公开(公告)号：US12123954B2

公开(公告)日：2024-10-22

申请号：US17148247

申请日：2021-01-13

Applicant: Robert Bosch GmbH

Inventor： Mirko Hattass ,  Alf Neustadt ,  Nico Heussner

IPC: G01S17/931 ,  G01S7/481 ,  G01S7/484 ,  G01S7/486

CPC classification number: G01S17/931 ,  G01S7/4817 ,  G01S7/484 ,  G01S7/486

Abstract: A LIDAR system including a light source for emitting a light pulse along an optical axis, a deflection device to deflect in an oscillating manner the light pulse along the optical axis in first and second spatial directions so that the light pulse along the optical axis repeatedly runs through a two-dimensional scan pattern, and a control unit for activating and deactivating the light source. The oscillating deflection in the first spatial direction is achieved by repeated first partial movements and second partial movements. The oscillating deflection in the second spatial direction is achieved by repeated third partial movements and fourth partial movements. The control unit activates the light source to emit a light pulse at predefined locations of the scan pattern, and activates the light source to emit a light pulse at different pixels during the first partial movements and/or third partial movements than during the second partial movements and/or fourth partial movements.

公开(公告)号：US20240151532A1

公开(公告)日：2024-05-09

申请号：US18481609

申请日：2023-10-05

Applicant: Robert Bosch GmbH

Inventor： Mirko Hattass ,  Thorsten Balslink

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A system having an inertial sensor and an evaluation unit. The inertial sensor is configured to excite an oscillatory structure of the inertial sensor to execute a drive oscillation, so that an output data rate of the inertial sensor is derived as a function of a frequency of the drive oscillation. The evaluation unit has a reference clock generator and is configured to ascertain the output data rate of the inertial sensor as a function of a reference frequency of the reference clock generator and to determine the frequency and/or frequency change of the drive oscillation as a function of the ascertained output data rate. Alternatively, the inertial sensor is configured to receive a reference clock signal of the reference clock generator from the evaluation unit and to determine the frequency and/or frequency change as a function of the transmitted reference clock signal.

公开(公告)号：US11520013B2

公开(公告)日：2022-12-06

申请号：US16646134

申请日：2018-09-07

Applicant: Robert Bosch GmbH

Inventor： Mirko Hattass ,  Michael Zoeller ,  Alexander Greiner ,  Remigius Has

IPC: H05K7/00 ,  G01S7/481 ,  H05K7/20

Abstract: A LIDAR system that includes a laser unit, a receiving unit, and a cooling device for generating a cooling airflow. The laser unit, the receiving unit, and the cooling device are situated rotatingly about a rotational axis, so that the cooling airflow for cooling the rotating components is generated by the LIDAR system itself.

公开(公告)号：US10753742B2

公开(公告)日：2020-08-25

申请号：US15767271

申请日：2016-11-09

Applicant: Robert Bosch GmbH

Inventor： Reinhard Neul ,  Torsten Ohms ,  Robert Maul ,  Mirko Hattass ,  Christian Hoeppner ,  Odd-Axel Pruetz ,  Benjamin Schmidt ,  Rolf Scheben ,  Friedjof Heuck

IPC: G01C19/5747 ,  G01C19/5712

Abstract: A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.

公开(公告)号：US10704909B2

公开(公告)日：2020-07-07

申请号：US15742756

申请日：2016-05-24

Applicant: Robert Bosch GmbH

Inventor： Patrick Wellner ,  Burkhard Kuhlmann ,  Mirko Hattass

IPC: G01C19/5719 ,  G01C19/5733

Abstract: A rotation rate sensor including a substrate having a principal plane of extension, and a structure movable with respect to the substrate; the structure being excitable from a neutral position into an oscillation having a movement component substantially parallel to a driving direction, which is substantially parallel to the principal plane of extension. To induce the oscillation, the rotation rate sensor includes a comb electrode moved along with the structure and a comb electrode fixed in position relative to the substrate. The excitation is produced by applying a voltage to the moving comb electrode and/or to the stationary comb electrode. Due to a rotation rate of the rotation rate sensor about an axis running substantially perpendicularly to the driving direction and substantially perpendicularly to the detection direction, a force applied to the structure with a force component along a detection direction substantially perpendicular to the driving direction is detectable.

