公开(公告)号：US11056326B2

公开(公告)日：2021-07-06

申请号：US16068803

申请日：2017-02-15

Applicant: Saes Getters S.p.A.

Inventor： Tommaso Porcelli ,  Fabrizio Siviero ,  Alessandro Gallitognotta

IPC: H01J41/20 ,  F04B37/04 ,  C23C14/16 ,  F04B37/14

Abstract: The present invention relates to cathodes electrodes compositions suitable to provide a pumping mechanism which exhibits an extremely high pumping speed and capacity of noble gas suitable to be used in several vacuum devices as for example sputter ion vacuum pumping systems comprising them as active element.

公开(公告)号：US09685308B2

公开(公告)日：2017-06-20

申请号：US15308057

申请日：2015-06-24

Applicant: SAES GETTERS S.P.A.

Inventor： Antonio Bonucci ,  Paolo Manini ,  Fabrizio Siviero ,  Piergiorgio Sonato

IPC: F04B37/02 ,  H01J41/12 ,  F04B37/14 ,  H01J41/20

CPC classification number: H01J41/12 ,  F04B37/02 ,  F04B37/14 ,  H01J41/20

Abstract: Getter pumping system particularly useful for linear accelerators or more generally high-volume environments, wherein a plurality of getter cartridges (100, 100′, 100″, . . . 100n) having a linear support (110, 110′, 110″, . . . 110n) and a plurality of linear heaters (120, 120′, . . . 120n) are connected in a high-density configuration to a wall (11) that has a surface area of at least 0.5 m2.