METHOD FOR MANUFACTURING COBALT ALLOY-BASED CERAMIC COMPOSITE SPUTTERING TARGET
    2.
    发明申请
    METHOD FOR MANUFACTURING COBALT ALLOY-BASED CERAMIC COMPOSITE SPUTTERING TARGET 有权
    制造基于钴合金的陶瓷复合溅射靶的方法

    公开(公告)号:US20110241253A1

    公开(公告)日:2011-10-06

    申请号:US12939174

    申请日:2010-11-04

    IPC分类号: B28B3/00 B28B1/00

    摘要: A method for manufacturing a cobalt (Co) alloy-based ceramic composite sputtering target is provided. A cobalt ingot and a chromium (Cr) ingot are melted in vacuum and then nebulized to form a cobalt-chromium (CoCr) alloy powder. Additionally, a ceramic powder and a platinum powder are wetly mixed to form a platinum-ceramic (Pt-ceramic) slurry, in which the ceramic powder is applied onto the platinum powder's surface uniformly. Next, the CoCr alloy powder and the Pt-ceramic slurry are wetly mixed to form a CoCrPt-ceramic slurry. Thereafter, the CoCrPt-ceramic slurry is dried, molded and compressed to form the cobalt alloy-based ceramic composite sputtering target. The resulted cobalt alloy-based ceramic composite sputtering target, which has a fine and dense structure, uniform composition and lower magnetic permeability, is beneficial to a magnetron sputter deposition process, as well as a film sputtering process used in the magnetic recording industry.

    摘要翻译: 提供了一种制造钴(Co)合金系陶瓷复合溅射靶的方法。 钴锭和铬(Cr)锭在真空中熔化,然后喷雾形成钴 - 铬(CoCr)合金粉末。 另外,将陶瓷粉末和铂粉末湿式混合以形成铂 - 陶瓷(Pt-陶瓷)浆料,其中将陶瓷粉末均匀地涂覆在铂粉末的表面上。 接着,将CoCr合金粉末和Pt-陶瓷浆料湿混,形成CoCrPt陶瓷浆料。 然后,将CoCrPt陶瓷浆料干燥,成型并压缩,形成钴合金系陶瓷复合溅射靶。 得到的钴合金系陶瓷复合溅射靶具有精细且致密的结构,组成均匀性和较低的磁导率,有利于磁控溅射沉积工艺以及在磁记录工业中使用的薄膜溅射工艺。