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1.发明授权Laser beam irradiation apparatus and manufacturing method of organic light emitting display apparatus using the same 有权激光束照射装置及使用其的有机发光显示装置的制造方法公开(公告)号：US09515294B2
公开(公告)日：2016-12-06
申请号：US14510322
申请日：2014-10-09
发明人： Gyoo-Wan Han , Ku-Hyun Kang , Hae-Sook Lee , Jin-Hong Jeun , Kyoung-Seok Cho
CPC分类号： G02B26/10 , G02B13/0005 , G02B27/0927 , G02B27/0988 , G02B27/10 , G02B27/106 , G02B27/144 , G02F1/113 , H01L27/3244 , H01L27/3248 , H01L51/5228 , H01L51/56 , H01L2227/323
摘要： A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.
摘要翻译： 激光束照射装置包括激光源，用于控制由激光源产生的光的能量的控制器，用于调节通过控制器的光的形状的第一光学系统，用于调节光的方向的扫描仪， 已经通过第一光学系统和用于减少已经通过扫描仪的光束的F-theta透镜。
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公开(公告)号：US11693232B2
公开(公告)日：2023-07-04
申请号：US15364594
申请日：2016-11-30
发明人： Gyoo-Wan Han , Ku-Hyun Kang , Hae-Sook Lee , Jin-Hong Jeun , Kyoung-Seok Cho
IPC分类号： G02B26/10 , G02B27/10 , G02B27/14 , G02B27/09 , H10K50/824 , H10K71/00 , G02F1/11 , G02B13/00 , H10K59/12 , H10K59/123
CPC分类号： G02B26/10 , G02B27/0927 , G02B27/0988 , G02B27/10 , G02B27/106 , G02B27/144 , G02F1/113 , H10K50/824 , H10K71/00 , G02B13/0005 , H10K59/12 , H10K59/1201 , H10K59/123
摘要： A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.
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