公开(公告)号：US20230253227A1

公开(公告)日：2023-08-10

申请号：US17946727

申请日：2022-09-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seunggyu Kang ,  Jeonghun Lim ,  Youngwook Kim ,  Chuljun Park ,  Yongjun Ahn ,  Sangkyung Lee ,  Hyunwoo Lee

IPC: H01L21/677 ,  H01L21/67 ,  H02J50/12 ,  H02J50/90

CPC classification number: H01L21/67742 ,  H01L21/67259 ,  H02J50/12 ,  H02J50/90 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67294 ,  H01M10/486

Abstract: A substrate transfer system and method includes a mobile robot configured to handle a substrate carrier and comprising a power receiver; a mobile robot interface device configured to handle the substrate carrier and comprising a power feeder configured to supply an electromotive force to the power receiver of the mobile robot; at least one of: a first actuator configured to move the power feeder to adjust a distance between the power feeder and the power receiver and a second actuator configured to move the power receiver to adjust a distance between the power feeder and the power receiver; an identification tag disposed on any one of the mobile robot and the mobile robot interface device; a tag reader configured to recognize the identification tag; and a controller configured to control an operation of the mobile robot and to control an operation of the first and/or second actuator and the controller is further configured to control the first and/or second actuator to adjust the distance between the power feeder and the power receiver.

公开(公告)号：US12153016B2

公开(公告)日：2024-11-26

申请号：US17499479

申请日：2021-10-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dusik Bae ,  Euihyun Roh ,  Sangyoon Shin ,  Yongjun Ahn ,  Youngwook Kim ,  Mira Park ,  Hyunwoo Lee ,  Jeonghun Lim ,  Wonil Choi ,  Sojung Park ,  Jiwoong Shin ,  Sangkyung Lee ,  Dongchol Choi

IPC: G08B21/10 ,  G01N1/14 ,  G01N27/22 ,  G01N27/27 ,  G01N27/64 ,  H01L21/67

Abstract: A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.

公开(公告)号：US20240327136A1

公开(公告)日：2024-10-03

申请号：US18383656

申请日：2023-10-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minkyun LEE ,  Seunggyu Kang ,  Hyunjae Kang ,  Sangmin Kim ,  Youngwook Kim ,  Jaesung Byun ,  Yongjun Ahn ,  Yongjun Ahn ,  Hyunwoo Lee ,  Jeonghun Lim ,  Junhyuk Chang

IPC: B65G47/90 ,  H01L21/677 ,  H01L21/687

CPC classification number: B65G47/90 ,  H01L21/67712 ,  H01L21/67769 ,  H01L21/68707

Abstract: An apparatus includes an elevator, a plurality of storages, a plurality of first robots and a plurality of second robots. The elevator may elevate a vehicle containing a plurality of semiconductor device carriers to position the vehicle at each of a plurality of process floors. At least one of the plurality of storages may be provided at each of the plurality of process floors to store the plurality of semiconductor device carriers. At least one of the plurality of first robots may be provided at each of the plurality of process floors to transfer the vehicle between the elevator and a respective one of the plurality of process floors. At least one of the second robots may be provided at each of the plurality of process floors to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages.

公开(公告)号：US12103772B2

公开(公告)日：2024-10-01

申请号：US17847542

申请日：2022-06-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minji Kim ,  Sangmin Kim ,  Youngwook Kim ,  Ginam Park ,  Chuljun Park ,  Sanga Bang ,  Yongjun Ahn ,  Sangkyung Lee ,  Hyunwoo Lee ,  Jeonghun Lim

IPC: B65G1/04 ,  B65G49/06

CPC classification number: B65G1/0478 ,  B65G49/063 ,  B65G2201/0297

Abstract: A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.