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公开(公告)号：US5786654A
公开(公告)日：1998-07-28
申请号：US657307
申请日：1996-06-03
摘要： A movable stage utilizing an electromechanical transducer. An actuator as a drive source thereof is composed of piezoelectric elements, drive member fixed thereto and a movable member friction-coupled with the drive member. When a drive pulse is applied to the piezoelectric element to cause it to show reciprocal displacements at different rates in the thickness direction, the movable member frictionally coupled with the drive member moves in the predetermined direction to move the movable table coupled with the movable member in the predetermined direction. The movable stage comprising the movable table moving in the two axes or three axes can be constituted by providing the actuator in the two axes or three axes crossing with each other.
摘要翻译： 利用机电换能器的可移动台。 作为其驱动源的致动器由压电元件，固定到其上的驱动构件和与驱动构件摩擦联接的可动构件组成。 当驱动脉冲被施加到压电元件以使其在厚度方向上以不同的速率显示往复位移时，与驱动构件摩擦联接的可动构件沿预定方向移动，以将与可动构件联接的活动台移动到 预定方向。 包括在两轴或三轴上移动的可移动台的可移动台可以通过在彼此交叉的两个轴或三个轴上提供致动器来构成。
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公开(公告)号：US06512321B2
公开(公告)日：2003-01-28
申请号：US09789504
申请日：2001-02-22
IPC分类号： H01L4108
CPC分类号： H02N2/067 , G03B3/10 , G03B2205/0061 , H02N2/025
摘要： A driving apparatus includes an electromechanical conversion element that expands and contracts through the application of a drive voltage, the electromechanical conversion element includes a first end and a second end. The apparatus further includes a support member that is fixed to the first end of the electromechanical conversion element in a direction of expansion or contraction of the electromechanical conversion element; a drive member that is fixed to the second end of the electromechanical conversion element in the direction of expansion or contraction; an engaging member that engages with the drive member with a friction force; and a drive circuit that drives the electromechanical conversion element. The drive circuit generates a rectangular waveform drive voltage and applies the rectangular waveform drive voltage to the electromechanical conversion element to cause the electromechanical conversion element to expand and contract at different speeds to thereby move the support member and the engaging member relative to each other.
摘要翻译： 驱动装置包括通过施加驱动电压而膨胀和收缩的机电转换元件，该机电转换元件包括第一端和第二端。 该装置还包括支撑构件，其在机电转换元件的膨胀或收缩方向上固定到机电转换元件的第一端; 驱动构件，其在膨胀或收缩的方向上固定到所述机电转换元件的第二端; 与摩擦力与驱动构件接合的接合构件; 以及驱动所述机电转换元件的驱动电路。 驱动电路产生矩形波形驱动电压并将矩形波形驱动电压施加到机电转换元件，以使机电转换元件以不同的速度膨胀和收缩，从而相对于彼此移动支撑构件和接合构件。
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公开(公告)号：US06528926B2
公开(公告)日：2003-03-04
申请号：US10001428
申请日：2001-10-30
申请人： Yasuhiro Okamoto , Ryuichi Yoshida , Akira Kosaka
发明人： Yasuhiro Okamoto , Ryuichi Yoshida , Akira Kosaka
IPC分类号： H02N204
CPC分类号： H02N2/025
摘要： A driving apparatus enjoying improved performance through the prevention of fluctuations in the driving characteristic, wherein a driven member, which is frictionally engaged with a driving member fixed to an electromechanical conversion element, is driven based on driving that is not symmetrical as to the timing of extension and contraction of the electromechanical conversion element, and wherein the electromechanical conversion element is elastically held by the housing.
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公开(公告)号：US6114799A
公开(公告)日：2000-09-05
申请号：US20944
申请日：1998-02-09
申请人： Ryuichi Yoshida , Yasuhiro Okamoto
发明人： Ryuichi Yoshida , Yasuhiro Okamoto
摘要： A driving device with a long stroke and high speed driving ability. The device includes a base with a pair of parallel guides which are elastically installed thereon, and includes a drive unit in which there are arranged in series a driving member frictionally engaging the guides, a piezoelectric element for actuating the driving member in a direction in which the piezoelectric element expands and contracts, and a movable member, with a mass larger than the driving member, on which the driving member and the piezoelectric element are installed movably in the direction. When the piezoelectric element expands slowly with a pulse voltage applied thereto, the movable member moves with the driving member remaining stationary, relative to the guide. When the piezoelectric element contracts rapidly, the driving member slides relative to the guide with the movable member remaining stationary relative thereto. Thus, the drive unit is driven and moved along the guide.
