公开(公告)号：US20090276077A1

公开(公告)日：2009-11-05

申请号：US12388060

申请日：2009-02-18

申请人： Richard Good ,  Daniel KOST

发明人： Richard Good ,  Daniel KOST

IPC分类号： G06F19/00 ,  G06F17/10 ,  G06F17/30 ,  G06G7/66

CPC分类号： G06K9/6247 ,  H01L22/20

摘要： By dividing a complex set of parameters of a production process in forming semiconductor devices into individual blocks, respective PCA models may be established for each block and may thereafter be combined by operating on summary statistics of each model block in order to evaluate the complete initial parameter set. Thus, compared to conventional strategies, a significant reduction of the size of the combined PCA model compared to a single PCA model may be obtained, while also achieving an enhanced degree of flexibility in evaluating various subsets of parameters.

摘要翻译： 通过将形成半导体器件的生产过程的一组复杂参数划分为单独的块，可以为每个块建立各个PCA模型，然后可以通过对每个模型块的简要统计进行操作来组合，以评估完整的初始参数 组。 因此，与常规策略相比，可以获得与单个PCA模型相比的组合PCA模型的大小的显着减小，同时在评估各种参数子集中也获得了更高的灵活性。

公开(公告)号：US20230111195A1

公开(公告)日：2023-04-13

申请号：US17498297

申请日：2021-10-11

申请人： Phillip David Garrison ,  Richard Good ,  David Kemp

发明人： Phillip David Garrison ,  Richard Good ,  David Kemp

IPC分类号： G10H1/32 ,  F16M13/02 ,  G10D3/00

摘要： One or more embodiments of a device for securing guitar modulators is shown. The device includes a face, a bracket, and a base. The face defines a hole that extends completely through the face with a first length in a first direction and a first width in a second direction perpendicular to the first direction, wherein the first length is greater than the first width. The bracket connects under the face and extends in the first direction parallel to the hole and is configured to allow a grommet to slide along the bracket in the first direction. The base is configured to support the face.

公开(公告)号：US08103478B2

公开(公告)日：2012-01-24

申请号：US12388060

申请日：2009-02-18

申请人： Richard Good ,  Daniel Kost

发明人： Richard Good ,  Daniel Kost

IPC分类号： G01D21/00 ,  G06F17/40 ,  G06F19/00

CPC分类号： G06K9/6247 ,  H01L22/20

摘要： By dividing a complex set of parameters of a production process in forming semiconductor devices into individual blocks, respective PCA models may be established for each block and may thereafter be combined by operating on summary statistics of each model block in order to evaluate the complete initial parameter set. Thus, compared to conventional strategies, a significant reduction of the size of the combined PCA model compared to a single PCA model may be obtained, while also achieving an enhanced degree of flexibility in evaluating various subsets of parameters.

摘要翻译： 通过将形成半导体器件的生产过程的一组复杂参数划分为单独的块，可以为每个块建立各个PCA模型，然后可以通过对每个模型块的简要统计进行操作来组合，以评估完整的初始参数 组。 因此，与常规策略相比，可以获得与单个PCA模型相比的组合PCA模型的大小的显着减小，同时在评估各种参数子集中也获得了更高的灵活性。

公开(公告)号：US20080103618A1

公开(公告)日：2008-05-01

申请号：US11746320

申请日：2007-05-09

申请人： James Broc Stirton ,  Richard Good

发明人： James Broc Stirton ,  Richard Good

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/32225 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/86

摘要： By coordinating a process regime of a process module for sample substrates used in a previously performed metrology process, an increased degree of measurement information may be obtained. For this purpose, the coordination may be based on a sampling ruleset related to the process module, wherein the previously selected sample substrates may be appropriately sequenced through the process module to increase the probability for complying with the associated sampling ruleset. Furthermore, the enhanced process coordination may be advantageously combined with randomization steps, thereby providing a “pseudo randomization,” in which sample substrates are intentionally positioned, while the remaining substrates may be randomized for decoupling related process steps.

