公开(公告)号：US20240077507A1

公开(公告)日：2024-03-07

申请号：US18234692

申请日：2023-08-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seonhwa Go ,  Younghye Kim ,  Jiyun Lim ,  Sangyoon Shin

IPC: G01N35/02 ,  G01N35/10

CPC classification number: G01N35/025 ,  G01N35/1009 ,  G01N2035/0465

Abstract: A sample analysis apparatus includes a first chamber that performs a first heating process for heating a small sample and a second chamber including a second chamber housing in which a second heating process for heating a wafer sample is performed. The first chamber includes a first chamber housing in which the first heating process is performed, a first support that supports the small sample, a first heating device that heats the small sample, an accommodation housing in which the small sample is accommodated, a sample tray arranged in the accommodation space, sample container configured to store the small sample, and a transfer module configured to transfer the sample container and the small sample from the accommodation housing to the first chamber.

公开(公告)号：US12153016B2

公开(公告)日：2024-11-26

申请号：US17499479

申请日：2021-10-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dusik Bae ,  Euihyun Roh ,  Sangyoon Shin ,  Yongjun Ahn ,  Youngwook Kim ,  Mira Park ,  Hyunwoo Lee ,  Jeonghun Lim ,  Wonil Choi ,  Sojung Park ,  Jiwoong Shin ,  Sangkyung Lee ,  Dongchol Choi

IPC: G08B21/10 ,  G01N1/14 ,  G01N27/22 ,  G01N27/27 ,  G01N27/64 ,  H01L21/67

Abstract: A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.

公开(公告)号：US20230285897A1

公开(公告)日：2023-09-14

申请号：US18100209

申请日：2023-01-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mira Park ,  Hoigu Jang ,  Jiwoong Shin ,  Kieung Lee ,  Yeonju Ji ,  Jiyoung Kim ,  Joonseok Min ,  Dusik Bae ,  Dongil Shin ,  Sangyoon Shin ,  Minseon Lee ,  Seungbin Lee

IPC: B01D53/82 ,  B01D53/04 ,  B01D53/72 ,  G03F7/20 ,  B01J20/20 ,  B01J20/18 ,  B01J20/26 ,  B01J20/28 ,  H01L21/67

CPC classification number: B01D53/82 ,  B01D53/04 ,  B01D53/72 ,  B01J20/18 ,  B01J20/20 ,  B01J20/261 ,  B01J20/28004 ,  B01J20/28035 ,  B01J20/2804 ,  B01J20/2808 ,  B01J20/28083 ,  G03F7/70858 ,  H01L21/67017 ,  B01D2251/512 ,  B01D2253/102 ,  B01D2253/108 ,  B01D2253/206 ,  B01D2253/25 ,  B01D2253/304 ,  B01D2253/308 ,  B01D2257/556

Abstract: A gas purifying filter includes a first gas permeable body having a gas inlet surface; a first adsorption layer disposed on the first gas permeable body and including activated carbon on which a phosphoric acid-based compound satisfying the following Formula 1 is supported; a second adsorption layer disposed on the first adsorption layer and including a hydrophobic zeolite having a SiO2/Al2O3 value of about 50 or more; and a second gas permeable body disposed on the second adsorption layer and having a gas outlet surface,





where n is an integer greater than or equal to 1.