公开(公告)号：US10557710B2

公开(公告)日：2020-02-11

申请号：US15751364

申请日：2016-06-27

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Benjamin Schmidt ,  Burkhard Kuhlmann ,  Mirko Hattass ,  Thorsten Balslink ,  Christian Hoeppner

IPC: G01C19/5642 ,  G01C19/5747 ,  G01C19/574

Abstract: A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

公开(公告)号：US20190086208A1

公开(公告)日：2019-03-21

申请号：US15743002

申请日：2016-05-24

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Burkhard Kuhlmann ,  Thorsten Balslink

IPC: G01C19/5762 ,  G01C19/5705

Abstract: A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extending parallel to the principal extension plane, in such a way that the structure is excitable to oscillate at a first frequency with a motion component substantially in a direction parallel to the first axis, the rotation rate sensor encompassing a second excitation unit for deflecting the structure out of an idle position substantially parallel to a second axis extending parallel to the principal extension plane and extending perpendicularly to the first axis, in such a way that the structure is excitable to oscillate at a second frequency with a motion component substantially in a direction parallel to the second axis.

公开(公告)号：US09945669B2

公开(公告)日：2018-04-17

申请号：US14890559

申请日：2014-05-05

Applicant: Robert Bosch GmbH

Inventor： Thorsten Balslink ,  Rolf Scheben ,  Benjamin Schmidt ,  Ralf Ameling ,  Mirko Hattass ,  Burkhard Kuhlmann ,  Robert Maul

IPC: G01C19/00 ,  G01P3/44 ,  G01P9/00 ,  G01P15/08 ,  G01C19/5712

CPC classification number: G01C19/5712

Abstract: A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations.

公开(公告)号：US20240200944A1

公开(公告)日：2024-06-20

申请号：US18493793

申请日：2023-10-24

Applicant: Robert Bosch GmbH

Inventor： Filippo David ,  Gabriele Cazzaniga ,  Giuseppe Sciortino ,  Stefano Sala ,  Thorsten Balslink

IPC: G01C19/5712 ,  G01C19/5762

CPC classification number: G01C19/5712 ,  G01C19/5762

Abstract: A micromechanical rotation rate sensor with a sensor element. The micromechanical rotation rate sensor including a drive device for driving an oscillation of the sensor element and an acquisition device for acquiring a measurement signal. The acquisition device includes a first and second electrode structure for acquiring a mechanical deflection or a force effect of the sensor element parallel to an acquisition direction provided substantially perpendicular to the drive direction. A variable capacitance may be formed between the sensor element and the first electrode structure and between the sensor element and the second electrode structure. The acquisition device is provided for differential acquisition of the variable capacitances, which each comprise a static capacitance component and a dynamic capacitance component provided for the opposite variation. The micromechanical rotation rate sensor is configured such that the static capacitance component is ascertained by a variation of the predetermined voltage.

公开(公告)号：US20240151532A1

公开(公告)日：2024-05-09

申请号：US18481609

申请日：2023-10-05

Applicant: Robert Bosch GmbH

Inventor： Mirko Hattass ,  Thorsten Balslink

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A system having an inertial sensor and an evaluation unit. The inertial sensor is configured to excite an oscillatory structure of the inertial sensor to execute a drive oscillation, so that an output data rate of the inertial sensor is derived as a function of a frequency of the drive oscillation. The evaluation unit has a reference clock generator and is configured to ascertain the output data rate of the inertial sensor as a function of a reference frequency of the reference clock generator and to determine the frequency and/or frequency change of the drive oscillation as a function of the ascertained output data rate. Alternatively, the inertial sensor is configured to receive a reference clock signal of the reference clock generator from the evaluation unit and to determine the frequency and/or frequency change as a function of the transmitted reference clock signal.

公开(公告)号：US10655965B2

公开(公告)日：2020-05-19

申请号：US15742810

申请日：2016-05-24

Applicant: Robert Bosch GmbH

Inventor： Benjamin Schmidt ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Christian Hoeppner ,  Mirko Hattass ,  Thorsten Balslink

IPC: G01C19/5747 ,  B81B3/00 ,  G01C19/5712 ,  G01C19/5726 ,  G01C19/5762

Abstract: A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

公开(公告)号：US10648810B2

公开(公告)日：2020-05-12

申请号：US15743058

申请日：2016-05-24

Applicant: Robert Bosch GmbH

Inventor： Burkhard Kuhlmann ,  Thorsten Balslink

IPC: G01C19/5726 ,  G01C19/574 ,  G01C19/5747

Abstract: A rotation rate sensor includes first, second, third and fourth structures that are each movable relative to a substrate, a drive device configured to deflect each of the first, second, third, and fourth structures essentially parallel to a drive direction and out of respective resting positions of the first, second, third, and fourth structures, such that, at a first frequency, the first and fourth structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the second and third structures, and, at a second frequency, the first and second structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the third and fourth structures.

公开(公告)号：US20190178990A1

公开(公告)日：2019-06-13

申请号：US16321223

申请日：2017-07-25

Applicant: Robert Bosch GmbH

Inventor： Siegwart Bogatscher ,  Annette Frederiksen ,  Hans-Jochen Schwarz ,  Jan Sparbert ,  Klaus Stoppel ,  Reiner Schnitzer ,  Stefanie Hartmann ,  Thomas Fersch ,  Thorsten Balslink

IPC: G01S7/481 ,  G01S17/93

Abstract: An optical set-up for a LiDAR system for the optical detection of a field of view, in particular for an operating device, a vehicle or the like, in which an optical receiver system and an optical transmitter system are designed at least on the field of view side having essentially coaxial optical axes and have a common optical deflection system, and on the detector side an optical detector system is designed and has an arrangement for directing incident light—in particular from the field of view—directly via the optical deflection system onto a detector device.

公开(公告)号：US10094738B2

公开(公告)日：2018-10-09

申请号：US15455990

申请日：2017-03-10

Applicant: Robert Bosch GmbH

Inventor： Manuel Dietrich ,  Thorsten Balslink

IPC: G01C1/00 ,  G01M11/00 ,  G01B11/27 ,  G01C15/00 ,  G01M11/06

Abstract: A method is described for determining angle errors when measuring slewing angles of a pivoted light-deflecting device, including the following steps: emitting a first light beam and a second light beam, which enclose a light beam angle, onto the light-deflecting device; receiving the first light beam and second light beam deflected by the light-deflecting device and reflected by an object; calculating a first propagation path of the first light beam and a second propagation path of the second light beam; pivoting the light-deflecting device from an initial position to a final position, respective slewing angles of the light-deflecting device being measured in the process and a dependency of the first propagation path on the measured slewing angles being determined; and calculating an angle error for a measured slewing angle to be corrected from the set of measured slewing angles by using the light beam angle, the second propagation path and the dependency of the first propagation path on the measured slewing angle.

公开(公告)号：US20180231381A1

公开(公告)日：2018-08-16

申请号：US15751364

申请日：2016-06-27

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Benjamin Schmidt ,  Burkhard Kuhlmann ,  Mirko Hattass ,  Thorsten Balslink ,  Christian Hoeppner

IPC: G01C19/5642 ,  G01C19/5747

Abstract: A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.