公开(公告)号：US09397229B2

公开(公告)日：2016-07-19

申请号：US14057590

申请日：2013-10-18

Applicant: Samsung Electronics Co., Ltd. ,  Korea University Industrial & Academic Collaboration Foundation

Inventor： In Sang Song ,  Ho Soo Park ,  Duck Hwan Kim ,  Sang Uk Son ,  Jae Shik Shin ,  Jae-Sung Rieh ,  Byeong Kwon Ju ,  Dong Hoon Hwang

IPC: H01L29/82 ,  G01N29/02 ,  G01N29/036 ,  H01L29/78 ,  B81B3/00 ,  B82Y25/00 ,  H01L29/423 ,  H01L29/06

CPC classification number: H01L29/82 ,  B81B3/0078 ,  B81B2201/0271 ,  B82Y25/00 ,  G01N29/022 ,  G01N29/036 ,  H01L29/0673 ,  H01L29/42372 ,  H01L29/78 ,  Y10S977/762 ,  Y10S977/938

Abstract: A nano resonance apparatus includes a gate electrode configured to generate a magnetic field, and a nanowire connecting a source electrode to a drain electrode and configured to vibrate in the presence of the magnetic field. The nanowire includes a protruding portion extending in a direction of the gate electrode.

Abstract translation: 纳米共振装置包括被配置为产生磁场的栅电极和将源电极连接到漏极并且被配置为在存在磁场的情况下振动的纳米线。 纳米线包括在栅电极的方向上延伸的突出部分。

公开(公告)号：US20140203686A1

公开(公告)日：2014-07-24

申请号：US14073509

申请日：2013-11-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： In Sang Song ,  Ho Soo Park ,  Duck Hwan Kim ,  Chul Soo Kim ,  Sang Uk Son ,  Jae Shik Shin ,  Moon Chul Lee

IPC: H01L41/053 ,  H01L41/314

CPC classification number: H01L41/314 ,  H03H9/132 ,  H03H9/174 ,  H03H9/175

Abstract: Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.

Abstract translation: 提供一种谐振器及其制造方法。 谐振器可以包括设置在基板上的第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极，以及设置在第二电极上并具有不平坦表面的框架的控制层。

公开(公告)号：US20140110763A1

公开(公告)日：2014-04-24

申请号：US14057590

申请日：2013-10-18

Applicant: Korea University Industrial & Academic Collaboration Foundation ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： In Sang Song ,  Ho Soo Park ,  Duck Hwan Kim ,  Sang Uk Son ,  Jae Shik Shin ,  Jae-Sung Rieh ,  Byeong Kwon Ju ,  Dong Hoon Hwang

IPC: H01L29/82

CPC classification number: H01L29/82 ,  B81B3/0078 ,  B81B2201/0271 ,  B82Y25/00 ,  G01N29/022 ,  G01N29/036 ,  H01L29/0673 ,  H01L29/42372 ,  H01L29/78 ,  Y10S977/762 ,  Y10S977/938

Abstract: A nano resonance apparatus includes a gate electrode configured to generate a magnetic field, and a nanowire connecting a source electrode to a drain electrode and configured to vibrate in the presence of the magnetic field. The nanowire includes a protruding portion extending in a direction of the gate electrode.

Abstract translation: 纳米共振装置包括被配置为产生磁场的栅电极和将源电极连接到漏极并且被配置为在存在磁场的情况下振动的纳米线。 纳米线包括在栅电极的方向上延伸的突出部分。