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公开(公告)号：US11262649B2
公开(公告)日：2022-03-01
申请号：US16901466
申请日：2020-06-15
发明人： Ginam Park , Sangmin Kim , Jongsam Kim , Hongjin Kim , Chuljun Park , Yongjun Ahn , Sangkyung Lee , Junyong Lee , Taijo Jeon , Kyubum Cho
IPC分类号： G03F1/66 , B01D46/00 , B01D46/44 , F25B21/02 , F24F3/14 , H05B1/02 , F24H3/04 , B01D46/42 , B01D50/00
摘要： An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.
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公开(公告)号：US12033879B2
公开(公告)日：2024-07-09
申请号：US17683769
申请日：2022-03-01
发明人： Sangmin Kim , Youngwook Kim , Ginam Park , Chuljun Park , Jeongjae Bang , Jaesung Byun , Yongjun Ahn , Sangkyung Lee , Hyunwoo Lee , Junhyuk Chang
IPC分类号： H01L21/677 , B65G1/06 , B65G1/127 , H01L21/673
CPC分类号： H01L21/67766 , B65G1/06 , B65G1/127 , H01L21/67379 , H01L21/6773 , B65G2201/0297
摘要： A transfer apparatus includes a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate, an upper plate on the lower plate and configured to support a wafer stacking box on an upper surface of the upper plate, the upper plate including an upper link arm, and an upper support that is fixed to the upper surface of the upper plate, and a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box. The upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.
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公开(公告)号：US20230253227A1
公开(公告)日：2023-08-10
申请号：US17946727
申请日：2022-09-16
发明人： Seunggyu Kang , Jeonghun Lim , Youngwook Kim , Chuljun Park , Yongjun Ahn , Sangkyung Lee , Hyunwoo Lee
IPC分类号： H01L21/677 , H01L21/67 , H02J50/12 , H02J50/90
CPC分类号： H01L21/67742 , H01L21/67259 , H02J50/12 , H02J50/90 , H01L21/6773 , H01L21/67736 , H01L21/67294 , H01M10/486
摘要： A substrate transfer system and method includes a mobile robot configured to handle a substrate carrier and comprising a power receiver; a mobile robot interface device configured to handle the substrate carrier and comprising a power feeder configured to supply an electromotive force to the power receiver of the mobile robot; at least one of: a first actuator configured to move the power feeder to adjust a distance between the power feeder and the power receiver and a second actuator configured to move the power receiver to adjust a distance between the power feeder and the power receiver; an identification tag disposed on any one of the mobile robot and the mobile robot interface device; a tag reader configured to recognize the identification tag; and a controller configured to control an operation of the mobile robot and to control an operation of the first and/or second actuator and the controller is further configured to control the first and/or second actuator to adjust the distance between the power feeder and the power receiver.
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公开(公告)号：US20240327136A1
公开(公告)日：2024-10-03
申请号：US18383656
申请日：2023-10-25
发明人： Minkyun LEE , Seunggyu Kang , Hyunjae Kang , Sangmin Kim , Youngwook Kim , Jaesung Byun , Yongjun Ahn , Yongjun Ahn , Hyunwoo Lee , Jeonghun Lim , Junhyuk Chang
IPC分类号： B65G47/90 , H01L21/677 , H01L21/687
CPC分类号： B65G47/90 , H01L21/67712 , H01L21/67769 , H01L21/68707
摘要： An apparatus includes an elevator, a plurality of storages, a plurality of first robots and a plurality of second robots. The elevator may elevate a vehicle containing a plurality of semiconductor device carriers to position the vehicle at each of a plurality of process floors. At least one of the plurality of storages may be provided at each of the plurality of process floors to store the plurality of semiconductor device carriers. At least one of the plurality of first robots may be provided at each of the plurality of process floors to transfer the vehicle between the elevator and a respective one of the plurality of process floors. At least one of the second robots may be provided at each of the plurality of process floors to transfer at least one of the plurality of semiconductor device carriers between the vehicle and one of the plurality of storages.
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公开(公告)号：US12103772B2
公开(公告)日：2024-10-01
申请号：US17847542
申请日：2022-06-23
发明人： Minji Kim , Sangmin Kim , Youngwook Kim , Ginam Park , Chuljun Park , Sanga Bang , Yongjun Ahn , Sangkyung Lee , Hyunwoo Lee , Jeonghun Lim
CPC分类号： B65G1/0478 , B65G49/063 , B65G2201/0297
摘要： A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.
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