公开(公告)号：US5909994A

公开(公告)日：1999-06-08

申请号：US749611

申请日：1996-11-18

申请人： Rick Blum ,  Kevin Fairbairn ,  Christopher Lane

发明人： Rick Blum ,  Kevin Fairbairn ,  Christopher Lane

IPC分类号： H01L21/00 ,  H01L21/677 ,  B65G1/10

CPC分类号： H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67754 ,  Y10S414/137 ,  Y10S414/139

摘要： A vacuum loadlock is provided for housing a pair of wafers in proper alignment for concurrent processing. In one embodiment, a single chamber loadlock is provided with a gas diffuser disposed therein to decrease venting times within the loadlock. In another embodiment, a dual chamber loadlock is provided having first and second isolatable regions disposed adjacent a transfer region to increase throughput of the system.

摘要翻译： 提供了真空负载锁，用于容纳一对正确对准的一对晶片以进行并行处理。 在一个实施例中，单室负载锁具有设置在其中的气体扩散器，以减少负载锁中的通气时间。 在另一个实施例中，提供双室负载锁，其具有邻近传送区域设置的第一和第二隔离区域，以增加系统的吞吐量。

公开(公告)号：US6038825A

公开(公告)日：2000-03-21

申请号：US604372

申请日：1996-02-21

申请人： Ashok Shah ,  Rick Blum ,  Gary Dickinson

发明人： Ashok Shah ,  Rick Blum ,  Gary Dickinson

IPC分类号： E06B3/673 ,  E06B7/12 ,  E04C2/38

CPC分类号： E06B3/67313 ,  E06B3/67304 ,  Y10T29/49627 ,  Y10T29/49629 ,  Y10T29/49826 ,  Y10T29/49829 ,  Y10T29/49885 ,  Y10T29/49982 ,  Y10T29/49996

摘要： An integral metal spacer for insulated glass units and method of fabricating the spacer. The spacer defines a substantially closed cross-section contour having a bottom surface, a pair of sidewalls, and a pair of generally abutting inner surfaces. A gap may be defined between the adjacent inner surfaces. The three interior corners are defined by fully mitered sidewalls. A pair of bridges are provided to integrally interconnect the inner surfaces of adjacent spacer segments. The method of fabricating includes taking a roll of flat metal stock and completely punching all corner and other structures therein while the stock is planar; severing the punched stock into individual spacer members; roll-forming the individual members into a finished linear spacer piece; applying desiccant, preferably a desiccant rope material during roll-forming; applying sealant; thereafter folding the elongate member into a square spacer thereby locking the desiccant therein.

摘要翻译： 用于绝缘玻璃单元的整体金属间隔件及其制造方法。 间隔件限定了具有底表面，一对侧壁和一对大致相邻的内表面的基本封闭的横截面轮廓。 可以在相邻的内表面之间限定间隙。 三个内角由完全倾斜的侧壁限定。 提供一对桥以使相邻的间隔段的内表面整体互连。 制造方法包括：采用一卷扁平金属原料，并且在坯料平坦的状态下完全冲压其中的所有拐角和其它结构; 将打孔的坯料切割成单个间隔件; 将各个构件成形为成品线性间隔片; 在辊成型过程中应用干燥剂，优选干燥剂绳材料; 涂胶; 然后将细长构件折叠成方形间隔件，从而将干燥剂锁定在其中。