MULTI-STAGE VACUUM EQUIPMENT WITH STAGES SEPARATION CONTROLLED BY SMA ACTUATOR

    公开(公告)号:US20210249217A1

    公开(公告)日:2021-08-12

    申请号:US16973167

    申请日:2019-07-19

    发明人: Marco URBANO

    IPC分类号: H01J37/09 H01J37/28

    摘要: The present invention relates to a multi-stage vacuum equipment, preferably a two-stage equipment, whose normal operation requires different pressures to be set, wherein the pressure variation may be achieved by a Shape Memory Alloy (SMA) wire movement of a suitable element. The invention further discloses a method for operating said multi-stage vacuum equipment controlled by a SMA actuator.