摘要翻译： 通过协调先前执行的计量过程中使用的样品基板的处理模块的处理方案，可以获得增加的测量信息。 为此，协调可以基于与过程模块相关的抽样规则集，其中可以通过过程模块适当地排序先前选择的样本衬底，以增加遵守相关抽样规则集的概率。 此外，增强的过程协调可以有利地与随机化步骤组合，从而提供“伪随机化”，其中样本衬底被有意地定位，而剩余的衬底可以被随机化以用于解耦相关的工艺步骤。

公开(公告)号：US20070027568A1

公开(公告)日：2007-02-01

申请号：US11383005

申请日：2006-05-12

申请人： Richard Good ,  Uwe Schulze

发明人： Richard Good ,  Uwe Schulze

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/45031 ,  Y02P90/22

摘要： An APC controller is configured to operate on a segregated data structure during its normal operation and to establish a control state during an initializing event for a non-initialized manufacturing context on the basis of other initialized or non-initialized manufacturing contexts. Thus, the processing of pilot substrates may be reduced or the processing of the pilot substrates may be initiated on the basis of reliably established process parameters.

摘要翻译： APC控制器被配置为在其正常操作期间对分离的数据结构进行操作，并且在初始化事件期间，在未初始化的制造上下文的基础上，基于其它初始化或未初始化的制造上下文来建立控制状态。 因此，可以基于可靠地建立的工艺参数来降低先导衬底的处理或引导衬底的处理。

公开(公告)号：US20110000745A1

公开(公告)日：2011-01-06

申请号：US12792870

申请日：2010-06-03

申请人： Richard Good

发明人： Richard Good

IPC分类号： B66F7/16 ,  B66F7/10 ,  B66F7/20 ,  B66F7/28

CPC分类号： B66F7/28 ,  B60S3/041 ,  B62H3/04 ,  B66F7/20

摘要： A motorcycle lift for a wash service bay which is specifically adapted for cleaning motorcycles is provided. The lift includes a lift bed having guide rails and supports for holding a motorcycle on the lift bed. At least one actuator is provided connected to the lift bed and are recessed in a well below the ground level of the wash service bay so that the motorcycle can be moved along the ground level onto the lift bed, where it is then secured in position. Preferably, there are a plurality of actuators that are staged cylinders connected in series for coordinated lifting of the lift bed to raise the motorcycle to an elevated position, to allow easier access for washing and waxing or other cleaning. The actuators are connected to a controller for controlled raising and lowering of the lift bed between a first, ground level position, for loading and unloading the motorcycle, and a second, raised level which provides easier access for cleaning.

摘要翻译： 提供专门用于清洁摩托车的洗衣机的摩托车升降机。 该升降机包括一个具有导轨的升降机和用于在摩托车床上保持摩托车的支架。 提供至少一个致动器，其连接到升降机床并且凹陷在洗涤服务舱的地面下方的井中，使得摩托车可以沿着地平面移动到升降机上，然后将其固定就位。 优选地，存在多个致动器，其是分段气缸，其串联连接以协调提升升降床，以将摩托车升高到升高位置，以允许更容易进行洗涤和打蜡或其它清洁。 致动器连接到控制器，用于在用于装载和卸载摩托车的第一，地面位置之间的升降床的受控升高和降低;以及提供更容易进行清洁的第二升高水平。

公开(公告)号：US20090276075A1

公开(公告)日：2009-11-05

申请号：US12366211

申请日：2009-02-05

申请人： Richard Good ,  Matthew Purdy

发明人： Richard Good ,  Matthew Purdy

IPC分类号： G06F19/00 ,  G06N5/02 ,  G06F17/10

CPC分类号： G07C3/146 ,  G06Q10/06

摘要： In a complex manufacturing environment for producing semiconductor devices, a predicted quality distribution in the form of a graded die forecast may be monitored with respect to changes in order to more efficiently identify factory disturbances. To this end, a predicted distribution obtained on the basis of electrical measurement data may be compared with a predicted yield distribution based on other production data. That is, an efficient automatic monitoring of the manufacturing environment may be accomplished with reduced probability of missing respective disturbance situations, since the large number of electrical parameters may be condensed into the predicted quality distribution.

