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    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    1.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号：US20160380082A1

    公开(公告)日：2016-12-29

    申请号：US15138234

    申请日：2016-04-26

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： HYUN-KWAN YU ,  DONG-SUK SHIN ,  WOON-KI SHIN ,  CHEOL-WOO PARK ,  RYONG HA ,  HAN-JIN LIM

    IPC: H01L29/66 ,  H01L21/8234 ,  H01L21/02 ,  H01L29/06 ,  H01L21/3213

    CPC classification number: H01L29/66795 ,  H01L21/02068 ,  H01L21/32134 ,  H01L29/66545 ,  H01L29/7848

    Abstract: A method of manufacturing a semiconductor device includes forming an active fin extending longitudinally in a first direction along a surface of a substrate, forming a field insulating layer on the substrate, the field insulating layer covering a part of the active fin, forming a dummy gate electrode on the field insulating layer and the active fin, the dummy gate electrode extending in a second direction different from the first direction, forming a spacer on the sides of the dummy gate electrode, and removing the dummy gate electrode by a wet etching process that includes rinsing the dummy gate electrode intermittently during an etching away of the dummy gate electrode.

    Abstract translation: 一种制造半导体器件的方法包括：形成沿衬底表面沿第一方向纵向延伸的有效鳍，在衬底上形成场绝缘层，所述场绝缘层覆盖有源散热片的一部分，形成虚拟栅极 所述虚拟栅极电极沿与第一方向不同的第二方向延伸，在所述虚拟栅电极的侧面形成间隔物，并通过湿式蚀刻工艺除去所述伪栅电极， 包括在伪栅极电极的蚀刻离开期间间歇地冲洗虚拟栅电极。

    CLOCK MONITOR AND SYSTEM ON CHIP INCLUDING THE SAME
    2.
    发明申请
    CLOCK MONITOR AND SYSTEM ON CHIP INCLUDING THE SAME 有权
    时钟监视器和系统包括其中的芯片

    公开(公告)号：US20160065215A1

    公开(公告)日：2016-03-03

    申请号：US14692771

    申请日：2015-04-22

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： DONG-SUK SHIN ,  JI-YONG AHN ,  JANG-HYEON LEE

    IPC: H03K19/00 ,  H03L7/18 ,  H03K5/19

    CPC classification number: H03K19/0016 ,  H03K5/19 ,  H03L7/18

    Abstract: A system on chip includes a plurality of function blocks configured to perform predetermined functions, respectively, a clock control unit configured to generate a plurality of operating clock signals that are provided to the plurality of function blocks, respectively, a clock monitor configured to monitor frequencies of the operating clock signals to generate an interrupt signal, and a processor configured to control the frequencies of the operating clock signals based on the interrupt signal. The clock monitor includes a selector configured to select one of the operating clock signals to provide a selected clock signal, a frequency detector configured to detect a frequency of the selected clock signal to provide a detection frequency, and an interrupt generator configured to generate the interrupt signal based on the detection frequency, where the interrupt signal indicates a frequency abnormality of the operating clock signal corresponding to the selected clock signal.

    Abstract translation: 一个片上系统分别包括多个功能块，分别执行预定的功能;时钟控制单元，被配置为产生分别提供给多个功能块的多个工作时钟信号，配置成监视频率的时钟监视器 的操作时钟信号以产生中断信号;以及处理器，被配置为基于所述中断信号来控制所述工作时钟信号的频率。 时钟监视器包括：选择器，被配置为选择一个操作时钟信号以提供所选择的时钟信号;频率检测器，被配置为检测所选择的时钟信号的频率以提供检测频率;以及中断发生器，被配置为产生中断 基于检测频率的信号，其中中断信号指示对应于所选择的时钟信号的操作时钟信号的频率异常。

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