公开(公告)号：US10655965B2

公开(公告)日：2020-05-19

申请号：US15742810

申请日：2016-05-24

Applicant: Robert Bosch GmbH

Inventor： Benjamin Schmidt ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Christian Hoeppner ,  Mirko Hattass ,  Thorsten Balslink

IPC: G01C19/5747 ,  B81B3/00 ,  G01C19/5712 ,  G01C19/5726 ,  G01C19/5762

Abstract: A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

公开(公告)号：US20180231381A1

公开(公告)日：2018-08-16

申请号：US15751364

申请日：2016-06-27

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Benjamin Schmidt ,  Burkhard Kuhlmann ,  Mirko Hattass ,  Thorsten Balslink ,  Christian Hoeppner

IPC: G01C19/5642 ,  G01C19/5747

Abstract: A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

公开(公告)号：US20160356599A1

公开(公告)日：2016-12-08

申请号：US15116924

申请日：2015-01-21

Applicant: ROBERT BOSCH GMBH

Inventor： Robert Maul ,  Mirko Hattass ,  Rolf Scheben

IPC: G01C19/574

CPC classification number: G01C19/574 ,  G01C19/5719 ,  G01C19/5747

Abstract: A sensor drive includes at least one first seismic mass and an operating apparatus. The operating apparatus is configured to put the first seismic mass into oscillatory motion such that (i) a projection of the oscillatory motion of the first seismic mass onto a first spatial direction is a first harmonic oscillation of the first seismic mass at a first frequency, and (ii) a projection of the oscillatory motion of the first seismic mass onto a second spatial direction oriented at an angle to the first spatial direction is a second harmonic oscillation of the first seismic mass at a second frequency not equal to the first frequency. A method includes operating such a sensor device having at least one seismic mass.

Abstract translation: 传感器驱动器包括至少一个第一抗震块和操作装置。 操作装置被配置为将第一地震质量块放入振荡运动中，使得（i）第一地震质量块的振荡运动在第一空间方向上的投影是第一频率处的第一地震质量的一次谐波振荡， 以及（ii）将所述第一地震质量体的振荡运动投影到与第一空间方向成一定角度的第二空间方向上，是以不等于第一频率的第二频率的第一地震质量的二次谐波振荡。 一种方法包括操作具有至少一个地震质量的这种传感器装置。

公开(公告)号：US20160138666A1

公开(公告)日：2016-05-19

申请号：US14924135

申请日：2015-10-27

Applicant: Robert Bosch GmbH

Inventor： Christian HOEPPNER ,  Benjamin Schmidt ,  Mirko Hattass ,  Odd-Axel Pruetz ,  Robert Maul ,  Friedjof Heuck ,  Rolf Scheben ,  Torsten Ohms ,  Reinhard Neul

IPC: F16F1/02 ,  G01C19/56

CPC classification number: G01C19/56 ,  B81B2203/0163 ,  B81B2203/019 ,  B81C1/0019 ,  G01C19/5733

Abstract: A micromechanical spring for an inertial sensor, including segments of a monocrystalline base material, the segments having surfaces which are situated at a right angle to one another with respect to a plane of oscillation of the spring and normal to the plane of oscillation of the spring, the segments being manufactured in a crystal-direction-dependent etching process and each having two different orientations normal to the plane of oscillation, in which the spring includes a defined number of segments situated in a defined manner.

Abstract translation: 一种用于惯性传感器的微机械弹簧，包括单晶基材的段，所述段具有相对于弹簧的振荡平面彼此成直角的表面，并垂直于弹簧的摆动平面 ，所述片段以晶体方向依赖的蚀刻工艺制造，并且每个具有垂直于振荡平面的两个不同的取向，其中弹簧包括以限定的方式定位的限定数量的片段。

公开(公告)号：US20140103497A1

公开(公告)日：2014-04-17

申请号：US14052812

申请日：2013-10-14

Applicant: Robert Bosch GmbH

Inventor： Friedjof Heuck ,  Christoph Schelling ,  Mirko Hattass ,  Benjamin Schmidt

IPC: B81C1/00

CPC classification number: B81C1/00531 ,  B81B2201/0242 ,  B81C1/00595 ,  B81C1/00619 ,  B81C2201/0132 ,  B81C2201/0133 ,  G01C19/5769

Abstract: A production process for a micromechanical component includes at least partially structuring at least one structure from at least one monocrystalline silicon layer by at least performing a crystal-orientation-dependent etching step on an upper side of the silicon layer with a given (110) surface orientation of the silicon layer. For the at least partial structuring of the at least one structure, at least one crystal-orientation-independent etching step is additionally performed on the upper side of the silicon layer with the given (110) surface orientation of the silicon layer.

Abstract translation: 用于微机械部件的制造方法包括至少部分地从至少一个单晶硅层构造至少一个结构，至少通过给定的（110）表面在硅层的上侧执行晶体取向依赖性蚀刻步骤 硅层的取向。 对于至少一个结构的至少部分结构，在硅层的给定（110）表面取向附近在硅层的上侧附加地执行至少一个不依赖晶体取向的蚀刻步骤。