,  C04B35/6265 ,  C04B35/62849 ,  C04B35/62868 ,  C04B35/62873 ,  C04B35/62884 ,  C04B35/62892 ,  C04B35/62897 ,  C04B35/65 ,  C04B35/657 ,  C04B2235/3826 ,  C04B2235/428 ,  C04B2235/5244 ,  C04B2235/5256 ,  C04B2235/614 ,  C04B2235/616 ,  C04B2235/6567 ,  C04B2235/6583

Abstract: A method of making a ceramic matrix composite (CMC) that may show improved resistance to chemical attack from molten silicon along with excellent mechanical strength is described. The method includes forming an interphase coating on one or more silicon carbide fibers, depositing a matrix layer comprising silicon carbide on the interphase coating, oxidizing the matrix layer to form an oxidized film comprising silicon oxide, depositing a wetting layer comprising silicon carbide on the oxidized film. After depositing the wetting layer, a fiber preform containing the silicon carbide fibers is heat treated. After the heat treatment, the fiber preform is infiltrated with a slurry. After infiltration with the slurry, the fiber preform is infiltrated with a melt containing silicon, and then the melt is cooled to form a ceramic matrix composite.

公开(公告)号：US20180363132A1

公开(公告)日：2018-12-20

申请号：US16003615

申请日：2018-06-08

Applicant: Rolls-Royce High Temperature Composites Inc.

Inventor： Richard W. Kidd ,  Robert Shinavski

IPC: C23C16/34 ,  C23C16/30 ,  D06M11/58 ,  D06M11/80 ,  F01D25/00

CPC classification number: C23C16/342 ,  C04B35/565 ,  C04B35/62863 ,  C04B35/62868 ,  C04B35/62884 ,  C04B35/62894 ,  C04B35/62897 ,  C04B35/806 ,  C04B2235/3826 ,  C04B2235/46 ,  C04B2235/465 ,  C04B2235/524 ,  C04B2235/5244 ,  C04B2235/616 ,  C23C16/308 ,  D06M11/58 ,  D06M11/80 ,  D06M2101/16 ,  F01D25/005 ,  F05D2300/6033

Abstract: A method of forming a moisture-tolerant coating on a silicon carbide fiber includes exposing a silicon carbide fiber to a gaseous N precursor comprising nitrogen at an elevated temperature, thereby introducing nitrogen into a surface region of the silicon carbide fiber, and exposing the silicon carbide fiber to a gaseous B precursor comprising boron at an elevated temperature, thereby introducing boron into the surface region of the silicon carbide fiber. Silicon-doped boron nitride is formed at the surface region of the silicon carbide fiber without exposing the silicon carbide fiber to a gaseous Si precursor comprising Si. Thus, a moisture-tolerant coating comprising the silicon-doped boron nitride is grown in-situ on the silicon carbide fiber.

公开(公告)号：US20180327324A1

公开(公告)日：2018-11-15

申请号：US16040785

申请日：2018-07-20

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Ta-Ching HSIAO ,  Wen-Po TU ,  Chu-Pi JENG ,  Mu-Hsi SUNG

IPC: C04B35/573 ,  C04B35/626 ,  C04B35/628 ,  C01B32/956 ,  C30B35/00 ,  C30B23/00 ,  C30B29/36

CPC classification number: C04B35/573 ,  C01B32/956 ,  C04B35/6267 ,  C04B35/62675 ,  C04B35/6268 ,  C04B35/62839 ,  C04B35/62897 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/422 ,  C04B2235/424 ,  C04B2235/428 ,  C04B2235/441 ,  C04B2235/48 ,  C04B2235/5427 ,  C04B2235/5436 ,  C04B2235/656 ,  C04B2235/6567 ,  C04B2235/6584 ,  C30B23/00 ,  C30B29/36 ,  C30B35/007

Abstract: A method for manufacturing micropowder is provided, which includes (a) mixing a silicon precursor and a carbon precursor to form a mixture, and heating and keeping the mixture at 1600° C. to 1800° C. under a vacuum and non-oxygen condition for 120 to 180 minutes to form a silicon carbide powder; and (b) heating and keeping the silicon carbide powder at 1900° C. to 2100° C. under non-oxygen condition for 5 to 15 minutes, and then cooling and keeping the silicon carbide powder at 1800° C. to 2000° C. under the non-oxygen condition for 5 to 15 minutes to form micropowder, wherein the micropowder includes a silicon carbide core covered by a carbon film.

