公开(公告)号：US08192637B2

公开(公告)日：2012-06-05

申请号：US12388573

申请日：2009-02-19

申请人： Ryuta Washiya ,  Takashi Ando ,  Masahiko Ogino ,  Akihiro Miyauchi

发明人： Ryuta Washiya ,  Takashi Ando ,  Masahiko Ogino ,  Akihiro Miyauchi

IPC分类号： B44C1/22

CPC分类号： B29C35/0888 ,  B29C37/0053 ,  B29C2035/0827 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B7/263

摘要： A method of imprinting a microstructure comprising: contacting a stamper comprising a pattern layer with the microstructure of the order of from micrometers to nanometers in one face of the pattern layer and a substrate supporting the pattern layer with an imprinting member having a deformable layer to which the microstructure is imprinted, wherein the pattern layer is supported on a round surface having a prescribed radius of curvature of the substrate, the center of the round surface protruding towards the rear face of the pattern layer; causing the deformable layer on the imprinting member; and separating the stamper from the cured deformable layer.

摘要翻译： 一种压印微结构的方法，包括：将包含图案层的压模与图案层的一个表面中的微米级至数毫米级的微结构接触;以及支撑图案层的基板，其具有可变形层的压印构件， 印刷微结构，其中图案层被支撑在具有规定的基底曲率半径的圆形表面上，圆形表面的中心朝向图案层的背面突出; 使压印构件上的可变形层产生; 以及将所述压模与所述固化的可变形层分离。

公开(公告)号：US20090243126A1

公开(公告)日：2009-10-01

申请号：US12388573

申请日：2009-02-19

申请人： Ryuta Washiya ,  Takashi Ando ,  Masahiko Ogino ,  Akihiro Miyauchi

发明人： Ryuta Washiya ,  Takashi Ando ,  Masahiko Ogino ,  Akihiro Miyauchi

IPC分类号： G11B3/00 ,  B29C59/16

CPC分类号： B29C35/0888 ,  B29C37/0053 ,  B29C2035/0827 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B7/263

摘要： A method of imprinting a microstructure comprising: contacting a stamper comprising a pattern layer with the microstructure of the order of from micrometers to nanometers in one face of the pattern layer and a substrate supporting the pattern layer with an imprinting member having a deformable layer to which the microstructure is imprinted, wherein the pattern layer is supported on a round surface having a prescribed radius of curvature of the substrate, the center of the round surface protruding towards the rear face of the pattern layer; causing the deformable layer on the imprinting member; and separating the stamper from the cured deformable layer.

摘要翻译： 一种压印微结构的方法，包括：将包含图案层的压模与图案层的一个表面中的微米级至数毫米级的微结构接触;以及支撑图案层的基板，其具有可变形层的压印构件， 印刷微结构，其中图案层被支撑在具有规定的基底曲率半径的圆形表面上，圆形表面的中心朝向图案层的背面突出; 使压印构件上的可变形层产生; 以及将所述压模与所述固化的可变形层分离。

公开(公告)号：US20080229948A1

公开(公告)日：2008-09-25

申请号：US12019839

申请日：2008-01-25

申请人： Ryuta Washiya ,  Takashi Ando ,  Masahiko Ogino ,  Hideaki Kataho ,  Akihiro Miyauchi ,  Kosuke Kuwabara

发明人： Ryuta Washiya ,  Takashi Ando ,  Masahiko Ogino ,  Hideaki Kataho ,  Akihiro Miyauchi ,  Kosuke Kuwabara

IPC分类号： B41F1/40

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprint device transfers a micropattern created on a stamper onto a material to be transferred, by bringing the stamper and the material to be transferred into contact with each other. The imprint device has a flow passage for discharging a fluid to a rear surface of the stamper or the material to be transferred, to thereby bend the stamper or the material to be transferred.

摘要翻译： 压印装置通过使压模和被转印材料彼此接触来将形成在压模上的微图案转印到待转印的材料上。 压印装置具有用于将流体排放到压模的后表面或待转印的材料的流动通道，从而弯曲压模或要转印的材料。

公开(公告)号：US20100189836A1

公开(公告)日：2010-07-29

申请号：US12692135

申请日：2010-01-22

申请人： Ryuta Washiya ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

发明人： Ryuta Washiya ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

IPC分类号： B29C59/02

CPC分类号： G11B5/82 ,  B29C43/021 ,  B29C2043/025 ,  B29C2043/3411 ,  B29C2043/3488 ,  B29C2043/3602 ,  B29C2043/3634 ,  B29C2043/5038 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/743 ,  G11B7/263

摘要： In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.

摘要翻译： 在微图案转印装置中，形成有精细凹凸图案的压模与要转印的材料接触，压模上的精细凹入图案被转印到待转印材料的表面上。 微图案转印装置包括保持待转印材料的外周部分的保持机构。 保持机构保持要被转印的材料，使得被转印材料和压模之间的距离基本上等于或短于保持机构和压模之间的距离。

公开(公告)号：US08186992B2

公开(公告)日：2012-05-29

申请号：US12692135

申请日：2010-01-22

申请人： Ryuta Washiya ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

发明人： Ryuta Washiya ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

IPC分类号： B29C59/00

CPC分类号： G11B5/82 ,  B29C43/021 ,  B29C2043/025 ,  B29C2043/3411 ,  B29C2043/3488 ,  B29C2043/3602 ,  B29C2043/3634 ,  B29C2043/5038 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/743 ,  G11B7/263

摘要： In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.

