公开(公告)号：US20230128109A1

公开(公告)日：2023-04-27

申请号：US17715553

申请日：2022-04-07

Applicant: Samsung Display Co., Ltd.

Inventor： Dongmin Lee ,  Jaewoo Jeong ,  Janghyun Kim ,  Jongoh Seo ,  Byungsoo So

IPC: H01L27/32 ,  H01L51/56

Abstract: A display apparatus includes a substrate, a gate electrode overlapping the substrate, and a semiconductor layer positioned between the substrate and the gate electrode. The semiconductor layer includes a first layer and a second layer positioned between the first layer and the gate electrode. A hydrogen content of the first layer is greater than a hydrogen content of the second layer.

公开(公告)号：US11171000B2

公开(公告)日：2021-11-09

申请号：US16864812

申请日：2020-05-01

Applicant: Samsung Display Co., LTD.

Inventor： Jongoh Seo ,  Jonghoon Choi ,  Ji-Hwan Kim ,  Byung Soo So ,  Dong-Min Lee ,  Dong-Sung Lee

IPC: H01L21/02

Abstract: A laser crystallization system includes a transfer part that transfers a substrate on which an amorphous silicon thin film is deposited into a chamber, a laser irradiation part that irradiates an excimer laser to the substrate for crystallization of the amorphous silicon thin film in the chamber, a stage that supports the substrate in the chamber, a measuring part that measures a light transmittance value of the substrate, and a controller that controls the laser irradiation part to irradiate the excimer laser to the substrate when the light transmittance value is equal to or lower than a reference transmittance value and controls the laser irradiation part not to irradiate the excimer laser to the substrate when the light transmittance value is higher than the reference transmittance value.

公开(公告)号：US11380544B2

公开(公告)日：2022-07-05

申请号：US16997454

申请日：2020-08-19

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Min Lee ,  Ji-Hwan Kim ,  Jongoh Seo ,  Byung Soo So

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/268

Abstract: A laser annealing device includes a stage, a laser generator, and a reflective member. The stage supports a substrate with a thin film formed thereon to be processed, and may be moved in a first direction at a set or predetermined speed. The laser generator irradiates a first area of the thin film with a laser beam while the stage is moved. The reflective member reflects a part of the laser beam, which is reflected from the first area of the thin film, to a second area of the thin film. The first area and the second area are spaced apart from each other.

公开(公告)号：US11145703B2

公开(公告)日：2021-10-12

申请号：US16677042

申请日：2019-11-07

Applicant: Samsung Display Co., LTD.

Inventor： Jongoh Seo ,  In Cheol Ko ,  Byung Soo So ,  Dong-min Lee ,  Dong-Sung Lee

IPC: H01L27/15 ,  H01L27/32 ,  H01L51/56 ,  H01L51/00

Abstract: A display device may include a substrate, a first layer on the substrate, the first layer including a first portion having a first thickness and a second portion having a second thickness greater than the first thickness, a second layer on the first layer, an active pattern on the second layer, the active pattern overlapping only the first portion of the first layer, a gate electrode on the active pattern, a source electrode and a drain electrode on the gate electrode and connected to the active pattern, a first electrode connected to one of the source electrode and the drain electrode, a pixel defining layer on the first electrode, the pixel defining layer having an opening portion exposing at least a portion of the first electrode, an emission layer in the opening portion on the first electrode, and a second electrode on the emission layer.

公开(公告)号：US20210091201A1

公开(公告)日：2021-03-25

申请号：US17113777

申请日：2020-12-07

Applicant: Samsung Display Co., Ltd.

Inventor： Dongsung Lee ,  Cheolho Park ,  Jongoh Seo ,  Byungsoo So ,  Dongmin Lee

IPC: H01L29/45 ,  H01L51/10 ,  H01L29/40 ,  H01L29/49 ,  H01L27/12

Abstract: A display device includes: a thin-film transistor on a substrate, the thin-film transistor including on the substrate: an active layer; a gate electrode overlapping the active layer; a source electrode and a drain electrode electrically connected to the active layer and including a first metal material; and a first capping layer which covers each of the source electrode and the drain electrode, the first capping layer having a Young's modulus greater than that of the first metal material.

