公开(公告)号：US20250135591A1

公开(公告)日：2025-05-01

申请号：US18927195

申请日：2024-10-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyunchul KIM ,  Ohchel KWON ,  Daewoong CHOI ,  Hyunmo KANG ,  Jinhong PARK ,  Wooseok CHOE

IPC: B23Q3/08 ,  B23Q3/06

Abstract: A spin chuck includes an upper plate having an upper surface and a lower surface, the upper plate including a groove and a support pin on the upper surface of the upper plate, wherein the support pin is configured to support a substrate; an anti-slip plate below the upper plate, the anti-slip plate having an upper surface and a lower surface, wherein the anti-slip plate includes a first protrusion protruding in a vertical direction from the upper surface of the anti-slip plate toward the upper plate; and a lower plate below the anti-slip plate, the lower plate including a chucking pin configured to fix the substrate, wherein the lower plate has an upper surface and a lower surface, wherein the first protrusion of the anti-slip plate is coupled to the groove of the upper plate.

公开(公告)号：US20230046595A1

公开(公告)日：2023-02-16

申请号：US17854191

申请日：2022-06-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seohyun KIM ,  Ohchel KWON ,  Sangwoo KIM ,  Youngchan KIM ,  Hyunchul KIM ,  Hyunwoo NHO ,  Jaeseong RYU ,  Seungbu BAEK ,  Yongmyung JUN ,  Hyeongkwon JEONG ,  Daewoong CHOI

IPC: H01L21/67

Abstract: A supercritical fluid processing apparatus including a supercritical fluid supply module including a gas liquefier to liquefy a gas transferred from a gas supply and provide a liquefied fluid, a storage tank to change the liquefied fluid to a supercritical state and store a supercritical fluid, and an internal pipe connecting the gas liquefier to the storage tank; an exhaust fluid supply module including an exhaust fluid liquefier including a regeneration storage tank to collect a first exhaust fluid from the storage tank, and a refrigerant pipe to liquefy the first exhaust fluid in the regeneration storage tank and maintain the liquefied first exhaust fluid at a predetermined temperature/pressure; a first exhaust pipe to transfer the first exhaust fluid from the storage tank to the exhaust fluid liquefier; and a resupply pipe to resupply the first exhaust fluid collected and liquefied in the exhaust fluid liquefier to the storage tank.