摘要翻译： 在微图案转印装置中，形成有精细凹凸图案的压模与要转印的材料接触，压模上的精细凹入图案被转印到待转印材料的表面上。 微图案转印装置包括保持待转印材料的外周部分的保持机构。 保持机构保持要被转印的材料，使得被转印材料和压模之间的距离基本上等于或短于保持机构和压模之间的距离。

公开(公告)号：US08770965B2

公开(公告)日：2014-07-08

申请号：US13370413

申请日：2012-02-10

申请人： Ryuta Washiya ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

发明人： Ryuta Washiya ,  Masahiko Ogino ,  Noritake Shizawa ,  Kyoichi Mori ,  Akihiro Miyauchi

IPC分类号： B29C35/08

CPC分类号： G03F7/0002 ,  B29C33/3878 ,  B82Y10/00 ,  B82Y40/00

摘要： A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.

摘要翻译： 微结构转印装置的特征在于，该装置包括由用第一波长的光固化的第一光固化树脂组合物制成的压模和发射长于第一波长的第二波长的光的光源。 将微结构转移到提供有第二光固化树脂组合物的印模受体中，该第二光固化树脂组合物可用由光源发出的第二波长的光固化。

公开(公告)号：US20130011632A1

公开(公告)日：2013-01-10

申请号：US13519589

申请日：2010-12-22

申请人： Masahiko Ogino ,  Susumu Komoriya ,  Akihiro Miyauchi ,  Ryuta Washiya ,  Kyoichi Mori ,  Noritake Shizawa

发明人： Masahiko Ogino ,  Susumu Komoriya ,  Akihiro Miyauchi ,  Ryuta Washiya ,  Kyoichi Mori ,  Noritake Shizawa

IPC分类号： B05D1/36 ,  B44C1/22 ,  B32B3/10

CPC分类号： C08F283/02 ,  B82Y10/00 ,  B82Y40/00 ,  C09D4/06 ,  G03F7/0002 ,  G03F7/027 ,  G03F7/038 ,  G03F7/0388 ,  Y10T428/24802 ,  C08F220/30 ,  C08F220/40 ,  C08F222/1006

摘要： Provided is a method for producing a microfine structure comprising the steps of: forming a resin film by applying a liquid polymerizable resin composition containing a high molecular weight component, a low molecular weight component and a reactive dilution component to an adhesion promoting layer formed on a substrate; imprinting a mold with an extremely fine convex concave pattern onto the resin film; and transferring the convex concave pattern to the resin film. Herein, components of the adhesion promoting layer, the high molecular weight component, the low molecular weight component and the reactive dilution component respectively have cross-linking reactive functional groups which react with each other.

摘要翻译： 提供一种微细结构体的制造方法，其特征在于，包括以下工序：通过将含有高分子量成分，低分子量成分和反应性稀释成分的液体聚合性树脂组合物涂布在形成于 基质; 将具有非常细的凸凹图案的模具印刷到树脂膜上; 并将凸凹图案转印到树脂膜上。 这里，粘合促进层，高分子量组分，低分子量组分和反应性稀释组分的组分分别具有彼此反应的交联反应性官能团。

公开(公告)号：US20100062098A1

公开(公告)日：2010-03-11

申请号：US12543595

申请日：2009-08-19

申请人： Takashi Ando ,  Nobuaki Kitano ,  Akihiro Miyauchi ,  Ryuta Washiya ,  Kazumasa Ohsono ,  Akihito Hongo ,  Tsuneo Shiota

发明人： Takashi Ando ,  Nobuaki Kitano ,  Akihiro Miyauchi ,  Ryuta Washiya ,  Kazumasa Ohsono ,  Akihito Hongo ,  Tsuneo Shiota

IPC分类号： B29C59/02 ,  B44C3/02 ,  B44C1/22

CPC分类号： B29C33/38 ,  B29C35/0888 ,  B29C37/0053 ,  B29C2035/0827 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： The present invention can provide a stamper for minute structure transfer to be excellent in durability. The present invention is characterized by which a minute pattern as formed in one side of a substrate comes in contact with a material to be transferred and the minute pattern is transferred on a resin layer of a surface of the material to be transferred. At least one layer of a thin film is mounted on at least one side of both surfaces of the substrate, the substrate and the thin film are different in a coefficient of linear expansion each other, and the substrate is curved to swell up to be convex in the side of the minute pattern by an internal stress generated in the thin film.

摘要翻译： 本发明可以提供用于微小结构转印的压模以使其耐久性优异。 本发明的特征在于，在基板的一侧形成的微小图案与待转印的材料接触，并且将微小图案转印到待转印材料的表面的树脂层上。 至少一层薄膜安装在基板的两个表面的至少一侧上，基板和薄膜的线性膨胀系数彼此不同，并且基板弯曲以膨胀到凸起 在微细图案的一侧由薄膜中产生的内部应力。