公开(公告)号：US20240099078A1

公开(公告)日：2024-03-21

申请号：US18243004

申请日：2023-09-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jongjun Baek ,  Jongoh Seo

IPC: H10K59/124 ,  H10K59/12

CPC classification number: H10K59/124 ,  H10K59/1201

Abstract: A display apparatus includes: a substrate; a buffer layer on the substrate; a first semiconductor layer on the buffer layer; a first gate insulating layer on the first semiconductor layer; a first metal layer on the first gate insulating layer; a second gate insulating layer on the first metal layer; a second metal layer on the second gate insulating layer; a first interlayer insulating layer on the second metal layer; and a first dopant doped in at least one of the second gate insulating layer or the first interlayer insulating layer.

公开(公告)号：US11610919B2

公开(公告)日：2023-03-21

申请号：US17240847

申请日：2021-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： Jonghoon Choi ,  Jongoh Seo ,  Ji-Hwan Kim ,  Jongjun Baek ,  Byung Soo So

IPC: H01L27/12

Abstract: A display device may include a substrate, a buffer layer on the substrate, a first active pattern on the buffer layer, the first active pattern having a first thickness, a second active pattern on the buffer layer spaced from the first active pattern and having a second thickness smaller than the first thickness, a first gate insulating layer on the first active pattern and the second active pattern, a first gate electrode on the first gate insulating layer, the first gate electrode overlapping the first active pattern, and a second gate electrode on the first gate insulating layer, the second gate electrode overlapping the second active pattern.

公开(公告)号：US10910406B2

公开(公告)日：2021-02-02

申请号：US16381495

申请日：2019-04-11

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaewoo Jeong ,  Taewook Kang ,  Jongoh Seo ,  Byungsoo So

IPC: H01L27/12

Abstract: A display apparatus includes a substrate including a polymer resin. A portion of the substrate including an upper surface of the substrate is doped with 1×1020 to 1×1023 dopants per 1 cm3. A barrier layer is positioned above the upper surface of the substrate. A buffer layer is positioned above the barrier layer. A thin film transistor is positioned above the buffer layer. A display device is electrically connected to the thin film transistor.

公开(公告)号：US20190115440A1

公开(公告)日：2019-04-18

申请号：US16157155

申请日：2018-10-11

Applicant: Samsung Display Co., Ltd.

Inventor： Dongsung Lee ,  Cheolho Park ,  Jongoh Seo ,  Byungsoo So ,  Dongmin Lee

IPC: H01L29/45 ,  H01L51/10 ,  H01L27/12 ,  H01L29/40 ,  H01L29/49

Abstract: A display device includes: a thin-film transistor on a substrate, the thin-film transistor including on the substrate: an active layer; a gate electrode overlapping the active layer; a source electrode and a drain electrode electrically connected to the active layer and including a first metal material; and a first capping layer which covers each of the source electrode and the drain electrode, the first capping layer having a Young's modulus greater than that of the first metal material.

公开(公告)号：US12193271B2

公开(公告)日：2025-01-07

申请号：US17715553

申请日：2022-04-07

Applicant: Samsung Display Co., Ltd.

Inventor： Dongmin Lee ,  Jaewoo Jeong ,  Janghyun Kim ,  Jongoh Seo ,  Byungsoo So

IPC: H10K59/121 ,  H10K71/00 ,  H01L27/12 ,  H01L29/66 ,  H01L29/786 ,  H10K59/12

Abstract: A display apparatus includes a substrate, a gate electrode overlapping the substrate, and a semiconductor layer positioned between the substrate and the gate electrode. The semiconductor layer includes a first layer and a second layer positioned between the first layer and the gate electrode. A hydrogen content of the first layer is greater than a hydrogen content of the second layer.