Sensor structure and yaw rate sensor
    2.
    发明授权
    Sensor structure and yaw rate sensor 有权
    传感器结构和偏航率传感器

    公开(公告)号:US09453927B2

    公开(公告)日:2016-09-27

    申请号:US13729709

    申请日:2012-12-28

    CPC classification number: G01V1/18 G01C19/5747

    Abstract: A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.

    Abstract translation: 传感器结构包括具有主延伸平面的基板,第一地震块和第二地震块,第一和第二地震块相对于基板沿着基本上垂直于主延伸平面的偏转方向可偏转。 第一和第二地震块通过刚性耦合摇杆联接在一起,所述刚性联轴器可围绕平行于主延伸平面的摇臂轴线枢转。 借助于第一悬架弹簧,第一抗震块从衬底悬挂,并且基本上刚性的第一联接杆位于第一悬架弹簧和第一抗震块之间。

    Rocker device for a micromechanical z sensor
    3.
    发明申请
    Rocker device for a micromechanical z sensor 有权
    用于微机械z传感器的摇臂装置

    公开(公告)号:US20150233966A1

    公开(公告)日:2015-08-20

    申请号:US14614120

    申请日:2015-02-04

    CPC classification number: G01P15/125 G01P2015/0831

    Abstract: A rocker device for a micromechanical Z sensor includes: two trough-shaped rocker arms mountable around a torsion pivot, the rocker device being configured asymmetrically with respect to the torsion pivot; and for each rocker arm, a strike region having at least one first strike element is provided, the strike region on each rocker arm being configured in definedly elevated fashion relative to a sensing region of the rocker device.

    Abstract translation: 用于微机械Z传感器的摇杆装置包括:可绕扭转枢轴安装的两个槽形摇臂,所述摇臂装置相对于所述扭转枢轴不对称地构造; 并且对于每个摇臂,提供具有至少一个第一撞击元件的撞击区域,每个摇臂上的撞击区域相对于摇臂装置的感测区域以相对于高度的方式构造。

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