摘要:
A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes a central movable beam having a movable contact; a suspension system for supporting the movable beam and generating a contact force; an actuator for displacing the beam upon application of an activation signal, and a fixed contact for interfacing the movable contact when the switch is in a closed state. The switch is fabricated from a Si/SiO2/Si wafer using photolithography, DRIE and sacrificial oxide etching followed by metalization of electrical contact points with a wear-resistant metal or alloy. An actuation layer may be fabricated from the silicon substrate layer of the wafer and the signal layer may be fabricated from the top silicon layer. The actuation layer and signal layer are thereby electrically decoupled and mechanically coupled by the intervening SiO2 layer.
摘要:
A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.
摘要:
A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.
摘要:
A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.
摘要:
A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes a central movable beam having a movable contact; a suspension system for supporting the movable beam and generating a contact force; an actuator for displacing the beam upon application of an activation signal, and a fixed contact for interfacing the movable contact when the switch is in a closed state. The switch is fabricated from a Si/SiO2/Si wafer using photolithography, DRIE and sacrificial oxide etching followed by metalization of electrical contact points with a wear-resistant metal or alloy. An actuation layer may be fabricated from the silicon substrate layer of the wafer and the signal layer may be fabricated from the top silicon layer. The actuation layer and signal layer are thereby electrically decoupled and mechanically coupled by the intervening SiO2 layer.
摘要:
The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.
摘要:
A coupling device (1, 2) for optical fibres (19) comprises a first sheet (11) equipped with a plurality of through-holes (13), of which a portion 13a, at least, has a diameter adjusted to the diameter of said optical fibres (19), and a second sheet (12) joined to said first sheet (11) by a face. Said device (1, 2) also comprises a third sheet (15), joined to said first sheet (11), and equipped with a plurality of through-holes (16), of which a portion (16a), at least, has a diameter adjusted to the diameter of said optical fibres (19), aligned relative to the holes (13) of said first sheet (11), so as to form recesses (18, 25) with which said optical fibres (19) are engaged.
摘要:
A fiber Optic circuit switch comprises elements constructed entirely from a coating layer on a substrate. A procedure for production of the fiber optic circuit switch is disclosed.
摘要:
The invention concerns a micromechanical element (1) including a frame (10), a moving part (12) rotating inside said frame (10), about an axis AA, two torsion beams (14) connecting the moving part (12) to said frame (10), aligned along the axis AA and provided with a portion (15) of reinforced width, and stop members (16) arranged on both sides of the reinforced portions (15), so as to limit the lateral movement of the moving part (12). According to the invention, the portions (15) of reinforced width are integral with the frame (10), and the stop members (16) are integral with the moving part (12).
摘要:
The invention relates to an optical filter comprising an optical source (2), emitting a light beam comprising a plurality of wavelengths, an optical receiver (3), and, optically aligned between the source (2) and receiver (3), at least one collimating and converging optical element (10), one dispersive optical element (20) capable of angularly separating the wavelengths, and a reflecting element (30) mobile about an axis (AA) capable, depending on its orientation about the axis (AA), of reflecting a specific wavelength toward the optical receiver (3). The optical elements (10, 20, 30) are arranged so that the light beam passes at least once through the dispersive element (20) before reaching the optical receiver (3). According to the invention the reflecting element (30) includes at least two faces (31, 32) defining a first and a second plane intersecting on a line parallel to the axis (AA) of rotation of the reflecting element (30).