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    CONNECTING STRUCTURE FOR MICROMECHANICAL OSCILLATING DEVICES
    3.
    发明申请
    CONNECTING STRUCTURE FOR MICROMECHANICAL OSCILLATING DEVICES 有权
    微电子振荡器件的连接结构

    公开(公告)号：US20110286069A1

    公开(公告)日：2011-11-24

    申请号：US13106453

    申请日：2011-05-12

    申请人： Stefan PINTER ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

    发明人： Stefan PINTER ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0833 ,  B81B7/008 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154

    摘要： A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.

    摘要翻译： 用于微机械振荡装置，特别是微机械振荡镜的连接结构。 另一方面，连接结构至少间接地可连接到微机械振荡结构，另一方面，用于测量微机械振荡结构的扭转，并且包括至少一个，特别是至少两个 ，优选三个平行于微机械振荡结构的旋转轴线的腿部，以及至少一个垂直于旋转轴线设置的另外的腿部。 平行于旋转轴线的连接结构的延伸部至少有两倍的时间，特别是连接结构的垂直于旋转轴的延伸的三倍，并且包括至少一个用于测量扭转的电阻元件 的连接结构，电阻元件位于连接结构经受扭转时增加的机械应力的区域。

    Pressure sensor for pressure detection in combustion chamber of internal combustion engine
    4.
    发明授权
    Pressure sensor for pressure detection in combustion chamber of internal combustion engine 失效
    用于内燃机燃烧室压力检测的压力传感器

    公开(公告)号：US5703282A

    公开(公告)日：1997-12-30

    申请号：US734240

    申请日：1996-10-16

    申请人： Matthias Kuesell ,  Andreas Duell ,  Karl Bender ,  Kay Borchert

    发明人： Matthias Kuesell ,  Andreas Duell ,  Karl Bender ,  Kay Borchert

    IPC分类号： G01L9/00 ,  F02D35/00 ,  F02D45/00 ,  G01L23/08 ,  G01L23/18 ,  G01L23/22

    CPC分类号： G01L23/08 ,  G01L23/18

    摘要： A pressure sensor for pressure detection in a combustion chamber of internal combustion engines of motor vehicles has a housing provided with an opening, a measuring element, a plunger arranged in the opening of the housing and having one end acting on the measuring element so that a measuring signal is produced proportionally to a pressure to be determined, the plunger directly abutting against the measuring element and having a material with a yielding point which is smaller than a breaking limit of a material of the measuring element, the end of the plunger which acts on the measuring element is spherical and abuts against the measuring element with such a contact surface that occurring stresses do not exceed a predetermined nominal value.

    摘要翻译： 一种用于机动车内燃机的燃烧室中的压力检测用压力传感器，具有设置有开口，测量元件和柱塞的壳体，该柱塞布置在壳体的开口中，并具有作用在测量元件上的一端， 测量信号与要确定的压力成比例地产生，柱塞直接抵靠测量元件并且具有屈服点小于测量元件的材料的断裂极限的材料，所述柱塞的端部作用 在测量元件上是球形的并且具有这样的接触表面抵靠测量元件，发生的应力不超过预定的标称值。

    Connecting structure for micromechanical oscillating devices
    5.
    发明授权
    Connecting structure for micromechanical oscillating devices 有权
    微机械振荡装置的连接结构

    公开(公告)号：US08462415B2

    公开(公告)日：2013-06-11

    申请号：US13106453

    申请日：2011-05-12

    申请人： Stefan Pinter ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

    发明人： Stefan Pinter ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0833 ,  B81B7/008 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154

    摘要： A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.

    摘要翻译： 用于微机械振荡装置，特别是微机械振荡镜的连接结构。 另一方面，连接结构至少间接地可连接到微机械振荡结构，另一方面，用于测量微机械振荡结构的扭转，并且包括至少一个，特别是至少两个 ，优选三个平行于微机械振荡结构的旋转轴线的腿部，以及至少一个垂直于旋转轴线设置的另外的腿部。 平行于旋转轴线的连接结构的延伸部至少有两倍的时间，特别是连接结构的垂直于旋转轴的延伸的三倍，并且包括至少一个用于测量扭转的电阻元件 的连接结构，电阻元件位于连接结构经受扭转时增加的机械应力的区域。

    Micromechanical component and equalization method
    6.
    发明授权
    Micromechanical component and equalization method 有权
    微机械部件和均衡方法

    公开(公告)号：US06782756B2

    公开(公告)日：2004-08-31

    申请号：US10239470

    申请日：2003-01-09

    申请人： Joerg Muchow ,  Jochen Franz ,  Uwe Lipphardt ,  Andreas Duell ,  Wolfgang Romes

    发明人： Joerg Muchow ,  Jochen Franz ,  Uwe Lipphardt ,  Andreas Duell ,  Wolfgang Romes

    IPC分类号： G01L900

    CPC分类号： G01L9/0054

    摘要： A micromechanical component, in particular a pressure sensor, including a substrate that has a membrane region, a surrounding region of the membrane region, at least one measuring resistance provided in the membrane region and modifiable by deformation of the membrane region, and a corresponding evaluation circuit provided in the surrounding region. An interference effect on the measuring resistance is producible by way of a deformation of parts, in particular conductor paths, of the evaluation circuit relative to the substrate. The invention also creates a corresponding equalization method on a test chip or as an individual final equalization.

    摘要翻译： 一种微机械部件，特别是压力传感器，包括具有膜区域的基板，膜区域的周围区域，设置在膜区域中的至少一个测量电阻，并且可以通过膜区域的变形而修改，以及相应的评估 电路设在周边地区。 测量电阻的干涉效应可以通过评估电路相对于衬底的部件，特别是导体路径的变形来产生。 本发明还在测试芯片上或作为单独的最终均衡产生相应的均衡方法。