摘要翻译： 在用于生产半导体器件的复杂制造环境中，可以针对变化来监视梯度模具预测形式的预测质量分布，以更有效地识别工厂干扰。 为此，可以将基于电测量数据获得的预测分布与基于其他生产数据的预测产量分布进行比较。 也就是说，由于可以将大量的电参数集中到预测的质量分布中，所以可以以减少各个干扰情况的概率降低来实现制造环境的有效的自动监视。

公开(公告)号：US20070239285A1

公开(公告)日：2007-10-11

申请号：US11278840

申请日：2006-04-06

申请人： Richard Good ,  Kevin Chamness ,  Uwe Schulze

发明人： Richard Good ,  Kevin Chamness ,  Uwe Schulze

IPC分类号： G05B15/00

CPC分类号： G05B19/41865 ,  G05B13/048 ,  G05B2219/32053 ,  G05B2219/37532 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.

摘要翻译： 用于估计与过程相关联的状态的方法包括接收与该过程相关联的状态观察。 状态观察具有相关的处理时间。 基于处理时间生成打折状态观察的权重因子。 基于贴现状态观察来生成状态估计。 系统包括处理工具，计量工具和过程控制器。 处理工具可操作以根据操作配方执行处理。 计量工具可操作以产生与该过程相关联的状态观察。 过程控制器可操作以接收状态观察，具有相关联的处理时间的状态观察，基于处理时间生成加权因子以折扣状态观察，基于打折状态观察生成状态估计，并且至少确定 基于状态估计的操作配方的一个参数。

公开(公告)号：US11862133B2

公开(公告)日：2024-01-02

申请号：US17498297

申请日：2021-10-11

申请人： Phillip David Garrison ,  Richard Good ,  David Kemp

发明人： Phillip David Garrison ,  Richard Good ,  David Kemp

IPC分类号： G10H1/32 ,  G10D3/00 ,  F16M13/02

CPC分类号： G10H1/32 ,  F16M13/02 ,  G10D3/00

摘要： One or more embodiments of a device for securing guitar modulators is shown. The device includes a face, a bracket, and a base. The face defines a hole that extends completely through the face with a first length in a first direction and a first width in a second direction perpendicular to the first direction, wherein the first length is greater than the first width. The bracket connects under the face and extends in the first direction parallel to the hole and is configured to allow a grommet to slide along the bracket in the first direction. The base is configured to support the face.

公开(公告)号：US07974801B2

公开(公告)日：2011-07-05

申请号：US12366111

申请日：2009-02-05

申请人： Richard Good

发明人： Richard Good

IPC分类号： G01N37/00

CPC分类号： G05B19/41875 ,  G05B2219/32194 ,  H01L22/20 ,  Y02P90/22

摘要： By performing a two-step approach for predicting a quality distribution during the fabrication of semiconductor devices, enhanced flexibility and efficiency may be accomplished. The two-step approach first models electrical characteristics on the basis of measurement data, such as inline measurement data, and, in a second step, an appropriate distribution for the electrical characteristics may be established, thereby obtaining modeled wafer sort data which may then be used for predicting a quality distribution of the semiconductor devices under consideration.

摘要翻译： 通过在半导体器件制造期间执行用于预测质量分布的两步法，可以实现增强的灵活性和效率。 两步法首先基于诸如在线测量数据的测量数据来模拟电特性，并且在第二步骤中，可以建立用于电特性的适当分布，从而获得建模的晶片分类数据，然后可以是 用于预测所考虑的半导体器件的质量分布。