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公开(公告)号:US20170373091A1
公开(公告)日:2017-12-28
申请号:US15436066
申请日:2017-02-17
发明人: JI HUN LIM , Joon Seok Park
IPC分类号: H01L27/12 , H01L29/66 , H01L29/423 , H01L29/786
CPC分类号: H01L27/124 , H01L27/1225 , H01L27/1248 , H01L27/1259 , H01L29/41733 , H01L29/42356 , H01L29/42384 , H01L29/66765 , H01L29/66969 , H01L29/78618 , H01L29/78669 , H01L29/7869
摘要: A thin film transistor array panel according to an exemplary embodiment of the present invention includes: a substrate; a gate electrode on the substrate; a gate insulating layer on the gate electrode; a semiconductor member including a channel region overlapping the gate electrode with the gate insulating layer interposed therebetween, and a source region and a drain region that face each other with the channel region interposed therebetween; an interlayer insulating layer on the semiconductor member; a data conductor on the interlayer insulating layer; and a passivation layer on the data conductor, wherein the interlayer insulating layer has a first hole on the channel region.
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公开(公告)号:US20190139992A1
公开(公告)日:2019-05-09
申请号:US16241247
申请日:2019-01-07
发明人: JI HUN LIM , Joon Seok Park
IPC分类号: H01L27/12 , H01L29/786 , H01L29/66 , H01L29/417 , H01L29/423
CPC分类号: H01L27/124 , H01L27/1225 , H01L27/1248 , H01L27/1259 , H01L27/1288 , H01L29/41733 , H01L29/42356 , H01L29/42384 , H01L29/66765 , H01L29/66969 , H01L29/78618 , H01L29/78621 , H01L29/78669 , H01L29/78678 , H01L29/7869 , H01L29/78696
摘要: A thin film transistor array panel according to an exemplary embodiment of the present invention includes: a substrate; a gate electrode on the substrate; a gate insulating layer on the gate electrode; a semiconductor member including a channel region overlapping the gate electrode with the gate insulating layer interposed therebetween, and a source region and a drain region that face each other with the channel region interposed therebetween; an interlayer insulating layer on the semiconductor member; a data conductor on the interlayer insulating layer; and a passivation layer on the data conductor, wherein the interlayer insulating layer has a first hole on the channel region.
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