公开(公告)号：US10059631B2

公开(公告)日：2018-08-28

申请号：US15386749

申请日：2016-12-21

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Ta-Ching Hsiao ,  Wen-Po Tu ,  Chu-Pi Jeng ,  Mu-Hsi Sung

IPC: C04B35/573 ,  C04B35/628 ,  C04B35/626 ,  C01B31/36 ,  C30B23/00 ,  C30B29/36

CPC classification number: C04B35/573 ,  C01B32/956 ,  C04B35/6267 ,  C04B35/62675 ,  C04B35/6268 ,  C04B35/62839 ,  C04B35/62897 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/422 ,  C04B2235/424 ,  C04B2235/428 ,  C04B2235/441 ,  C04B2235/48 ,  C04B2235/5427 ,  C04B2235/5436 ,  C04B2235/656 ,  C04B2235/6567 ,  C04B2235/6584 ,  C30B23/00 ,  C30B29/36 ,  C30B35/007

Abstract: A method for manufacturing micropowder is provided, which includes (a) mixing a silicon precursor and a carbon precursor to form a mixture, and heating and keeping the mixture at 1600° C. to 1800° C. under a vacuum and non-oxygen condition for 120 to 180 minutes to form a silicon carbide powder; and (b) heating and keeping the silicon carbide powder at 1900° C. to 2100° C. under non-oxygen condition for 5 to 15 minutes, and then cooling and keeping the silicon carbide powder at 1800° C. to 2000° C. under the non-oxygen condition for 5 to 15 minutes to form micropowder, wherein the micropowder includes a silicon carbide core covered by a carbon film.

公开(公告)号：US20180230062A1

公开(公告)日：2018-08-16

申请号：US15430777

申请日：2017-02-13

Applicant: General Electric Company

Inventor： Theodore Robert Grossman ,  James Scott Vartuli ,  Steven Robert Hayashi

IPC: C04B35/80 ,  C04B41/45 ,  C04B41/50

CPC classification number: C04B35/80 ,  C04B35/565 ,  C04B35/571 ,  C04B35/573 ,  C04B35/62847 ,  C04B35/62849 ,  C04B35/62852 ,  C04B35/62855 ,  C04B35/62857 ,  C04B35/6286 ,  C04B35/62863 ,  C04B35/62865 ,  C04B35/62868 ,  C04B35/62871 ,  C04B35/62873 ,  C04B35/62894 ,  C04B35/62897 ,  C04B35/806 ,  C04B41/4535 ,  C04B41/4568 ,  C04B41/5064 ,  C04B41/5096 ,  C04B2235/3826 ,  C04B2235/424 ,  C04B2235/428 ,  C04B2235/5244

Abstract: Systems and methods for forming ceramic matrix composite (CMC) components are provided. The CMC component includes a reinforcement material having a plurality of filaments that are at least partially electrically conductive. The plurality of filaments are charged by a charging element with an electric charge of the same sign such that adjacent filaments are in an expanded spatial relationship relative to one another while being coated. While in the expanded spatial relationship, the filaments can also be pulled through a matrix slurry.

公开(公告)号：US09881747B2

公开(公告)日：2018-01-30

申请号：US15010884

申请日：2016-01-29

Applicant: The United States of America as Represented by the Administrator of the National Aeronautics and Space Administration

Inventor： Terry D. Rolin ,  Curtis W. Hill

IPC: H01G11/84 ,  C04B35/468 ,  H01G4/12 ,  C04B35/628 ,  C04B35/626 ,  C04B35/63 ,  C04B35/638 ,  H01G11/56 ,  C04B35/64 ,  C04B35/622

CPC classification number: H01G11/84 ,  C03C8/20 ,  C04B35/4682 ,  C04B35/62222 ,  C04B35/6262 ,  C04B35/6264 ,  C04B35/6265 ,  C04B35/6268 ,  C04B35/62807 ,  C04B35/62813 ,  C04B35/62884 ,  C04B35/62897 ,  C04B35/6303 ,  C04B35/6316 ,  C04B35/632 ,  C04B35/638 ,  C04B35/64 ,  C04B2235/3215 ,  C04B2235/3217 ,  C04B2235/3236 ,  C04B2235/3418 ,  C04B2235/36 ,  C04B2235/365 ,  C04B2235/5445 ,  C04B2235/6026 ,  C04B2235/6562 ,  C04B2235/6567 ,  C04B2235/6584 ,  C04B2235/6586 ,  C04B2235/768 ,  C04B2235/96 ,  H01G4/1227 ,  H01G11/56

Abstract: An ink of the formula: 60-80% by weight BaTiO3 particles coated with SiO2; 5-50% by weight high dielectric constant glass; 0.1-5% by weight surfactant; 5-25% by weight solvent; and 5-25% weight organic vehicle. Also a method of manufacturing a capacitor comprising the steps of: heating particles of BaTiO3 for a special heating cycle, under a mixture of 70-96% by volume N2 and 4-30% by volume H2 gas; depositing a film of SiO2 over the particles; mechanically separating the particles; incorporating them into the above described ink formulation; depositing the ink on a substrate; and heating at 850-900° C. for less than 5 minutes and allowing the ink and substrate to cool to ambient in N2 atmosphere. Also a dielectric made by: heating particles of BaTiO3 for a special heating cycle, under a mixture of 70-96% by volume N2 and 4-30% by volume H2 gas; depositing a film of SiO2 over the particles; mechanically separating the particles; forming them into a layer; and heating at 850-900° C. for less than 5 minutes and allowing the layer to cool to ambient in N2 atmosphere.