摘要翻译： 具有长行程和高速驾驶能力的驾驶装置。 该装置包括一对具有弹性地安装在其上的平行引导件的底座，并且包括驱动单元，其中与导向件摩擦接合的驱动构件串联设置;驱动构件，用于沿着 压电元件膨胀和收缩，具有大于驱动构件的质量的可移动构件，驱动构件和压电元件在该方向上可移动地安装在驱动构件上。 当压电元件以施加脉冲电压的方式缓慢地膨胀时，可移动部件相对于引导件保持静止而移动。 当压电元件快速收缩时，驱动构件相对于导向件滑动，其中可动构件相对于其保持静止。 因此，驱动单元被驱动并沿着引导件移动。
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公开(公告)号：US06727635B2
公开(公告)日：2004-04-27
申请号：US09948699
申请日：2001-09-10
IPC分类号： H01L4108
摘要： A smooth impact drive mechanism utilizing an electromechanical conversion element, in which a preheating voltage to preheat the electromechanical conversion element is impressed thereto before the impression of a drive voltage to the electromechanical conversion element, in order to realize stable drive characteristics by reducing fluctuation in the speed of the moving unit. In addition, drive parameters are changed in accordance with the temperature of the electromechanical conversion element. Furthermore, drive parameters are changed in accordance with the moving speed of the moving unit.
摘要翻译： 一种利用机电转换元件的平滑冲击驱动机构，其中在机电转换元件的驱动电压的压印之前，将机电转换元件预热的预热电压施加到机电转换元件，以便通过减小机电转换元件的波动来实现稳定的驱动特性 移动单元的速度。 此外，驱动参数根据机电转换元件的温度而改变。 此外，驱动参数根据移动单元的移动速度而改变。
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公开(公告)号：US06188161B1
公开(公告)日：2001-02-13
申请号：US09088636
申请日：1998-06-02
申请人： Ryuichi Yoshida , Yasuhiro Okamoto
发明人： Ryuichi Yoshida , Yasuhiro Okamoto
IPC分类号： H01L4108
摘要： A driving apparatus includes an electromechanical transducer that is connected to a drive pulse generating means and that expands and contracts, a driven member that is connected to one end of the transducer, a friction member that is connected to the other end of the transducer and a guide unit that is in frictional contact with the friction member. The friction member has an elastic deforming mechanism that elastically presses against and comes into frictional contact with the guide unit, and the elastic deforming mechanism is constructed such that its elastic deformation stress vector perpendicularly crosses the directions of expansion and contraction of the transducer.
摘要翻译： 一种驱动装置，包括连接到驱动脉冲产生装置的机电换能器，并且其连接到换能器的一端的被驱动部件膨胀和收缩;连接到换能器的另一端的摩擦件， 与摩擦构件摩擦接触的导向单元。 摩擦构件具有弹性变形机构，弹性变形机构弹性地按压并与引导单元摩擦接触，并且弹性变形机构被构造成使得其弹性变形应力矢量垂直于穿过换能器的膨胀和收缩方向。
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7.发明授权
公开(公告)号：US6147434A
公开(公告)日：2000-11-14
申请号：US59147
申请日：1998-04-13
摘要： A drive device using a piezoelectric transducer for correcting a shift of a position of a drive system based on a change in an environmental state such as environmental temperature, in which a drive member coupled to the piezoelectric transducer is driven by causing displacements having different speeds by applying drive pulses of saw tooth waves to the piezoelectric transducer thereby moving a slider block frictionally coupled to the drive member, an amount of a shift of a position of the slider block based on the change in the environmental temperature is previously stored to a memory, when a change in temperature is detected by a temperature sensor, the amount of the shift of the position of the slider block is calculated in accordance with the change in temperature and the shift of the position of the slider block is corrected by driving the piezoelectric transducer in a direction of correcting the shift amount by driving a fine adjustment circuit.
