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公开(公告)号:US10668403B2
公开(公告)日:2020-06-02
申请号:US15482549
申请日:2017-04-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jung-Min Oh , Ji-Hoon Jeong , Dong-Gyun Han , Kun-Tack Lee , Hyo-San Lee , Yong-Myung Jun
Abstract: A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.