公开(公告)号：US20190135612A1

公开(公告)日：2019-05-09

申请号：US16178716

申请日：2018-11-02

Applicant: Robert Bosch GmbH

Inventor： Ralf Boessendoerfer ,  Jan Waldmann ,  Jochen Reinmuth

IPC: B81B3/00 ,  B81B7/02 ,  B81C1/00 ,  G01P15/125

Abstract: A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.

公开(公告)号：US10899603B2

公开(公告)日：2021-01-26

申请号：US16178716

申请日：2018-11-02

Applicant: Robert Bosch GmbH

Inventor： Ralf Boessendoerfer ,  Jan Waldmann ,  Jochen Reinmuth

IPC: G01P1/12 ,  B81B3/00 ,  B81B7/02 ,  B81C1/00 ,  G01P15/125 ,  G01P15/08

Abstract: A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.

公开(公告)号：US11242240B2

公开(公告)日：2022-02-08

申请号：US16127628

申请日：2018-09-11

Applicant: Robert Bosch GmbH

Inventor： Benny Pekka Herzogenrath ,  Denis Gugel ,  Jan Waldmann ,  Michael Jaax ,  Monika Koster

IPC: B81B3/00 ,  G01P15/08 ,  B81B7/02

Abstract: A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.

公开(公告)号：US20210214213A1

公开(公告)日：2021-07-15

申请号：US17059729

申请日：2019-06-06

Applicant: Robert Bosch GmbH

Inventor： Jan Waldmann ,  Rolf Scheben ,  Rudy Eid

IPC: B81B3/00 ,  G01P1/00 ,  G01P1/02 ,  G01P15/125 ,  G01P3/44

Abstract: A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor.

公开(公告)号：US11485630B2

公开(公告)日：2022-11-01

申请号：US17059729

申请日：2019-06-06

Applicant: Robert Bosch GmbH

Inventor： Jan Waldmann ,  Rolf Scheben ,  Rudy Eid

IPC: G01P1/02 ,  B81B3/00 ,  G01P1/00 ,  G01P3/44 ,  G01P15/125 ,  G01P15/08

Abstract: A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor.

公开(公告)号：US20190092619A1

公开(公告)日：2019-03-28

申请号：US16127628

申请日：2018-09-11

Applicant: Robert Bosch GmbH

Inventor： Benny Pekka Herzogenrath ,  Denis Gugel ,  Jan Waldmann ,  Michael Jaax ,  Monika Koster

IPC: B81B3/00 ,  B81B7/02 ,  G01P15/08

Abstract: A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.