摘要翻译： 一种使用压电传感器的驱动装置，其基于环境温度的变化来校正驱动系统的位置的偏移，其中通过使具有不同速度的位移由与压电换能器连接的驱动构件 将锯齿波的驱动脉冲施加到压电换能器，从而移动摩擦联接到驱动构件的滑动块，基于环境温度的变化将滑动块的位置的偏移量预先存储到存储器中， 当通过温度传感器检测到温度变化时，根据温度的变化来计算滑块的位置的偏移量，并且通过驱动压电换能器来校正滑动块的位置的移动 在通过驱动微调电路来校正移动量的方向上。
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8.发明授权Drive device using electromechanical transducer and an apparatus employing the drive device 失效使用机电换能器的驱动装置和采用驱动装置的装置
公开(公告)号：US5969464A
公开(公告)日：1999-10-19
申请号：US840825
申请日：1997-04-16
摘要： A drive device which repeats charging and discharging at different velocities by applying drive pulses to a piezoelectric transducer, causes vibrations with different velocities in the piezoelectric transducer to cause contraction and expansion displacements in a driving member fixedly coupled with the piezoelectric transducer for moving a member frictionally coupled to the driving member. In order to provide stable driving force, stable driving velocity and precise movement, a piezoelectric transducer constituted by stacking a plurality of unit elements is divided into a plurality of blocks having different numbers of lamination layers for driving. A change in impedance by the division is compensated by a compensation circuit, or a plurality of driving circuits corresponding to the impedance are provided and a block and a driving circuit of the piezoelectric transducer are selected in accordance with the driving velocity and moving distance for driving.
摘要翻译： 通过向压电换能器施加驱动脉冲来重复不同速度的充电和放电的驱动装置在压电换能器中引起不同速度的振动，从而在与压电换能器固定耦合的驱动构件中引起收缩和膨胀位移，以摩擦地移动构件 耦合到驱动构件。 为了提供稳定的驱动力，稳定的驱动速度和精确的运动，将由多个单元组成的压电换能器分成多个具有不同层压层的驱动块。 通过补偿电路来补偿由除法产生的阻抗的变化，或者提供与阻抗相对应的多个驱动电路，并根据驱动速度和驱动移动距离来选择压电换能器的块和驱动电路 。
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9.发明授权Actuator using electromechanical transducer capable of being used in high temperature and high humidity environment and apparatus having the same 失效使用能够在高温高湿环境下使用的机电换能器的致动器和具有该致动器的装置公开(公告)号：US06211602B1
公开(公告)日：2001-04-03
申请号：US09103309
申请日：1998-06-23
IPC分类号： H02N200
CPC分类号： H01L41/0533 , H02N2/025
摘要： An actuator using an electromechanical transducer capable of maintaining stable driving function even under a severe environment of high temperature and/or high humidity, or the like, and an apparatus mounted with the actuator. The actuator are disclosed is constituted to move a slider block frictionally coupled to a drive shaft in a predetermined direction by reciprocating oscillation having different speeds of the drive shaft driven by elongation and contraction displacements of a piezoelectric element and the piezoelectric element, a portion where the piezoelectric element is coupled to the drive shaft and a portion where the piezoelectric element is coupled to a frame is sealed by silicone resin, fluorinated resin or the like to thereby protect them from the high temperature and/or high humidity environment.
摘要翻译： 即使在高温和/或高湿度恶劣环境等下也能够保持稳定的驱动功能的机电换能器的致动器以及安装有致动器的装置。 公开的致动器构造成通过由压电元件和压电元件的伸长和收缩位移驱动的驱动轴的不同速度的往复振动来移动在预定方向上摩擦地联接到驱动轴的滑动块，其中 压电元件耦合到驱动轴，并且压电元件联接到框架的部分被硅树脂，氟化树脂等密封，从而保护它们免受高温和/或高湿度环境的影响。
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公开(公告)号：US6153963A
公开(公告)日：2000-11-28
申请号：US189077
申请日：1998-11-09
CPC分类号： H02N2/025
摘要： A drive unit 20, comprising a moving body 24 and a friction drive member 26 fixedly attached at each end of a piezoelectric element 22 in the layer direction, is disposed between a pair of fixed friction members 14 having a plurality of divided contact parts 15 divided by notches 14s formed at equal spacing along the movement path of the friction drive member 26. The divided contact parts 15 are arrayed so as to be slightly inserted into the movement path of the friction drive member 26, and become elastically deformed when in contact with the friction drive member 26 so as to exert a force on friction drive member 26 in reaction thereto. This exerted force remains uniform regardless of the relative position of the friction drive member 26.
摘要翻译： 驱动单元20包括在层压方向上固定地安装在压电元件22的每一端的移动体24和摩擦驱动构件26，所述驱动单元被布置在具有多个分开的接触部分15的一对固定摩擦件14之间 通过沿着摩擦驱动构件26的移动路径以相等间隔形成的凹口14s。分开的接触部分15被排列成稍微插入到摩擦驱动构件26的移动路径中，并且当与摩擦驱动构件26接触时变得弹性变形 摩擦驱动构件26，以便在摩擦驱动构件26上产生作用力。 无论摩擦驱动构件26的相对位置如何，该施加的力保持均匀。
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