公开(公告)号：US10668403B2

公开(公告)日：2020-06-02

申请号：US15482549

申请日：2017-04-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jung-Min Oh ,  Ji-Hoon Jeong ,  Dong-Gyun Han ,  Kun-Tack Lee ,  Hyo-San Lee ,  Yong-Myung Jun

IPC: B01D53/02 ,  B01D11/04 ,  G01N21/3554 ,  H01L21/67 ,  H01L21/02 ,  B01D11/02

Abstract: A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.