公开(公告)号：US5536940A

公开(公告)日：1996-07-16

申请号：US394852

申请日：1995-02-27

申请人： Roger L. Alvis ,  David J. Dingley

发明人： Roger L. Alvis ,  David J. Dingley

IPC分类号： H01J37/05 ,  H01J37/29

CPC分类号： H01J37/05 ,  H01J2237/244 ,  H01J2237/28

摘要： A sample to be analyzed by a scanning electron microscope is held at an electrostatic potential higher than the recording plate of the microscope. This provides that electrons scattered from the sample which are at an energy level lower than a chosen level are drawn back into the sample by the potential of the sample, while other, higher energy scattered electrons reach the recording plate to form a pattern thereon.

摘要翻译： 通过扫描电子显微镜分析的样品保持在比显微镜的记录板高的静电电位。 这提供了从低于所选电平的能级散射的样品的电子被样品的电位吸回到样品中，而其它较高能量的散射电子到达记录板以在其上形成图案。

公开(公告)号：US5576543A

公开(公告)日：1996-11-19

申请号：US517146

申请日：1995-08-21

申请人： David J. Dingley

发明人： David J. Dingley

IPC分类号： G01N23/20 ,  H01J37/26

CPC分类号： H01J37/26 ,  H01J2237/22

摘要： An apparatus for determining crystallographic characteristics of a specimen having at least one crystal includes an electron beam generator, a beam deflector for adjusting the tilt and azimuth angles of the electron beam relative to the specimen, a stage for holding the specimen, an image collection system for obtaining a plurality of dark field images, a data store, and a processor for processing the dark field images to identify a plurality of crystal lattice planes associated with the crystals. The dark field images are obtained under different electron beam tilt and azimuth deflection conditions. The bright pixels in each dark field image are identified and utilized to determine the spatial location and orientation of the crystal lattice planes and the crystals themselves. An orientation image is produced that represents the orientation of the crystals within the specimen.

摘要翻译： 用于确定具有至少一个晶体的样品的晶体学特性的装置包括电子束发生器，用于调节电子束相对于样本的倾斜和方位角的光束偏转器，用于保持样本的平台，图像采集系统 用于获得多个暗场图像，数据存储器和处理器，用于处理暗场图像以识别与晶体相关联的多个晶格面。 在不同的电子束倾斜和方位偏转条件下获得暗场图像。 每个暗场图像中的亮像素被识别并用于确定晶格平面和晶体本身的空间位置和取向。 产生代表样品中晶体取向的取向图像。

公开(公告)号：US5557104A

公开(公告)日：1996-09-17

申请号：US547299

申请日：1995-10-24

申请人： David P. Field ,  David J. Dingley

发明人： David P. Field ,  David J. Dingley

IPC分类号： G01N23/203

CPC分类号： G01N23/203

摘要： An apparatus for determining the reliability of crystallographic solutions of a specimen includes an electron beam generator, a stage for holding the specimen, an image collection system for obtaining diffraction images of crystals within the specimen, and processor for processing the diffraction images to obtain most probable indexing solutions for the crystals and to generate confidence factors associated with the most probable indexing solutions. The apparatus may utilize the confidence factors to determine the phase of the crystals within the specimen. The confidence factors may also be incorporated into reports representing the statistical confidence of various crystallographic characteristics of the specimen.

摘要翻译： 用于确定试样的晶体溶液的可靠性的装置包括电子束发生器，用于保持试样的载物台，用于获得试样内的晶体衍射图像的图像采集系统，以及用于处理衍射图像以获得最可能的 为晶体索引解决方案，并产生与最可能的索引解决方案相关的置信因子。 该装置可以利用置信因子来确定样品内晶体的相位。 置信因子也可以纳入代表样本的各种晶体学特性的统计置信度的报告中。

公开(公告)号：US5466934A

公开(公告)日：1995-11-14

申请号：US374214

申请日：1995-01-18

申请人： Brent L. Adams ,  David J. Dingley ,  David P. Field

发明人： Brent L. Adams ,  David J. Dingley ,  David P. Field

IPC分类号： G01N23/203

CPC分类号： G01N23/203

摘要： An imaging apparatus (10) includes a scanning electron microscope (12) which is controlled to bombard numerous points (62) of a material sample (24) with an electron beam (18). Backscatter diffraction patterns are collected by an image collection system (26) which may include both a slower responding video camera (32) and a faster responding diode array (40). For a baseline point (62), an electron backscatter diffraction pattern collected at the video camera (32) is analyzed to identify representative pixels which reside along Kikuchi bands (78). Backscatter images from subsequent points (62) are rapidly compared (98) with the baseline to detect changes. When changes are not detected, EBSPs are not analyzed. When changes are detected, EBSPs are analyzed to generate new baselines. The resulting collection of analyzed EBSPs are processed (104) to identify microstructure attributes and to characterize defects (64).

摘要翻译： 成像装置（10）包括扫描电子显微镜（12），其被控制以用电子束（18）轰击材料样品（24）的多个点（62）。 后向散射衍射图案由图像采集系统（26）收集，图像采集系统（26）可以包括较慢响应的摄像机（32）和更快的响应二极管阵列（40）。 对于基线点（62），分析在摄像机（32）处收集的电子反向散射衍射图，以识别沿着菊池带（78）驻留的代表像素。 将来自后续点（62）的反向散射图像与基线快速比较（98）以检测变化。 当未检测到更改时，不会分析EBSP。 当检测到变化时，分析EBSP以产生新的基线。 处理所得到的分析的EBSP集合（104）以识别微结构属性并表征缺陷（64）。