公开(公告)号：US20100150310A1

公开(公告)日：2010-06-17

申请号：US12314723

申请日：2008-12-16

申请人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

发明人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

IPC分类号： G01N23/20

CPC分类号： G01N23/20025

摘要： An X-ray reflectometry apparatus comprises an X-ray source (1) configured to emit an incident X-ray beam directed onto a sample measuring position and an X-ray detector (2) configured to detect an X-ray beam (3) reflected from a surface of a selected sample (4) located in said sample measuring position and with a multiple sample holder (5) comprising an essentially horizontal one- or two-dimensional array of sample resting positions into which solid samples can be placed from above. A drive mechanism (6) moves the sample holder in one or two directions within a horizontal plane underneath the sample measuring position in order to place a selected sample (4) directly beneath the measuring position and a sample lift mechanism (7) has a vertically movable piston (8) located below the multiple sample holder (5) beneath the sample measuring position. When the sample lift mechanism (7) is activated, the piston (8) moves upwards against a bottom surface of the selected sample (4) or sample container (9) containing said selected sample (4), lifts the selected sample (4) or sample container (9) until it touches a stop (10) that keeps the sample (4) in the sample measuring position. When the sample lift mechanism (7) is deactivated, the piston (8) moves downwards and the sample (4) rests in its resting position. The device prevents signal cross talk to neighboring samples or to the sample holder, while also assuring an alignment which can be parallel to the incident beam.

摘要翻译： 一种X射线反射测量装置，包括：X射线源（1），被配置为发射指向样本测量位置的入射X射线束;以及X射线检测器（2），被配置为检测X射线束（3） 从位于所述样品测量位置的所选样品（4）的表面反射并且具有多个样品保持器（5），所述多个样品保持器（5）包含基本上水平的一维或二维样品静止位置阵列，固体样品可以从上方放置在其中 。 驱动机构（6）在样品测量位置下方的水平平面内沿一个或两个方向移动样品架，以将选定的样品（4）直接放置在测量位置的正下方，并且样品提升机构（7）具有垂直 位于样品测量位置下方的多个样品保持器（5）下方的活动活塞（8）。 当样品提升机构（7）被启动时，活塞（8）相对于所选择的样品（4）或含有所选样品（4）的样品容器（9）的底表面向上移动，提升所选样品（4） 或样品容器（9），直到其接触将样品（4）保持在样品测量位置的停止（10）。 当样品提升机构（7）停用时，活塞（8）向下移动，样品（4）处于其静止位置。 该装置防止与相邻样品或样品保持器的信号串扰，同时还确保可平行于入射光束的对准。

公开(公告)号：US07746980B1

公开(公告)日：2010-06-29

申请号：US12314723

申请日：2008-12-16

申请人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

发明人： Rolf-Dieter Schipper ,  Eduard Konusch ,  Rachel Eisenhower ,  Lutz Bruegemann

IPC分类号： G01N23/20 ,  H05G1/00

CPC分类号： G01N23/20025

摘要： An X-ray reflectometry apparatus comprises an X-ray source (1) configured to emit an incident X-ray beam directed onto a sample measuring position and an X-ray detector (2) configured to detect an X-ray beam (3) reflected from a surface of a selected sample (4) located in said sample measuring position and with a multiple sample holder (5) comprising an essentially horizontal one- or two-dimensional array of sample resting positions into which solid samples can be placed from above. A drive mechanism (6) moves the sample holder in one or two directions within a horizontal plane underneath the sample measuring position in order to place a selected sample (4) directly beneath the measuring position and a sample lift mechanism (7) has a vertically movable piston (8) located below the multiple sample holder (5) beneath the sample measuring position. When the sample lift mechanism (7) is activated, the piston (8) moves upwards against a bottom surface of the selected sample (4) or sample container (9) containing said selected sample (4), lifts the selected sample (4) or sample container (9) until it touches a stop (10) that keeps the sample (4) in the sample measuring position. When the sample lift mechanism (7) is deactivated, the piston (8) moves downwards and the sample (4) rests in its resting position. The device prevents signal cross talk to neighboring samples or to the sample holder, while also assuring an alignment which can be parallel to the incident beam.

