公开(公告)号：US20160084922A1

公开(公告)日：2016-03-24

申请号：US14662891

申请日：2015-03-19

Applicant: SAGATEK CO.,LTD.

Inventor： Kuei-Ann WEN ,  Tai-Wei CHIANG

IPC: G01R33/028 ,  G01R33/02

CPC classification number: G01R33/0286 ,  G01R33/0206

Abstract: A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.

Abstract translation: 磁场传感器，包括悬挂质量块，一组Y方向位移传感器，一组Z方向位移传感器和电源; 其中质量块，Y方向位移传感器和Z方向位移传感器分别包括多个金属层和两个金属层之间的介电层。 在质量块中，对应于Y方向位移传感器的区域和对应于Z方向位移传感器的区域分别包括通过通孔连接的至少两个金属层。 Y方向位移传感器包括两个电极，每个电极包括通过通孔连接的至少两个金属层; Z方向位移传感器包括两个电极，每个电极包括通过通孔连接的至少两个金属层; 并且电源提供在X或Y方向上选择性地流过质量块的电流。

公开(公告)号：US20160084873A1

公开(公告)日：2016-03-24

申请号：US14724417

申请日：2015-05-28

Applicant: SAGATEK CO., LTD.

Inventor： Kuei-Ann WEN ,  Tai-Wei CHIANG

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18

Abstract: A three-axis accelerometer to provide measurement of acceleration in three axes, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a group of X direction displacement sensors; wherein the Y direction displacement sensors, the Z direction displacement sensors and the X direction displacement sensors are respectively arranged adjacent to the mass block; the mass block and the displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, regions corresponding to the Y, Z and X direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y, Z and X groups displacement sensors respectively comprise at least two metal layers connected by a via.

Abstract translation: 一种用于提供三轴加速度测量的三轴加速度计，包括基板，悬挂在基板中的悬挂质量块，一组Y方向位移传感器，一组Z方向位移传感器和一组X方向位移传感器 ; 其中Y方向位移传感器，Z方向位移传感器和X方向位移传感器分别布置在质量块附近; 质量块和位移传感器分别包括多个金属层和两个金属层之间的介电层。 在质量块中，对应于Y，Z和X方向位移传感器的区域分别包括通过通孔连接的至少两个金属层。 Y，Z和X组位移传感器分别包括通过通孔连接的至少两个金属层。