公开(公告)号：US20230162970A1

公开(公告)日：2023-05-25

申请号：US18158276

申请日：2023-01-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ho-Young KIM ,  Chae Lyung Kim ,  Tae-Hong Kim ,  Yungjun Kim ,  Boun Yoon ,  Sol Han ,  Joonoh Kim

IPC: H01L21/02 ,  B08B3/02 ,  B08B5/02 ,  H01L21/67 ,  B05B1/14 ,  B05B7/08 ,  B05B7/00

CPC classification number: H01L21/02057 ,  B08B3/024 ,  B08B5/02 ,  H01L21/67051 ,  B05B1/14 ,  B05B7/08 ,  B05B7/0075

Abstract: A cleaning apparatus includes a gas supply line and a cleaning liquid supply line. A nozzle is connected to the gas and the cleaning liquid supply lines. The nozzle applies the cleaning liquid to a substrate. A gas entrance port at a top of a body of the nozzle is connected to the gas supply line. A first cleaning liquid entrance port is disposed on a sidewall of the nozzle body and is connected to the cleaning liquid supply line. A fluid injection port is disposed at a bottom of the nozzle body and discharges both the gas and the cleaning liquid. An internal passage of the nozzle body connects each of the gas entrance port and the first cleaning liquid entrance port to the fluid injection port. The fluid injection port has a diameter that is greater than a diameter of the first cleaning liquid entrance port.

公开(公告)号：US20220165562A1

公开(公告)日：2022-05-26

申请号：US17650710

申请日：2022-02-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ho-Young Kim ,  Chae Lyoung Kim ,  Tae-Hong Kim ,  Youngjun Kim ,  Boun Yoon ,  Sol Han ,  Joonoh Kim

IPC: H01L21/02 ,  B08B3/02 ,  B08B5/02 ,  H01L21/67 ,  B05B1/14 ,  B05B7/08 ,  B05B7/00

Abstract: A cleaning apparatus includes a gas supply line and a cleaning liquid supply line. A nozzle is connected to the gas and the cleaning liquid supply lines. The nozzle applies the cleaning liquid to a substrate. A gas entrance port at a top of a body of the nozzle is connected to the gas supply line. A first cleaning liquid entrance port is disposed on a sidewall of the nozzle body and is connected to the cleaning liquid supply line. A fluid injection port is disposed at a bottom of the nozzle body and discharges both the gas and the cleaning liquid. An internal passage of the nozzle body connects each of the gas entrance port and the first cleaning liquid entrance port to the fluid injection port. The fluid injection port has a diameter that is greater than a diameter of the first cleaning liquid entrance port.