摘要翻译： 一种X射线反射测量装置，包括：X射线源（1），被配置为发射指向样本测量位置的入射X射线束;以及X射线检测器（2），被配置为检测X射线束（3） 从位于所述样品测量位置的所选样品（4）的表面反射并且具有多个样品保持器（5），所述多个样品保持器（5）包含基本上水平的一维或二维样品静止位置阵列，固体样品可以从上方放置在其中 。 驱动机构（6）在样品测量位置下方的水平平面内沿一个或两个方向移动样品架，以将选定的样品（4）直接放置在测量位置的正下方，并且样品提升机构（7）具有垂直 位于样品测量位置下方的多个样品保持器（5）下方的活动活塞（8）。 当样品提升机构（7）被启动时，活塞（8）相对于所选择的样品（4）或含有所选样品（4）的样品容器（9）的底表面向上移动，提升所选样品（4） 或样品容器（9），直到其接触将样品（4）保持在样品测量位置的停止（10）。 当样品提升机构（7）停用时，活塞（8）向下移动，样品（4）处于其静止位置。 该装置防止与相邻样品或样品保持器的信号串扰，同时还确保可平行于入射光束的对准。

公开(公告)号：US20070007464A1

公开(公告)日：2007-01-11

申请号：US11522382

申请日：2006-09-18

申请人： Joachim Lange ,  Rolf-Dieter Schipper

发明人： Joachim Lange ,  Rolf-Dieter Schipper

IPC分类号： G01T3/00 ,  G01N23/201

CPC分类号： G01N23/201

摘要： A method for operating an X-ray or neutron-optical system and beam stop comprising an X-ray or neutron source (1) from which corresponding radiation is guided as a primary beam (2) to a sample (4) under investigation, with an X-ray or neutron detector (6) for receiving radiation diffracted or scattered from the sample (4), wherein the source (1), the sample and the detector are disposed substantially on one line (=z-axis) and wherein a beam stop (5; 31; 41) is provided between the sample and the detector whose cross-sectional shape is adjusted to the cross-section of the primary beam is characterized in that the beam stop is disposed to be displaceable along the z-direction for optimum adjustment of the amounts of useful and interfering radiation impinging on the detector. This protects the detector from the influence of the primary beam while allowing a maximum amount of diffracted or scattered radiation to reach the detector, wherein the beam stop can be easily adjusted to temporally changing properties of the beam optics.

公开(公告)号：US07295650B2

公开(公告)日：2007-11-13

申请号：US11522382

申请日：2006-09-18

申请人： Joachim Lange ,  Rolf-Dieter Schipper

发明人： Joachim Lange ,  Rolf-Dieter Schipper

IPC分类号： G01T3/00 ,  G01N23/201

CPC分类号： G01N23/201

摘要： A method for operating an X-ray or neutron-optical system and beam stop comprising an X-ray or neutron source (1) from which corresponding radiation is guided as a primary beam (2) to a sample (4) under investigation, with an X-ray or neutron detector (6) for receiving radiation diffracted or scattered from the sample (4), wherein the source (1), the sample and the detector are disposed substantially on one line (=z-axis) and wherein a beam stop (5; 31; 41) is provided between the sample and the detector whose cross-sectional shape is adjusted to the cross-section of the primary beam is characterized in that the beam stop is disposed to be displaceable along the z-direction for optimum adjustment of the amounts of useful and interfering radiation impinging on the detector. This protects the detector from the influence of the primary beam while allowing a maximum amount of diffracted or scattered radiation to reach the detector, wherein the beam stop can be easily adjusted to temporally changing properties of the beam optics.

摘要翻译： 一种用于操作X射线或中子光学系统和光束停止的方法，其包括X射线或中子源（1），相应的辐射从该射线或中子源（1）被引导为被调查的样品（4）作为主光束（2）， 用于接收从样品（4）衍射或散射的辐射的X射线或中子检测器（6），其中源（1），样品和检测器基本上设置在一条线（= z轴）上，其中a 在样品和检测器之间设置有横梁挡块（5; 31; 41），其横截面形状被调整到主梁的横截面，其特征在于，梁挡块被设置成可沿着z方向 以便最佳地调节入射到检测器上的有用和干扰辐射的量。 这保护了检测器免受主光束的影响，同时允许最大量的衍射或散射辐射到达检测器，其中光束停止可以容易地调整到时间上改变光束光学器件的特性。