公开(公告)号：US09623648B2

公开(公告)日：2017-04-18

申请号：US14731537

申请日：2015-06-05

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Tae-Hwan Kim ,  Man-Hong Na ,  Jong-Hwan Lee

IPC: B32B38/10 ,  B32B43/00

CPC classification number: B32B43/006 ,  B32B38/10 ,  B32B2457/202 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1184 ,  Y10T156/1944 ,  Y10T156/1967 ,  Y10T156/1978 ,  Y10T156/1989

Abstract: A method of detaching a sub-substrate from a substrate includes providing a first sub-substrate attached to a first substrate having a rectangular shape with first and second sides extending in a first direction and third and fourth sides extending in a second direction crossing the first direction, inserting a separating member between the first sub-substrate and the first substrate to partially detach therebetween, attaching a plurality of pads arranged in a matrix pattern to the first sub-substrate, lifting first pads among the plurality of pads arranged in a third direction crossing the first and second directions, lifting second pads, at least two of the second pads being arranged in the second direction, and at least two of the second pads being arranged in the third direction, and lifting third pads arranged in the second direction.